The invention relates to a sensor comprising: a radiation source to emit radiation having a coherence length towards a sensor target; and a polarizing beam splitter to split radiation diffracted by the sensor target into radiation with a first polarization state and radiation with a second polarization state, wherein the first polarization state is orthogonal to the second polarization state, and wherein the sensor is configured such that after passing the polarizing beam splitter radiation with the first polarization state has an optical path difference relative to radiation with the second polarization state that is larger than the coherence length.

A displacement device (1), including: a stator magnet array (10) including a plurality of first magnets (11) and a plurality of second magnets (12), the first magnets (11) and the second magnets (12) being arranged periodically in a first plane (X-Y plane); and a rotor (20) including at least a first X-coil array (A11) of a plurality of first X-coils (L11) and a first Y-coil array (A12) of a plurality of first Y-coils (L12). A body portion of the first X-coil array (A11) is disposed in a first conductor layer that is substantially parallel to the first plane (X-Y plane), and a body portion of the first Y-coil array (A12) is disposed in a second conductor layer that is substantially parallel to the first plane (X-Y plane), the first conductor layer and the second conductor layer are disposed at a distance from each other in a direction perpendicular to the first plane (X-Y plane). The first X-coils (L11) includes a pair of first XX conductors (C111) extending in a first direction and a pair of first XY conductors (C112) extending in a second direction substantially perpendicular to the first direction. The first direction and the second direction are both substantially parallel to the first plane (X-Y plane). At least one of the pair of the first XX conductors (C111) of the first X-coil (L11) is disposed in the second conductor layer, and the pair of the first XY conductors (C112) are both disposed in the first conductor layer.

A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302, 304) of both the first radiation and second radiation. The illumination path (IP) in one embodiment includes a matching segmented wavelength-selective filter (13, 300), oriented such that a zero order ray passing through the illumination optical system and the collection optical system will be blocked by one of said filters or the other, depending on its wavelength.

A pulse signal is detected from an encoder signal of a rotary encoder. The detected pulse signal is used as a signal for controlling a light exposure timing of a line type light exposure head and is used for detecting a transport speed of an instant film. The light exposure head sequentially performs light exposure for a line image on the transported instant film in synchronization with each pulse signal detected from the encoder signal, and a density correction unit corrects an amount of light emission of the light exposure head depending on the transport speed of the instant film.

A pulse signal is detected from an encoder signal of a rotary encoder. The detected pulse signal is used as a signal for controlling a light exposure timing of a line type light exposure head and is used for detecting a transport speed of an instant film. The light exposure head sequentially performs light exposure for a line image on the transported instant film in synchronization with each pulse signal detected from the encoder signal, and a density correction unit corrects an amount of light emission of the light exposure head depending on the transport speed of the instant film.

An apparatus and method for enlarging digital photographs in a dark room environment by interchanging the film carrier with a digital projection module, wirelessly receiving the digital photograph data within the digital projection module and then automatically and wirelessly configuring the enlarger to generate the enlarged photograph on photosensitive printing paper. The apparatus and method include a software application for use on a computing device containing the digital photographs that permits the user to wirelessly communicate with the enlarger to configure and control the enlarger for printing. The digital projection module permits the enlarger to be easily reconfigured for enlarging photographs produced from film. An alternative is also disclosed that uses a laser projector instead of the interchangeable digital projection module for generating enlarged prints from digital photographs. The software application also permits burn and dodge effects in the print.

An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.

A control device for an assembly having a plurality of sensors and/or actuators includes at least one first control unit which is designed to be vacuum-suitable, has a distributor for splitting and/or combining signals and has a converter for converting digital signals into analog signals and/or analog signals into digital signals.

A piezo-electric material is placed adjacent to the path of the radiation beam such that, when power is applied to the piezo-electric material it rotates into the path of the radiation beam to block it. A smaller and lighter radiation beam shutter therefore results.

In a case that accommodates an instant film, an exposure opening portion, a discharge port, and a claw opening portion are provided. The exposure opening portion is light-shielded by a film cover that is disposed to overlap the instant film. The film cover includes a notched portion connected to the claw opening portion. In a case where the film cover is not removed in use, a claw inserted through the claw opening portion is moved within a range of the notched portion. In a case where the film cover is removed in use, the claw is moved within a range that exceeds the range of the notched portion.