The invention is directed at a fiducial marker design, a fiducial marker, a scanning probe microscopy device and a method of calibrating a position of a probe tip. The fiducial marker design may be used as a fiducial marker for providing a positioning reference, and comprises at least one first reference pattern including at least one first reference element for enabling determination of a relative position of the fiducial marker with respect to a first sensor. The first sensor is configured for operating at a first scale of dimension. The fiducial marker further comprises a second reference pattern, which comprises a regular arrangement of markings, structured or shaped such as to encode therein surface coordinate information. This enables determination of a relative position of each marking with respect to a second sensor configured for operating at a second scale of dimension smaller than the first scale of dimension.

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This platform-on-a-chip approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.

A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip.

A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip.

A tip-enhanced spectroscopy may include a substrate on which liquid containing an analyte is to be positioned, a tip extending from a fixed end to a free end adjacent to a location for the analyte, and a vibration source configured to harmonically vibrate the tip based on a preset natural frequency. The preset natural frequency may be a natural frequency of a tuning fork.

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.

A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.