The highly reliable hydrogen impurity testing system includes a sensor unit installed in an atmosphere with highly concentrated hydrogen containing toxic impurities, a heater unit capable of heating the sensor unit, and a system controller controlling the sensor unit and the heater unit. The heater unit includes a semiconductor substrate, an impurity layer of a first conductive type, a metal oxide layer, and a metal electrode layer capable of adsorbing toxic impurities being present on the surface of the metal oxide layer. The system controller detects the concentration of the toxic impurities by measuring the change in work function of the metal electrode layer according to the type and concentration of the toxic impurities, and performs a refreshing operation of desorbing the toxic impurities adsorbed on the metal electrode layer by heating the metal electrode layer with the heater unit based on the result of detection.

A system and method for monitoring environmental state that includes a structure element with a base substrate and at least one reflector element integrated to the base substrate, wherein the reflector element is physically configured with at least one response signature that is discretely expressed based on an substance induced environmental condition of the reflector element; and a remote monitor device comprising a transmitter and receiver unit and a controller, wherein the monitor device is configured to interrogate the structure element; detect a response signature corresponding to at least the one reflector element; and map the response signature to a corresponding substance induced environmental condition.

A fuel detection film includes a cyclic olefin copolymer that is insoluble in acyclic saturated hydrocarbons. The fuel detection film has a porous structure that defines a plurality of pores. The plurality of pores are configured to allow flow of a lubrication oil through the fuel detection film via the plurality of pores. A housing is configured to couple to a pipe flowing the lubrication oil. The housing defines a slot. The slot is configured to hold the fuel detection film. The fuel detection film, while held by the slot of the housing that is coupled to the pipe as the lubrication oil flows in the pipe, is configured to at least partially dissolve in a presence of an aromatic hydrocarbon in the lubrication oil flowing through the fuel detection film.

A Kelvin probe system is provided. The invention is achieved using a rotating Kelvin probe head comprising a Kelvin probe face is provided on a side face of the Kelvin probe head.

An operating method of a processing liquid supply apparatus which supplies a processing liquid to a substrate from a processing liquid supply path via a nozzle includes measuring a surface potential of a first electrode which is configured to be in contact with the processing liquid of the processing liquid supply path. The operating method further includes displaying the measured surface potential in the measuring of the surface potential of the first electrode.

An electrode rod 71 serving as a first electrode is provided to be in contact with a flow path member and a processing liquid of a processing liquid supply path 2. If the processing liquid is flown in the processing liquid supply path 2, static electricity is generated by friction so that the processing liquid and the flow path member is electrically charged. By allowing the electrode rod 71 to be closely contacted with the flow path member, the amount of electric charges corresponding to the sum of the charge amounts of the processing liquid and the flow path member is measured as a surface potential of the first electrode by a surface potential measuring unit 77. The measured surface potential is displayed on a display unit 201.

A method and system for determining a density of a fluid is provided. The method is carried out using an electrospraying apparatus connected in the system. At a first step fluid is introduced into an emitter of the electrospraying apparatus. A voltage is applied between the emitter and a counter-electrode spaced apart from the emitter for a number of intermittent time periods, wherein the duration of at least some of the time periods during which the voltage is applied progressively decreases. The current between the emitter and the counter-electrode is measured for each time period during which a voltage is applied and the shortest time period for which a current reading is obtained is recorded. The shortest time period is used to calculate the density of the fluid in the emitter.

An ion detection device includes an ion sensor having a sensitive film immersed in an aqueous solution and outputting an output signal in accordance with a potential change of the sensitive film, and an adjuster acquiring the output signal of the ion sensor and adjusting a drive signal for driving the ion sensor to reduce an offset from a predetermined reference value in the output signal.

Provided is a pulse operating method for an FET-type sensor having a horizontal floating electrode. The pulse operating method for an FET-type sensor includes a reading preparation step of applying one or more pre-bias voltage pulses (V.sub.pre) to the control electrode and a reading step of applying one or more read-bias voltage pulses (V.sub.rCG) to the control electrode and applying a voltage pulse (V.sub.rDs) synchronized with the read-bias voltage pulse between a drain and a source. The reactivity and the recovery time can be improved according to the width or the magnitude of the pre-bias voltage pulse applied to the input terminal of the control electrode, and the oxidizing gas and the reducing gas can be distinguished. In addition, since current flows to the FET-type sensor only in the read-biasing period, power consumption can be greatly reduced.

An electrode rod 71 serving as a first electrode is provided to be in contact with a flow path member and a processing liquid of a processing liquid supply path 2. If the processing liquid is flown in the processing liquid supply path 2, static electricity is generated by friction so that the processing liquid and the flow path member is electrically charged. By allowing the electrode rod 71 to be closely contacted with the flow path member, the amount of electric charges corresponding to the sum of the charge amounts of the processing liquid and the flow path member is measured as a surface potential of the first electrode by a surface potential measuring unit 77. The measured surface potential is displayed on a display unit 201.