Patent classifications
G01R29/24
PUMP AND PROBE TYPE SECOND HARMONIC GENERATION METROLOGY
Various approaches to can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation and in some cases may utilize pump and probe radiation. Other approaches involve determining current flow from a sample illuminated with radiation.
PUMP AND PROBE TYPE SECOND HARMONIC GENERATION METROLOGY
Various approaches to can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation and in some cases may utilize pump and probe radiation. Other approaches involve determining current flow from a sample illuminated with radiation.
Cable junction with integrated space charge detector
This power cable junction (10) has an end part of a power cable which has an electrically insulating material (122). The junction (10) has a predetermined region containing a module for measuring the space charge of the insulating material (122).
Cable junction with integrated space charge detector
This power cable junction (10) has an end part of a power cable which has an electrically insulating material (122). The junction (10) has a predetermined region containing a module for measuring the space charge of the insulating material (122).
Charged particle beam apparatus
A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.
Field-biased second harmonic generation metrology
Various approaches can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation and in some cases may utilize pump and probe radiation. Other approaches involve determining current flow from a sample illuminated with radiation. Decay constants can be measured to provide information regarding the sample. Additionally, electric and/or magnetic field biases can be applied to the sample to provide additional information.
Field-biased second harmonic generation metrology
Various approaches can be used to interrogate a surface such as a surface of a layered semiconductor structure on a semiconductor wafer. Certain approaches employ Second Harmonic Generation and in some cases may utilize pump and probe radiation. Other approaches involve determining current flow from a sample illuminated with radiation. Decay constants can be measured to provide information regarding the sample. Additionally, electric and/or magnetic field biases can be applied to the sample to provide additional information.
System for induced quantum dots for material characterization, qubits, and quantum computers
A method is disclosed, including positioning a lead wire of a gate chip at a distance of less than 10 nm from a semiconductor heterostructure. The heterostructure includes a surface layer and a subsurface layer. The method also includes inducing an electrostatic potential in the subsurface layer by applying a voltage to the lead wire. The method also includes loading a charge carrier into the subsurface layer. The method also includes detecting the charge carrier in the subsurface layer of the semiconductor heterostructure by emitting a radio-frequency pulse using a resonator coupled to the at least one lead wire of the gate chip, detecting a reflected pulse of the emitted radio-frequency pulse, and determining a phase shift of the reflected pulse relative to the emitted radio-frequency pulse. The method also includes characterizing the quantum dot by measuring valley splitting of the quantum dot.
Solid-state charge detector
The present invention is a system and method for providing a charge detector that utilizes small feedback capacitors in a low-noise, high-gain, system that combines a differential topology in a solid-state amplifier implemented in a complementary metal-oxide semiconductor (CMOS) process with active reset, thereby achieving high dynamic range and robust operations. A custom optoelectronic system is used to measure gain, and while operating at a sampling frequency of 10 kHz, the active reset extends the dynamic range of the charge detector.
Solid-state charge detector
The present invention is a system and method for providing a charge detector that utilizes small feedback capacitors in a low-noise, high-gain, system that combines a differential topology in a solid-state amplifier implemented in a complementary metal-oxide semiconductor (CMOS) process with active reset, thereby achieving high dynamic range and robust operations. A custom optoelectronic system is used to measure gain, and while operating at a sampling frequency of 10 kHz, the active reset extends the dynamic range of the charge detector.