In a case that accommodates an instant film, an exposure opening portion, a discharge port, and a claw opening portion are provided. The exposure opening portion is light-shielded by a film cover that is disposed to overlap the instant film. The film cover includes a notched portion connected to the claw opening portion. In a case where the film cover is not removed in use, a claw inserted through the claw opening portion is moved within a range of the notched portion. In a case where the film cover is removed in use, the claw is moved within a range that exceeds the range of the notched portion.

An X-ray imaging apparatus comprises a first operation unit 31 and a second operation unit 41 that execute an input operation relative to an X-ray image displayed on a display element. The first operation unit comprises a touch panel and the second operation unit comprises a lever. A mounted first operation unit can change an angle relative to a rail installed relative to a table. The second operation unit is attachable to both the rail and the table, and first operation unit is and detachable therefrom for convenience.

An image projection apparatus includes an intermediate image forming member configured to form an intermediate image from light emitted by a light source device; and a plural-film optical member on which image light that forms the intermediate image is incident. The image projection apparatus uses the image light that is incident on the plural-film optical member to project an image, an image rotational position relationship in a rotational direction around an image center axis between the image that is projected and the intermediate image is such that a difference is present in image rotational positions, and the plural-film optical member is set in such a manner that a polarization axis of the image light incident on the plural-film optical member is parallel or perpendicular to a plane of incidence of the image light with respect to the plural-film optical member.

An apparatus and method for enlarging digital photographs in a dark room environment by interchanging the film carrier with a digital projection module, wirelessly receiving the digital photograph data within the digital projection module and then automatically and wirelessly configuring the enlarger to generate the enlarged photograph on photosensitive printing paper. The apparatus and method include a software application for use on a computing device containing the digital photographs that permits the user to wirelessly communicate with the enlarger to configure and control the enlarger for printing. The digital projection module permits the enlarger to be easily reconfigured for enlarging photographs produced from film. An alternative is also disclosed that uses a laser projector instead of the interchangeable digital projection module for generating enlarged prints from digital photographs. The software application also permits burn and dodge effects in the print.

An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

An optical apparatus includes an optical component, a support mechanism configured to support the optical component, a manipulation mechanism configured to manipulate the optical component while contacting the optical component such that a state of the optical component is changed. The optical component is changed by the manipulation mechanism from a first state in which the optical component is supported by the support mechanism to a second state in which the optical component is supported by the manipulation mechanism.

A light combiner (500) for use in a metrology tool includes a plurality of light sources (LED 1, LED 2, LED 3, LED 4, LED 5), a first filter (502), and a second filter (504). The first filter is designed to substantially reflect light generated from a first source of the plurality of light sources, and to substantially transmit light generated from a second source of the plurality of light sources. The second filter is designed to substantially reflect light generated from the first source and the second source of the plurality of light sources, and to substantially transmit light generated from a third source of the plurality of light sources. An angle of incidence of the light generated from the first source on a surface of the first filter is less than 30 degrees.

The present disclosure generally relates to lithography devices comprising an autofocus system. The autofocus system is configured to individually focus and adjust a plurality of digital micromirror devices. The autofocus system comprises a single light beam and a diffractive optical element configured to split the single light beam into two or more split beams. The two or more split beams are directed to a beam splitter. The two or more split beams are then reflected off the surface of a substrate to at least one position sensor. The position sensor is configured to measure the position of each of the two or more split beams. At least one digital micromirror device is then individually adjusted based on the measured position to adjust the focus of the at least one digital micromirror device with respect to surface height and tilt variations of the substrate.

A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302, 304) of both the first radiation and second radiation. The illumination path (IP) in one embodiment includes a matching segmented wavelength-selective filter (13, 300), oriented such that a zero order ray passing through the illumination optical system and the collection optical system will be blocked by one of said filters or the other, depending on its wavelength.

A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating optical element. The temperature compensated polarization-modulating optical element includes a first polarization-modulating optical element of optically active material, the first polarization-modulating optical element having a first specific rotation with a sign. The temperature compensated polarization-modulating optical element includes also includes a second polarization-modulating optical element of optically active material, the second polarization-modulating optical element having a second specific rotation with a sign opposite to the sign of the first specific rotation.