A method and a system for providing calibration for a photon counting detector forward model for material decomposition. The flux independent weighted bin response function is estimated using the expectation maximization method, and then used to estimate the pileup correction terms at each tube voltage setting for each detector pixel.

Provided are an image acquisition device and an image acquisition method capable of acquiring the internal and external contours of a measured object with a high degree of accuracy. An image acquisition device 1 includes: a first X-ray source 10 that applies X-rays having a first focal point size; a first detector 20 that detects X-rays applied from the first X-ray source 10 and having passed through a measured object O; a first image generation means 30 that generates a first X-ray CT image on the basis of the X-rays detected by the first detector 20; a second X-ray source 40 that applies X-rays having a second focal point size smaller than the first focal point size; a second detector 50 that detects X-rays applied from the second X-ray source and having passed through the measured object O; a second image generation means 60 that generates a second X-ray CT image on the basis of the X-rays detected by the second detector 50; and an image correction means 70 that corrects the first X-ray CT image generated by the first image generation means 30 on the basis of the second X-ray CT image generated by the second image generation means 60.

An x-ray fluorescence system and method of fabrication are provided which include a titanium x-ray source, a focusing, doubly-curved lithium fluoride (LiF) crystal optic, and a detector. The titanium x-ray source includes a titanium target on which electrons impinge to generate a diverging x-ray beam with a titanium-based characteristic energy, and the focusing, doubly-curved LiF crystal optic monochromates and focuses the diverging x-ray beam from the titanium x-ray source to provide a monochromated and focused x-ray excitation beam directed to impinge on a sample. The crystal optic and the titanium x-ray source operate at a Bragg angle which facilitates polarization within the x-ray fluorescence system. The detector receives fluorescence from the sample induced by the x-ray excitation beam impinging thereon, with the fluorescence is indicative of a concentration of at least one element in the sample.

A defect inspection system includes an X-ray generator that generates X-ray to be irradiated to a structure, and an X-ray detector that detects the X-ray generated by the X-ray generator and transmitted through the structure. In particular, the X-ray generator is configured to be moved by a first transporting means, and the X-ray detector is configured to be moved by a second transporting means. The system further includes a control unit configured to control and operate the first transporting means and the second transporting means.

A risk of breakage of a sample holder can be reduced and a biochemical sample or a liquid sample can be observed easily and with a high observation throughput. A sample holder 101 holding a sample includes: a sample chamber including a first insulating thin film 110 and a second insulating thin film 111 that sandwich and hold the sample 200 in a liquid or gel form and face each other, a vacuum partition wall inside which the sample chamber holding the sample is fixed in a state in which the thin film is exposed to a surrounding atmosphere, and whose internal space is kept at a degree of vacuum at least lower than that of the sample room at the time of observation of the sample, a detection electrode 820 disposed to face the second insulating thin film in a state in which the sample chamber is fixed to the vacuum partition wall, and a signal detection unit 50 connected to the detection electrode. Before the surrounding atmosphere of the sample holder is evacuated from an atmospheric pressure to a vacuum, the charged particle beam device receives a detection signal from the signal detection unit via a connector and detects an abnormality of the sample chamber based on the detection signal.

An apparatus for bulk ore sorting using gamma activation analysis is disclosed. The apparatus includes a conveyor system that includes one or more conveyor belts, surrounded by one or more radiation shields, to transport ore material along a transport path. A pulsed X-ray radiation source is configured to irradiate ore material at an irradiation region and one or more detectors are configured to detect a gamma radiation output from irradiated ore material at a detection region. The transport path has a bend, located between the irradiation region and the detection region, and about a vertical axis, of at least 45 degrees. The one or more detectors are configured to detect a radiation output from the irradiated ore material at times between X-ray pulses of the pulsed X-ray radiation source irradiating the ore material.

The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

A method and a device for determining the material properties of a polycrystalline, in particular metallic, product during production or quality control of the polycrystalline, in particular metallic, product by means of X-ray diffraction using at least one X-ray source and at least one X-ray detector. In this case, an X-ray generated by the X-ray source is directed onto a surface of the polycrystalline product and the resulting diffraction image of the X-ray is recorded by the X-ray detector. After exiting the X-ray source, the X-ray is passed through an X-ray mirror, wherein the X-ray is both monochromatized and focused, by the X-ray mirror, in the direction of the polycrystalline product and/or the X-ray detector, and then reaches a surface of the metallic product.