An illumination optical unit comprises a first faceted element and a second faceted element having a multiplicity of displaceable micromirrors which can be grouped flexibly to form facets.

A lighting apparatus includes a first illumination portion and a second illumination portion. The first illumination portion and the second illumination portion respectively include a bar-like light guide whose shape of an end face of an end portion includes a part of a circle, an ellipse or a parabola, and light source elements that are provided to face the end face of the end portion of the light guide. In the light guide of the second illumination portion, light enters a determined range in which a focus of the shape of the end face of the end portion of the light guide is included. In the light guide of the first illumination portion, light enters a range that is not the determined range in which the focus of the shape of the end face of the light guide is included.

A lighting apparatus includes a first illumination portion and a second illumination portion. The first illumination portion and the second illumination portion respectively include a bar-like light guide whose shape of an end face of an end portion includes a part of a circle, an ellipse or a parabola, and light source elements that are provided to face the end face of the end portion of the light guide. In the light guide of the second illumination portion, light enters a determined range in which a focus of the shape of the end face of the end portion of the light guide is included. In the light guide of the first illumination portion, light enters a range that is not the determined range in which the focus of the shape of the end face of the light guide is included.

Embodiments of the present invention provide a prism film and a method and an apparatus for manufacturing the prism film. The prism film comprises a substrate which is provided with prism protrusions formed of photoresist; wherein at least two prism protrusions have different heights. The embodiments of the present invention adopt the laser interference lithography apparatus for forming the prism film, such that the prism film has adjustable prism period and modulation depths. Moreover, the depth of modulation is distributed randomly on the surface of the manufactured prism film, and a prism direction and a prism period can be adjusted conveniently.

Embodiments of the present invention provide a prism film and a method and an apparatus for manufacturing the prism film. The prism film comprises a substrate which is provided with prism protrusions formed of photoresist; wherein at least two prism protrusions have different heights. The embodiments of the present invention adopt the laser interference lithography apparatus for forming the prism film, such that the prism film has adjustable prism period and modulation depths. Moreover, the depth of modulation is distributed randomly on the surface of the manufactured prism film, and a prism direction and a prism period can be adjusted conveniently.

The present invention relates to an apparatus which allows producing elements with individually patterned anisotropic properties, where the pattern may vary from element to element. An apparatus according to the invention comprises a support for a substrate and an exposure unit for providing spatially modulated aligning light with a first polarization plane, wherein the exposure unit contains a light source, a spatial light modulator, which can be controlled electronically, for example by a computer, and a projection lens. The present invention furthermore relates to a method for fast production of elements with individually patterned anisotropic properties using such an apparatus.

The invention relates to a method for regulating a light source of a photolithography exposure system which comprises a plurality of LEDs, by means of the following steps: the light output of the individual LEDs in specific wavelength ranges is detected, and the detected light output is compared with a desired light output distribution over the entire spectrum. The LEDs are operated such that the desired spectral light output distribution is achieved in the most precise manner possible. The invention also relates to an exposure assembly for a photolithography device, having a light source which comprises a plurality of LEDs, a control means which controls the electrical power supplied to the individual LEDs, and a sensor which can detect the light output of the LEDs in the respective ranges of the wavelengths.

An illumination optical apparatus has an optical unit. The optical unit has a light splitter to split an incident beam into two beams; a first spatial light modulator which can be arranged in an optical path of a first beam; a second spatial light modulator which can be arranged in an optical path of a second beam; and a light combiner which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements arranged two-dimensionally and controlled individually.

An apparatus and method are used to form patterns on a substrate. The apparatus comprises a projection system, a patterning device, a low-pass filter, and a data manipulation device. The projection system projects a beam of radiation onto the substrate as an array of sub-beams. The patterning device modulates the sub-beams to substantially produce a requested dose pattern on the substrate. The low-pass filter operates on pattern data derived from the requested dose pattern in order to form a frequency-clipped target dose pattern that comprises only spatial frequency components below a selected threshold frequency. The data manipulation device produces a control signal comprising spot exposure intensities to be produced by the patterning device, based on a direct algebraic least-squares fit of the spot exposure intensities to the frequency-clipped target dose pattern. In various examples, filters can also be used.

An imaging optical unit for EUV projection lithography serves to image an object field into an image field. Mirrors guide imaging light from the object field to the image field. An aperture stop is tilted by at least 1 in relation to a normal plane which is perpendicular to an optical axis. The aperture stop has a circular stop contour. In mutually perpendicular planes, a deviation of a numerical aperture NA.sub.x measured in one plane from a numerical aperture NA.sub.y measured in the other plane is less than 0.003, averaged over the field points of the image field. What emerges is an imaging optical unit, in which homogenization of an image-side numerical aperture is ensured so that an unchanging high structure resolution in the image plane is made possible, independently of an orientation of a plane of incidence of the imaging light in the image field.