Information of constituent substances of an object is reconstructed with high accuracy without being influenced by a decrease in measurement accuracy even if measurement in which a tube voltage is changed is not performed. A CT apparatus includes: a detection unit configured to obtain measurement information based on a detection result of radiation irradiated based on a constant tube voltage; an obtaining unit configured to obtain second measurement information of the radiation based on a moment of the measurement information obtained by detecting the radiation a plurality of times; a classification unit configured to classify an object into a plurality of substances; and a reconstruction unit configured to reconstruct the information of the constituent substances of the object based on the second information.

A system and a method for volume inspection of semiconductor wafers with increased throughput are configured for milling and imaging a reduced number or areas of appropriate cross-sections surfaces in an inspection volume and determining inspection parameters of the 3D objects from the cross-section surface images. The method and device can be utilized for quantitative metrology, defect detection, process monitoring, defect review, and inspection of integrated circuits within semiconductor wafers.

A combined handheld XRF and LIBS system and method includes an XRF subsystem with an X-ray source operated at a fixed medium voltage and configured to deliver X-rays to a sample without passing through a mechanized filter and a detector for detecting fluoresced radiation from the sample. The LIBS subsystem includes a low power laser source for delivering a laser beam to the sample and a narrow wavelength range spectrometer subsystem for analyzing optical emissions from the sample. The X-ray source is operated at the fixed medium voltage to analyze the sample for a first group of elements, namely, transition and/or heavy metals. The low power laser source is operated to analyze the sample for a second group of elements the XRF subsystem cannot reliably detect, namely, C, Be, Li, Na, and/or B, and to analyze the sample for a third group of elements the XRF subsystem cannot reliably detect at the fixed voltage, namely, Al, Si, and/or Mg, or where the XRF subsystem would require higher tube voltage, namely Cd, Ag, In, Sn, Sb, and/or Ba; and/or rare earth elements.

A focused ion beam apparatus includes a focused ion beam irradiation mechanism that forms first and second cross-sections in a sample. A first image generation unit generates respective first images, either reflected electron images or secondary electron images, of the first and second cross-sections, and a second image generation unit generates a second image that is an EDS image of the first cross-section. A control section generates a three-dimensional image of a specific composition present in the sample based on the first images and the second image.

The invention describes a method and a device (9) for executing a method of X-ray nano-radiography and nanotomography using a scanning electron microscope (1) consisting of the focus of an electron beam (2) from an electron microscope (1) onto one point of the surface of a scanned sample (3), the emission of bremsstrahlung and fluorescent radiation (6) from the focal point of the impact of the electron beam (2), the sensing of the scanned sample (3), and recording an image of the structure of the scanned sample (3) based on the change of intensities of the bremsstrahlung and fluorescent radiation (6) by the imaging detector (7) arranged behind the sample (3).

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

Performance of an inspection device is improved. For example, in an inspection device 100 including an electron detection element 30 and an X-ray detection element 40, the electron detection element 30 is provided between an electron source 10 and a sample stage 14 on which a sample 20 can be provided, and the X-ray detection element 40 is provided between the electron detection element 30 and the electron source 10, and the electron detection element 30 and the X-ray detection element 40 are provided to overlap each other in a plan view.

An apparatus comprises a neutron detector. The neutron detector comprises a conversion layer comprising a mixture of a neutron absorbing material and a scintillation material; and a photodetector optically coupled to the conversion layer and arranged to detect photons generated as a result of neutron absorption events in the conversion layer; wherein the apparatus is adapted to be carried by a user and the conversion layer is positioned within the neutron detector such that when the apparatus is being carried by a user in normal use neutrons are absorbed in the conversion layer after passing through the user such that the user's body provides a neutron moderating effect. In some cases the apparatus may be carried in association with a backpack or clothing worn by a user, for example, the neutron detector may be sized to fit in a pocket. In other cases the apparatus may be a hand-held device with the conversion layer arranged within a handle of the device to be gripped by a user when being carried.

An apparatus comprises a neutron detector. The neutron detector comprises a conversion layer comprising a mixture of a neutron absorbing material and a scintillation material; and a photodetector optically coupled to the conversion layer and arranged to detect photons generated as a result of neutron absorption events in the conversion layer; wherein the apparatus is adapted to be carried by a user and the conversion layer is positioned within the neutron detector such that when the apparatus is being carried by a user in normal use neutrons are absorbed in the conversion layer after passing through the user such that the user's body provides a neutron moderating effect. In some cases the apparatus may be carried in association with a backpack or clothing worn by a user, for example, the neutron detector may be sized to fit in a pocket. In other cases the apparatus may be a hand-held device with the conversion layer arranged within a handle of the device to be gripped by a user when being carried.

The present disclosure relates to detection systems and methods. One illustrative detection system may include a distributed radiation source having a plurality of radiation source focus points, which irradiate an object under detection, wherein the plurality of radiation source focus points are divided into a certain number of groups, and a primary collimator that limits rays of each of the radiation source focus points such that the rays emit into an XRD detection device. An XRD detection device may include a plurality of XRD detectors that are divided into the same number of groups as the radiation source focus points, wherein XRD detectors in a same group are arranged to be separated by XRD detectors in other groups, and rays of each of the radiation source focus points are received by XRD detectors having the same group number as the group number of the radiation source focus point.