The X-ray imaging system of this invention includes: a detecting member which detects a salt and pepper noise region in the reconstructed image based on at least one characteristic value of the moire stripe image not including the object and/or the moire stripe image including the object; a masked-image generating member which generates a masked image for identifying the detected salt and pepper noise region; and an image processing member which masks or trims at least one of the reconstructed image and the moire stripe images with the generated masked image.

A method for analyzing an object includes irradiating the object with incident photon radiation and acquiring an energy spectrum scattered by the material using a spectrometric detector in scatter mode. An energy spectrum transmitted by the material is acquired using a spectrometric detector in transmission mode. A signature (f) is reconstructed representing the object, both from the scatter spectrum measured and from the transmission spectrum measured, and the reconstructed signature thereof is compared with signatures of standard materials.

Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.

A method for analyzing an object, includes irradiating the object with incident photon radiation, acquiring a spectrum transmitted by the object using a spectrometric transmission detector, determining at least one first property of the object from the transmission spectrum, verifying that at least one doubt criterion relating to the first property of the object is met, and translating the fact that the object contains a material that is potentially dubious for the application under consideration. A second part, carried out only when the doubt criterion is met, includes acquiring an energy spectrum scattered by the object using a spectrometric scattering detector at an angle of 1 to 15, and determining a second property of the object from at least the scatter spectrum and comparing at least the second property of the object with properties of standard materials stored in a database to identify the objects composition material.

Semiconductor structures can be investigated, e.g., in an in-line quality check. An x-ray scattering measurement, e.g., CD-SAXS, can be used for wafer metrology. The x-ray scattering measurement can be configured based on a slice-and-imaging tomographic measurement using a dual-beam device, e.g., including a focused ion beam device and a scanning electron microscope.

The present invention relates to an intelligent measuring system which is composed by integrating X-Rays, Gamma-Rays, ultraviolet rays, Visible light, near-mid-far infrared rays, and reflection and transmission methods with fiber cables, optical systems, and optical sensors to microwave and radio waves by using artificial intelligence and statistical methods. Particularly, the present comprises a hybrid optical measurement system that can be used in all areas to determine elements and molecules in solid, liquid, and gas phases, as well as specifically to determine the elements with the properties of moisture, protein, fat, and carbohydrate etc.

A method of detecting a material, and corresponding system, include irradiating a target during an irradiation period with source x-rays; detecting imaging x-rays and x-ray fluorescence received from the target resulting from the irradiating during the irradiation period; and providing an indication of the material being potentially present in the target, the indication based on both analyzing an x-ray image generated from the detected imaging x-rays and on analyzing the detected x-ray fluorescence for characteristic x-ray fluorescence that can be emitted from the material.

An inspection portal includes a first x-ray source configured to emit a first beam, a first backscatter detector configured to detect backscatter from the first beam, a second x-ray source configured to emit a second beam, a second backscatter detector configured to detect backscatter from the second beam, and at least one first collimator and at least one second collimator, each oriented to detect backscatter from the associated beam and to block scatter from the other beam. The first and second backscatter detectors are configured to weight signals acquired using each of their detector element based on the first and second beams. The first backscatter detector is configured to use signal processing techniques to mitigate crosstalk due to scatter from the second beam, and the second backscatter detector is configured to use the signal processing techniques to mitigate crosstalk due to scatter from the first beam.

Systems and methods of observing a sample using an electron beam apparatus are disclosed. The electron beam apparatus comprises an electron source configured to generate a primary electron beam along a primary optical axis, and a first electron detector having a first detection layer substantially parallel to the primary optical axis and configured to detect a first portion of a plurality of signal electrons generated from a probe spot on a sample. The method may comprise generating a plurality of signal electrons and detecting the signal electrons using the first electron detector substantially parallel to the primary optical axis of the primary electron beam. A method of configuring an electrostatic element or a magnetic element to detect backscattered electrons may include disposing an electron detector on an inner surface of the electrostatic or magnetic element and depositing a conducting layer on the inner surface of the electron detector.

The present disclosure relates to an inspection tool having a charged particle source to provide a charged particle beam, a sample holder to hold a sample, and a scanning system configured to scan the charged particle beam over an area of the sample in a scanning pattern. The scanning system may comprise a microwave or RF wave supporting structure to provide a first oscillating electromagnetic field to periodically deflect the charged particle beam in order to scan the charged particle beam over the area of the sample. The charged particle beam may be an electron beam, so that the inspection tool may be a scanning electron microscope. The scanning system may be configured to continuously scan the charged particle beam over the area of the sample.