G01Q10/04

CANTILEVER, SCANNING PROBE MICROSCOPE, AND MEASUREMENT METHOD USING SCANNING PROBE MICROSCOPE

To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever includes a vertex portion that is a portion close to a sample and is covered by a metallic film, a ridge that is connected to the vertex portion and is covered by the metallic film, and an upper corner portion that is connected to the ridge. Here, the upper corner portion and a part of the ridge are portions to be irradiated with excitation light emitted from a light source of the scanning probe microscope.

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

Nanoscale Dynamic Mechanical Analysis via Atomic Force Microscopy (AFM-nDMA)

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

Arrangement Having a Measuring Apparatus for a Scanning Probe Microscope, Scanning Probe Microscope, and Method for Operating

The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.

COATED ACTIVE CANTILEVER PROBES FOR USE IN TOPOGRAPHY IMAGING IN OPAQUE LIQUID ENVIRONMENTS, AND METHODS OF PERFORMING TOPOGRAPHY IMAGING

Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

Measuring device for a scanning probe microscope and method for scanning probe microscopy of a measurement sample by means of a scanning probe microscope

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.

Scanning probe nanotomograph comprising an optical analysis module

The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.

Scanning probe nanotomograph comprising an optical analysis module

The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.