In an embodiment, a method of navigational calibration for an x-ray inspection system including an optical camera is provided. The method employs a novel two-dimensional calibration phantom. The calibration phantom can be employed to validate a navigational calibration between positions within camera images and an x-ray beam axis. The calibration phantom can be further employed to identify and compensate for incorrect navigational calibration.

An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.

An X-ray inspection apparatus includes: an X-ray irradiation unit; a transport unit; an X-ray detection unit; and an X-ray shielding door. An inclined portion that is inclined downward from the one side toward the other side in the width direction when seen in the transport direction in the closed state is formed in at least a part of an inner surface of the X-ray shielding door. In the closed state, a lower end portion of the inclined portion in the vertical direction is located closer to the other side of the width direction than a position of an end portion of the transport unit on the one side of the width direction.

A risk of breakage of a sample holder can be reduced and a biochemical sample or a liquid sample can be observed easily and with a high observation throughput. A sample holder 101 holding a sample includes: a sample chamber including a first insulating thin film 110 and a second insulating thin film 111 that sandwich and hold the sample 200 in a liquid or gel form and face each other, a vacuum partition wall inside which the sample chamber holding the sample is fixed in a state in which the thin film is exposed to a surrounding atmosphere, and whose internal space is kept at a degree of vacuum at least lower than that of the sample room at the time of observation of the sample, a detection electrode 820 disposed to face the second insulating thin film in a state in which the sample chamber is fixed to the vacuum partition wall, and a signal detection unit 50 connected to the detection electrode. Before the surrounding atmosphere of the sample holder is evacuated from an atmospheric pressure to a vacuum, the charged particle beam device receives a detection signal from the signal detection unit via a connector and detects an abnormality of the sample chamber based on the detection signal.

The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.

The present disclosure relates to a static CT detection device, including: a shielding body, formed with a detection channel through which an object under detection can pass; a ray source, emitting rays for detecting the object under detection when the object under detection passes through the detection channel; and a detector, for acquiring the rays emitted by the ray source and having passed through the detection channel, wherein the shielding body is formed with an opening portion, and the opening portion extends from an inlet of the detection channel to an outlet of the detection channel.

The electron spectrometer includes an excitation part 100 irradiating a sample with an energy beam, an orbiting part 10 causing electrons emitted from the sample irradiated with the energy beam to orbit, and a detection part 120 detecting the electrons released from the orbiting part 10, in which the orbiting part 10 includes a plurality of pairs of electrodes, the plurality of pairs of electrodes cause the electrons to orbit when an applied voltage is controlled, a part of the plurality of pairs of electrodes are pairs of electrodes to catch which catch the electrons into the orbiting part 10 when an applied voltage is controlled, and a part of the plurality of pairs of electrodes are pairs of electrodes to release which release the electrons from the orbiting part 10 when an applied voltage is controlled.

To review minute defects that were buried in roughness scattered light with an observation device provided with a dark-field microscope, a scanning electron microscope (SEM), and a control unit, the present invention configures the dark-field microscope by installing a filter for blocking a portion of the scattered light, an imaging lens for focusing the scattered light that has passed through the filter, and a detector for dividing the image of the scattered light focused by the imaging lens into the polarization directions converted by a wavelength plate and detecting the resulting images, and the control has a calculation unit for determining the position of a defect candidate detected by another inspection device using the plurality of images separated into polarization directions and detected by the detector.

An X-ray imaging system includes: an X-ray Talbot imaging device that has an object table, an X-ray source, a plurality of gratings, and an X-ray detector, and irradiates the X-ray detector with an X-ray from the X-ray source through an object and the plurality of gratings to acquire a moir image necessary for generation of a reconstructed image of the object; and a tester that is installed on the object table, holds the object, and loads a tensile load or a compressive load on the object, wherein the X-ray Talbot imaging device includes a hardware processor that causes a series of imaging to be performed to acquire the moir image, the tester includes: a base part; and a chuck, and an operation of the chuck is automatically controllable by the hardware processor in conjunction with the X-ray Talbot imaging device.

Systems and methods are provided for scanning an item utilizing an X-ray scanner in order to facilitate a determination of whether the X-ray radiation penetrated through the entirety of the scanned item. Various embodiments comprise a conveying mechanism, an X-ray emitter, a detector, and an X-ray penetration grid (XPG). The XPG may comprise a radiopaque grid that may serve as a reference for determining whether radiation passes through the scanned item, the grid oriented such that the grid members are neither parallel nor perpendicular to the direction of travel. Such orientation may minimize or eliminate ghosted radiation signals included in a visual display of the radiation received by the detector. A scanned item may be oriented with the XPG such that radiation emitted by the X-ray emitter that passes through a portion of the scanned item must also pass through the XPG before being received by the detector.