A method for characterizing a sample, by estimating a plurality of characteristic thicknesses, each being associated with a calibration material, including acquiring an energy spectrum (S.sup.ech) transmitted through this sample, located in an X and/or gamma spectral band; for each spectrum of a plurality of calibration spectra (s.sup.base(L.sub.k; L.sub.t)) calculating a likelihood from said calibration spectrum (S.sup.base(L.sub.k; L.sub.t)), and from the spectrum transmitted through the sample (S.sup.ech), each calibration spectrum (S.sup.base(L.sub.k; L.sub.t)) corresponding to the energy spectrum transmitted through a stack of gauge blocks, each formed of a known thickness of a calibration material; estimating the characteristic thicknesses (L.sub.1, L.sub.2) associated with the sample according to the criterion of maximum likelihood.

A defect inspection device, a defect inspection method, and a computer readable medium accurately and rapidly detect a minute defect and a defect candidate indicated by a signal in a received light image of an inspection object. A defect inspection device includes an image acquisition unit, an input unit, an exposure condition acquisition unit, memory, and a parameter determination unit that determines an image processing parameter for a received light image based on an exposure condition acquired by the exposure condition acquisition unit, a physical feature received by the input unit, and exposure information stored in memory, and an image processing unit extracts a defect candidate image which corresponds to a defect candidate of the inspection object from the received light image by performing image processing of the received light image based on the image processing parameter determined by the parameter determination unit.

X-ray generation apparatus includes X-ray generation tube having cathode and anode, voltage supply for supplying voltage to the X-ray generation tube via conductive line, storage container including first portion forming first space storing the voltage supply, second portion forming second space having width smaller than that of the first space and storing the X-ray generation tube, and connecting portion connecting the first and second portions to form internal space in which the first space and the second space communicate, and insulating member arranged in the internal space to block shortest path between the conductive line and convex portion of the connecting portion. The insulating member is formed by connecting members by adhesive material, and is configured to block linear path between the adhesive material and the conductive line and linear path between the adhesive material and the cathode.

In an image collection system using a transmission electron microscope, a useless collection time to be spent collecting images in each of which particles overlap each other or no particle is contained, and a date volume are reduced. The image collection system includes: a control unit that moves an observation field of view in the transmission electron microscope and overlaps each other electron waves that propagate through spatially different portions within the observation field of view; a photographing unit that acquires the overlapped electron waves as an observation image; and a determination unit that determines whether a particle is present within the observation field of view.

Methods and systems for characterizing dimensions and material properties of semiconductor devices by transmission small angle x-ray scatterometry (TSAXS) systems having relatively small tool footprint are described herein. The methods and systems described herein enable Q space resolution adequate for metrology of semiconductor structures with reduced optical path length. In general, the x-ray beam is focused closer to the wafer surface for relatively small targets and closer to the detector for relatively large targets. In some embodiments, a high resolution detector with small point spread function (PSF) is employed to mitigate detector PSF limits on achievable Q resolution. In some embodiments, the detector locates an incident photon with sub-pixel accuracy by determining the centroid of a cloud of electrons stimulated by the photon conversion event. In some embodiments, the detector resolves one or more x-ray photon energies in addition to location of incidence.

The present disclosure discloses a ray transmission and fluorescence CT imaging system and method. The system comprises: a ray source configured to emit a beam of rays; a rotational scanning device configured to perform rotational CT scanning on an object to be inspected; a transmission CT detector configured to receive the beam of rays which has passed through the object; a fluorescence CT detector configured to receive fluorescent photons excited by irradiation of the beam of rays on the object; a data acquisition unit configured to acquire a transmission data signal and a fluorescence data signal respectively; and a control and data processing unit configured to control the ray source to emit the beam of rays, control the rotational scanning device to perform the rotational CT scanning, and obtain a transmission CT image and a fluorescence CT image simultaneously based on the transmission data signal and the fluorescence data signal.

A radiographic phase imaging device that provides for examination, even for a comparatively large structure, with high sensitivity, includes a first arm and a second arm that are arranged in a state having a space formed between them in which it is possible to arrange a subject. A radiation source section is attached to the first arm. The radiation source section includes a radiation source that generates radiation, and a G1 grating that allows the radiation to pass through. A detection section is attached to the second arm. The detection section acquires an image of radiation that has passed through the G1 grating and the subject. The first arm and the second arm are configured so that it is possible to move the radiation source section and the detection section within a three dimensional space.

X-ray generation apparatus includes X-ray generation tube having cathode and anode, voltage supply for supplying voltage to the X-ray generation tube via conductive line, storage container including first portion forming first space storing the voltage supply, second portion forming second space having width smaller than that of the first space and storing the X-ray generation tube, and connecting portion connecting the first and second portions to form internal space in which the first space and the second space communicate, and insulating member arranged in the internal space to block shortest path between the conductive line and convex portion of the connecting portion. The insulating member is formed by connecting members by adhesive material, and is configured to block linear path between the adhesive material and the conductive line and linear path between the adhesive material and the cathode.

The present disclosure relates to the field of a cabinet X-ray incorporating an X-ray tube, an X-ray detector, and a real-time camera, either high definition or standard resolution, for the production of organic and non-organic images and a system and method wherein the attained X-ray radiograph may be colorized to designate different densities. In particular, the disclosure relates to a system and method with corresponding apparatus for capturing a real-time image simultaneously with the X-ray image allowing a cabinet X-ray unit to attain and optimize images either in grayscale or colorized with exact orientation of the 2 images and display the resultant images overlaid/blended upon each other and then saved and transmitted in various formats, i.e. .jpeg., .tiff, DICOM, etc.

An X-ray collimator (30) that comprises: a collimator body (31) comprising: a collimation conduit (32) provided with an inlet (320), configured to be connected to an X-ray source (20) for the inlet of a beam (B) of X-rays, and an outlet (321), configured to emit a collimated portion (B1) of the X-ray beam (B); and a derivation conduit (33) inclined with respect to the collimation conduit (32), wherein the derivation conduit (33) is provided with an inlet (330), configured to be connected to the X-ray source (20) for the inlet of a peripheral portion (B2) of the same X-ray beam (B) emitted by the source (20), and an outlet (331); a reference detector (40) fixed to the collimator body (31) and provided with an inlet window (41) facing the outlet (331) of the derivation conduit (33).