A beam positioner can be broadly characterized as including a first acousto-optic (AO) deflector (AOD) operative to diffract an incident beam of linearly polarized laser light, wherein the first AOD has a first diffraction axis and wherein the first AOD is oriented such that the first diffraction axis has a predetermined spatial relationship with the plane of polarization of the linearly polarized laser light. The beam positioner can include at least one phase-shifting reflector arranged within a beam path along which light is propagatable from the first AOD. The at least one phase-shifting reflector can be configured and oriented to rotate the plane of polarization of light diffracted by the first AOD.

Architecture and designs of modulating both amplitude and phase at the same time in spatial light modulation are described. According to one aspect of the present invention, light propagation is controlled in two different directions (e.g., 0 and 45 degrees) to perform both amplitude modulation and phase modulation at the same time in liquid crystals. In one embodiment, a mask is used to form a pattern, where the pattern includes an array of alignment cells or embossed microstructures, a first group of the cells are aligned in the first direction and a second group of the cells are aligned in the second direction. Depending on applications, two cells from the first group and the second group may correspond to a single pixel or two neighboring pixels, resulting in amplitude modulation and phase modulation within the pixel or within an array of pixels.

The disclosure provides a dispersion management method and apparatus based on non-periodic spectral phase jumps. Precise dispersion is provided by virtue of non-periodic spectral phase jumps, the dispersion can be tuned freely with engineering of the phase jump. A device based on non-periodic spectral phase jump also has a wide working bandwidth and could promote the development of ultrafast optics. The method includes: spatially separating a light pulse with different frequency components, and meanwhile, making the light pulse with the different frequency components propagate in parallel; enabling the light pulse with the different frequency components and propagating in parallel to be incident on a non-periodic phase jump device to obtain non-periodic spectral phase jumps, forming a phase grating effect to obtain two ±1-order diffracted pulses having opposite group delays, and introducing frequency dependent relative delay for the different spectral components in the two diffracted pulses.

The disclosure provides a dispersion management method and apparatus based on non-periodic spectral phase jumps. Precise dispersion is provided by virtue of non-periodic spectral phase jumps, the dispersion can be tuned freely with engineering of the phase jump. A device based on non-periodic spectral phase jump also has a wide working bandwidth and could promote the development of ultrafast optics. The method includes: spatially separating a light pulse with different frequency components, and meanwhile, making the light pulse with the different frequency components propagate in parallel; enabling the light pulse with the different frequency components and propagating in parallel to be incident on a non-periodic phase jump device to obtain non-periodic spectral phase jumps, forming a phase grating effect to obtain two ±1-order diffracted pulses having opposite group delays, and introducing frequency dependent relative delay for the different spectral components in the two diffracted pulses.

An imaging device is presented for use in an imaging system capable of improving the image quality. The imaging device has one or more optical systems defining an effective aperture of the imaging device. The imaging device comprises a lens system having an algebraic representation matrix of a diagonalized form defining a first Condition Number, and a phase encoder utility adapted to effect a second Condition Number of an algebraic representation matrix of the imaging device, smaller than said first Condition Number of the lens system.

An imaging device is presented for use in an imaging system capable of improving the image quality. The imaging device has one or more optical systems defining an effective aperture of the imaging device. The imaging device comprises a lens system having an algebraic representation matrix of a diagonalized form defining a first Condition Number, and a phase encoder utility adapted to effect a second Condition Number of an algebraic representation matrix of the imaging device, smaller than said first Condition Number of the lens system.

An optical arrangement for light beam shaping in a light microscope has a first and a second liquid crystal region, each of which has a plurality of independently switchable liquid crystal elements with which a phase of incident light is changeable in a settable manner. A first polarization beam splitter is arranged in such a way that incident light is split in a polarization-dependent manner into reflection light, which is reflected in the direction of the first liquid crystal region, and transmission light, which is transmitted in the direction of the second liquid crystal region. The first or a second polarization beam splitter is arranged such that the reflection light and transmission light are combined onto a common beam path after phase modulation by means of the liquid crystal regions.

Described examples include an apparatus having a phase light modulator. The apparatus also has a first light source configured to direct a first light beam to the phase light modulator, the phase light modulator configured to provide a first modulated light beam directed to a first field of view. The apparatus also has a second light source configured to direct a second light beam to the phase light modulator, the phase light modulator configured to provide a second modulated light beam directed to a second field of view. The apparatus also has a first light detector configured to detect the first modulated light beam as reflected from the first field of view; and a second light detector configured to detect the second modulated light beam as reflected from the second field of view.

Described examples include an apparatus having a phase light modulator. The apparatus also has a first light source configured to direct a first light beam to the phase light modulator, the phase light modulator configured to provide a first modulated light beam directed to a first field of view. The apparatus also has a second light source configured to direct a second light beam to the phase light modulator, the phase light modulator configured to provide a second modulated light beam directed to a second field of view. The apparatus also has a first light detector configured to detect the first modulated light beam as reflected from the first field of view; and a second light detector configured to detect the second modulated light beam as reflected from the second field of view.

A control method for a spatial light modulator for an exposure apparatus having a projection optical system having an optical elements a state of each of which is allowed to be changed, the method sets states of optical elements located in a first area to a first distribution in which a first optical element in a first state and a second optical element in a second state are distributed in a first distribution pattern so that one portion of a light from the optical elements located in the first area enters the projection optical system and setting states of optical elements located in a second area to a second distribution in which the first optical element and the second optical element are distributed in a second distribution pattern to reduce a deterioration of the pattern image caused by a light that enters the projection optical system from the first area.