A method and apparatus for generating high-order harmonics in a solid-state medium comprising integrated semiconductor devices and electronics. The high-order harmonics interact with and are modified by the internal electric field associated with the operation of the integrated semiconductor devices and electronics. Measurement of the high-order harmonics after modification by the internal electric fields amounts to high resolution (temporal and spatial) dynamic imaging of the internal electric fields associated with the integrated semiconductor devices and electronics.

A reticle cleaning system includes a casing, a reticle holder, and a static charge reducing device. The reticle holder is in the casing and configured to hold a reticle. The static charge reducing device is above the reticle holder and includes a fluid generator, an ionizer, and a static charge sensor. The fluid generator is configured to control a humidity condition in the casing. The ionizer is configured to provide ionized air molecules to the reticle. The static charge sensor is configured to detect a static charge value on the reticle, wherein the ionizer is between the fluid generator and the static charge sensor.

A reticle cleaning system includes a casing, a reticle holder, and a static charge reducing device. The reticle holder is in the casing and configured to hold a reticle. The static charge reducing device is above the reticle holder and includes a fluid generator, an ionizer, and a static charge sensor. The fluid generator is configured to control a humidity condition in the casing. The ionizer is configured to provide ionized air molecules to the reticle. The static charge sensor is configured to detect a static charge value on the reticle, wherein the ionizer is between the fluid generator and the static charge sensor.

One embodiment includes an electrometer system. The system includes a sensor cell comprising alkali metal atoms within, and an optical beam system configured to provide at least one optical beam through the sensor cell to provide a first Rydberg energy state of the alkali metal atoms, the at least one optical beam exiting the sensor cell as a detection beam. The system also includes a tuning signal generator configured to generate a tuning signal having a predetermined tuning frequency to adjust an energy difference between the first Rydberg energy state and a second Rydberg energy state of the alkali metal atoms. The system further includes a detection system configured to monitor the detection beam to detect an external signal having a frequency that is approximately equal to the energy difference between the first Rydberg energy state and the second Rydberg energy state based on monitoring the detection beam.

One embodiment includes an electrometer system. The system includes a sensor cell comprising alkali metal atoms within, and an optical beam system configured to provide at least one optical beam through the sensor cell to provide a first Rydberg energy state of the alkali metal atoms, the at least one optical beam exiting the sensor cell as a detection beam. The system also includes a tuning signal generator configured to generate a tuning signal having a predetermined tuning frequency to adjust an energy difference between the first Rydberg energy state and a second Rydberg energy state of the alkali metal atoms. The system further includes a detection system configured to monitor the detection beam to detect an external signal having a frequency that is approximately equal to the energy difference between the first Rydberg energy state and the second Rydberg energy state based on monitoring the detection beam.

An electric field sensor having at least a first and second electrically conductive generally planar electrodes that are spaced apart from each other. A circuit is electrically connected to the electrodes which is configured to generate an output signal proportional to a time derivative of a varying electric field surrounding the electrodes. Optionally, three sets of spaced apart electrodes which are arranged perpendicularly relative to each other are used for three-dimensional measurements of the electric field.

An electric field sensor having at least a first and second electrically conductive generally planar electrodes that are spaced apart from each other. A circuit is electrically connected to the electrodes which is configured to generate an output signal proportional to a time derivative of a varying electric field surrounding the electrodes. Optionally, three sets of spaced apart electrodes which are arranged perpendicularly relative to each other are used for three-dimensional measurements of the electric field.

The disclosure relates to a method for detecting surface electric field distribution of nanostructures. The method includes the following steps of: providing a sample located on an insulated surface of a substrate; spraying first charged nanoparticles to the insulated surface; and blowing vapor to the insulated surface to observe a distribution of the first charged nanoparticles via an optical microscope.

An electrostatic scanner is disclosed. The electrostatic scanner comprises a mirror, one or more actuating comb assemblies, one or more sensing comb assemblies and two or more springs. The one or more sensing comb assemblies each have a movable sensing combteeth set, an upper fixed sensing combteeth set and a lower fixed sensing combteeth set. The upper fixed sensing combteeth set and the movable sensing combteeth set form an in-plane comb configuration. The lower fixed sensing combteeth set and the movable sensing combteeth set form a vertical comb configuration. An upper fixed sensing combtooth of the upper fixed sensing combteeth set is shorter than a lower fixed sensing combtooth of the lower fixed sensing combteeth set.

An electrostatic scanner is disclosed. The electrostatic scanner comprises a mirror, one or more actuating comb assemblies, one or more sensing comb assemblies and two or more springs. The one or more sensing comb assemblies each have a movable sensing combteeth set, an upper fixed sensing combteeth set and a lower fixed sensing combteeth set. The upper fixed sensing combteeth set and the movable sensing combteeth set form an in-plane comb configuration. The lower fixed sensing combteeth set and the movable sensing combteeth set form a vertical comb configuration. An upper fixed sensing combtooth of the upper fixed sensing combteeth set is shorter than a lower fixed sensing combtooth of the lower fixed sensing combteeth set.