A liquid processing apparatus includes: a substrate processing unit; a supply line that supplies the fluid to the substrate processing unit; a flow meter that measures a flow rate of the fluid flowing through the supply line; a flow rate adjustment mechanism that adjusts the flow rate of the fluid flowing through the supply line; and a controller that control the flow rate adjustment mechanism based on a measurement result of the flow meter. The controller receives the measurement result at a first cycle. When the measurement result of the flow meter indicates that the flow rate of the fluid flowing through the supply line is included in a preset range, the controller causes the flow rate adjustment mechanism to adjust the flow rate of the fluid flowing through the supply line at a cycle having a time interval longer than a time interval of the first cycle.

A control system may comprise a flow control device, wherein the flow control device comprises water floats and gas floats and a regulatory valve connected to the flow control device through a control line. An autonomous flow control device may comprise a housing, one or more floats disposed within the housing, one or more protrusions connected to the outside of the housing, and an outlet disposed in the housing.

The flow rate control device includes a main plate corresponding to an inner diameter and including a through hole which is formed at the center thereof and through which a fluid flows, a sub-plate corresponding to a size of the through hole, disposed in front of the main plate, and applied with a pressure of the flowing fluid, and an expansion and contraction flow path formed to connect the through hole and a circumference of the sub-plate to each other and expanded and contracted by the pressure applied to the sub-plate. The expansion and contraction flow path includes a plurality of holes which are formed in a side surface thereof and through which the flow flows, and has a cross-sectional area changed by the pressure to control a flow rate.

There is provided a valve device, including: a housing in which, via a partition wall, a valve chamber is provided below the partition wall and a vent chamber is provided above the partition wall, and a vent hole through which the valve chamber and the vent chamber communicate with each other is provided in the partition wall; and a float valve. A valve seat is formed on a side of the valve chamber of the partition wall, and an opening is provided on an inner side of the valve seat. The opening includes a first opening and a second opening extending outward in a slit shape from an outer periphery of the first opening. A seal part having elasticity that contacts with and separates from the valve seat to close and open the first opening and the second opening, is disposed above the float valve.

An automatic airflow balancing valve, including: a housing having an inlet and an outlet and defining a flow path therethrough; a valve disc operatively connected to the housing and disposed within the flow path; and an airflow volume calibrating assembly disposed in the flow path and operatively connected to the valve disc and the housing to pivot the valve disc to a home position associated with a desired constant airflow volume. The airflow volume calibrating assembly may include an adjustment element that extends toward at least one of the inlet or the outlet.

A valve for hydraulic control of fluid flow rate, comprising: a body provided with an inlet opening, an outlet opening and an actuating opening; a rotating hollow shutter rotatively housed inside said body, said rotating shutter being configured to be crossed by a fluid and to change the passage cross-section inside the valve, in which the rotating shutter comprises at least one first opening rotatively cooperating with at least one mated second eccentric opening, said rotating shutter being configured to be manually actuatable inside the body so that a rotation of said first opening with respect to said second opening is matched by a variation of the fluid passage cross-section in a direction substantially coinciding with the rotation axis.

A cartridge flow rate adjusting assembly for a hydraulic valve, may include a cartridge body, a stem that is slidingly disposed in the cartridge body, and a shutter to be slidingly placed against a passage opening. The cartridge flow rate adjusting assembly may further include a sleeve rotatively disposed inside the valve that may include at least one first opening to enable adjustment of a maximum flow rate of the valve within a first range of values, and according to a first scale at least one second opening made in the wall to enable adjustment of the maximum flow rate of the valve within a second range of values according to a second scale. A hydraulic control valve is also provided that comprises a cartridge flow rate adjusting assembly.

Disclosed is a flow rate controller in which a clear width (6) of a control gap (4) between a main part (3) and a control element (2), which is deformable according to the pressure in order for the flow rate through the control gap (4) to be kept constant, can be adjusted as a result of the fact that at least one supporting element that adjusts the clear width (6) of the control gap (4) is designed to be movable relative to a main part (3).

The present disclosure provides a return gas prevention device for a drainage pipe, belonging to the technical field of drainage pipes. The device realizes two functions of water seal and a check valve simultaneously, as well as prevents gas channeling in a drainage process.

Disclosed are examples of valve systems and methods of operating the respective valve systems. An example valve system may include a valve body, an inlet component, an outlet component and a valve tube. The valve body may include a first void and a second void. The inlet component may be coupled to the first void and the outlet component may be coupled to the second void. The valve tube may include a side port and may be positioned through the valve body and coupled to the first void, the inlet component, the second void, and the outlet component. Other valve system examples may include including a valve body, a first septum, a second septum, a first piston, a second piston and a tube. The disclosed methods describe the interaction of the respective components of the respective valve system example.