Patent classifications
G01Q20/02
INFORMATION PROVIDING SYSTEM, SERVER DEVICE, AND ANALYZER
Provided is a technique for making a user analyze a sample while providing convenience to the user. An information providing system is provided with a determination unit configured to determine whether or not the part needs to be replaced, a display unit, and a display control unit configured to control the display unit. The display control unit causes the display unit to display supplier information on a supplier of the part when the part needs to be replaced.
METHOD OF IMAGING A SURFACE USING A SCANNING PROBE MICROSCOPE
A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.
METHOD OF IMAGING A SURFACE USING A SCANNING PROBE MICROSCOPE
A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.
Heterodyne scanning probe microscopy method and scanning probe microscopy system
The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.
Heterodyne scanning probe microscopy method and scanning probe microscopy system
The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.
Debris Removal From High Aspect Structures
A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.
TRUNCATED NONLINEAR INTERFEROMETER-BASED SENSOR SYSTEM
A truncated non-linear interferometer-based sensor system includes an input port that receives an optical beam and a non-linear amplifier that amplifies the optical beam with a pump beam and renders a probe beam and a conjugate beam. The system’s local oscillators have a relationship with the respective beams. The system includes a sensor that transduces an input with the probe beam and the conjugate beam or their respective local oscillators. It includes one or more phase-sensitive detectors that detect a phase modulation between the respective local oscillators and the probe beam and the conjugate beam. Output from the phase-sensitive-detectors is based on the detected phase modulation. The phase-sensor-detectors include measurement circuitry that measure the phase signals. The measurement is the sum or difference of the phase signals in which the measured combination exhibit a quantum noise reduction in an intensity difference or a phase sum or an amplitude difference quadrature.
TRUNCATED NONLINEAR INTERFEROMETER-BASED SENSOR SYSTEM
A truncated non-linear interferometer-based sensor system includes an input port that receives an optical beam and a non-linear amplifier that amplifies the optical beam with a pump beam and renders a probe beam and a conjugate beam. The system’s local oscillators have a relationship with the respective beams. The system includes a sensor that transduces an input with the probe beam and the conjugate beam or their respective local oscillators. It includes one or more phase-sensitive detectors that detect a phase modulation between the respective local oscillators and the probe beam and the conjugate beam. Output from the phase-sensitive-detectors is based on the detected phase modulation. The phase-sensor-detectors include measurement circuitry that measure the phase signals. The measurement is the sum or difference of the phase signals in which the measured combination exhibit a quantum noise reduction in an intensity difference or a phase sum or an amplitude difference quadrature.
Atomic force microscopy cantilever, system and method
The surface of the atomic force microscopy (AFM) cantilever is defined by a main cantilever body and an island. The island is partly separated from the main body by a separating space between facing edges of the main body and the island. At least one bridge connects the island to the main body, along a line around which the island is able to rotate through torsion of the at least one bridge. The island has a probe tip located on the island at a position offset from said line and a reflection area. In an AFM a light source directs light to the reflection area and a light spot position detector detects a displacement of a light spot formed from light reflected by the reflection area, for measuring an effect of forces exerted on the probe tip.
Thermally stable, drift resistant probe for a scanning probe microscope and method of manufacture
A probe assembly for a surface analysis instrument such as an atomic force microscope (AFM) that accommodates potential thermal drift effects includes a substrate defining a base of the probe assembly, a cantilever extending from the base and having a distal end, and a reflective pad disposed at or near the distal end. The reflective pad has a lateral dimension (e.g., length) between about twenty-five (25) microns, and can be less than a micron. Ideally, the reflective pad is patterned on the cantilever using photolithography. A corresponding method of manufacture of the thermally stable, drift resistant probe is also provided.