The invention relates to an apparatus and method for tracking energy consumption. An energy tracking system comprises at least one switching element, at least one inductor and a control block to keep the output voltage at a pre-selected level. The switching elements are configured to apply the source of energy to the inductors. The control block compares the output voltage of the energy tracking system to a reference value and controls the switching of the switched elements in order to transfer energy for the primary voltage into a secondary voltage at the output of the energy tracking system. The electronic device further comprises an ON-time and OFF-time generator and an accumulator wherein the control block is coupled to receive a signal from the ON-time and OFF-time generator and generates switching signals for the at least one switching element in the form of ON-time pulses with a constant width ON-time.

The invention relates to an apparatus and method for tracking energy consumption. An energy tracking system comprises at least one switching element, at least one inductor and a control block to keep the output voltage at a pre-selected level. The switching elements are configured to apply the source of energy to the inductors. The control block compares the output voltage of the energy tracking system to a reference value and controls the switching of the switched elements in order to transfer energy for the primary voltage into a secondary voltage at the output of the energy tracking system. The electronic device further comprises an ON-time and OFF-time generator and an accumulator wherein the control block is coupled to receive a signal from the ON-time and OFF-time generator and generates switching signals for the at least one switching element in the form of ON-time pulses with a constant width ON-time.

Improved techniques for sensing and reporting power consumption from a single or multiple power supplies are disclosed. The disclosed techniques comprise integrated circuit solutions for sensing power. In some embodiments, an integrated circuit comprises circuitry for converting source voltage into a pulse-width modulation (PWM) signal and circuitry for modulating the PWM signal with a current sense signal to determine sensed power.

A temperature controller for a substrate support in a substrate processing system includes a power parameter module configured to calculate a power parameter indicative of power supplied to the substrate support. A coolant temperature parameter module configured to calculate a coolant temperature parameter indicative of a temperature of a coolant supplied to the substrate support. A heat transfer gas parameter module is configured to calculate a heat transfer gas parameter indicative of flow rates of a heat transfer gas supplied to the substrate support. A temperature calculation module is configured to calculate a temperature of the substrate support using the power parameter, the coolant temperature parameter, and the heat transfer gas parameter.

A temperature controller for a substrate support in a substrate processing system includes a power parameter module configured to calculate a power parameter indicative of power supplied to the substrate support. A coolant temperature parameter module configured to calculate a coolant temperature parameter indicative of a temperature of a coolant supplied to the substrate support. A heat transfer gas parameter module is configured to calculate a heat transfer gas parameter indicative of flow rates of a heat transfer gas supplied to the substrate support. A temperature calculation module is configured to calculate a temperature of the substrate support using the power parameter, the coolant temperature parameter, and the heat transfer gas parameter.

A voltage-to-time converter circuit receives a first voltage signal and produces a PWM-modulated signal having a duty-cycle proportional to the first voltage signal. A current integrator circuit receives the PWM-modulated signal from the voltage-to-time converter circuit block and produces an output signal by integrating a current signal from a current source over integration time intervals having a duration which is a function of the duty-cycle of the PWM-modulated signal. The current signal is proportional to a second voltage signal. The output signal is accordingly proportional to a product of the first voltage signal and the current signal, which is furthermore proportional to a product of the first voltage signal and the second voltage signal.

A voltage-to-time converter circuit receives a first voltage signal and produces a PWM-modulated signal having a duty-cycle proportional to the first voltage signal. A current integrator circuit receives the PWM-modulated signal from the voltage-to-time converter circuit block and produces an output signal by integrating a current signal from a current source over integration time intervals having a duration which is a function of the duty-cycle of the PWM-modulated signal. The current signal is proportional to a second voltage signal. The output signal is accordingly proportional to a product of the first voltage signal and the current signal, which is furthermore proportional to a product of the first voltage signal and the second voltage signal.

Attributes of a power system having one or more distributed energy resources are characterized by continuously receiving data comprising a power data stream having at least two components and derived from at least one distributed energy resource. A control data stream comprising at least two components is generated. An error data stream is determined based on a difference between respective components of the power data stream to components of a reference data stream comprising at least two components. The error data stream and the reference data stream are processed to generate the control data stream. The control data stream is continuously output to enable control and/or monitoring of the power flow of at least one distributed energy resource.

An energy consumption monitor for use in an electronic system comprising an integrated circuit such as a microcontroller. The monitor comprises a counter adapted to accumulate pulses developed by a charge source, each pulse indicative of the delivery of one unit of charge to a load circuit. A monitoring facility monitors the counter to develop an energy consumption record over time.

An energy consumption monitor for use in an electronic system comprising an integrated circuit such as a microcontroller. The monitor comprises a counter adapted to accumulate pulses developed by a charge source, each pulse indicative of the delivery of one unit of charge to a load circuit. A monitoring facility monitors the counter to develop an energy consumption record over time.