Patent classifications
G01B9/02001
Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarization
The present invention relates to an apparatus and a method for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization. More specifically, the present invention relates to an apparatus for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization in an apparatus for measuring a thickness and a refractive index of a measurement object coated with the multilayer thin film, the apparatus including: an illumination optical module having a light source emitting light; a first beam splitter configured to reflect some of the light emitted from the illumination optical module; an objective lens configured to input some of the light reflected from the first beam splitter to the measurement object constituted by the multilayer thin film and reflect the remaining light to a reference plane to form interference light on a back focal plane; a second beam splitter in which interference light where the reflected light incident and reflected to the measurement object interferes with the reflected light reflected from the reference plane is incident, wherein some of the interference light is reflected and the remaining interference light is transmitted; a first angle-resolved spectral image acquiring unit configured to receive interference light reflected from the second beam splitter and first-polarize the interference light located in the back focal plane of the objective lens to acquire a first polarized interference image; and a second angle-resolved spectral image acquiring unit configured to receive interference light transmitted from the second beam splitter and second-polarize the interference light located in the back focal plane of the objective lens to acquire a second polarized interference image.
Monitoring material processing using imaging signal density determined from inline coherent imaging (ICI)
Systems, methods and apparatuses are used for monitoring material processing using imaging signal density calculated for an imaging beam directed to a workpiece or processing region, for example, during inline coherent imaging (ICI). The imaging signal density may be used, for example, to monitor laser and e-beam welding processes such as full or partial penetration welding. In some examples, the imaging signal density is indicative of weld penetration as a result of reflections from a keyhole floor and/or from a subsurface structure beneath the keyhole. The monitoring may include, for example, automated pass/fail or quality assessment of the welding or material processing or parts produced thereby. The imaging signal density may also be used to control the welding or material processing, for example, using imaging signal density data as feedback. The imaging signal density may be used alone or together with other measurements or metrics, such as distance or depth measurements.
METHOD AND SYSTEM FOR GENERATING INDEPENDENT COHERENT PHOTONS FREQUENCY-STABILIZED TO TRANSITION OF ATOMS FOR LONG-DISTANCE QUANTUM COMMUNICATION
A method and a system for generating independent coherent photons frequency-stabilized to transition of atoms for long-distance quantum communication are provided. The method for generating independent coherent photons frequency-stabilized to transition of atoms for long-distance quantum communication according to the present disclosure, includes generating a photon in a quantum state from a first quantum light source including an alkali atom or an ensemble of alkali atoms therein as a medium, further generating a photon in a quantum state from a second quantum light source spatially separated from the first quantum light source, including the same medium as that of the first quantum light source therein, and oscillating a photon pair obtained by coupling the photons generated by the first and second quantum light sources as a continuous wave coherent photon (CWCP) for quantum communication.
OCT measuring device and oct measuring method
OCT measuring device in the present exemplary embodiment includes: wavelength sweep light source that emits light of which a wavelength is swept; optical interferometer that divides the light into measurement light and reference light, emits measurement light toward measurement surface of measuring target object, and generates an optical interference intensity signal indicating an intensity of interference between measurement light reflected from measurement surface and reference light; electro-optic element which is a phase modulator arranged in a light path of optical interferometer; measurement processor which is a signal generator that derives a position of measurement surface and generates a phase amount indicator signal that indicates a phase amount of phase modulator based on the optical interference intensity signal; and electro-optic element controller which is a phase amount controller that controls the phase amount given to the light that is transmitted through phase modulator.
STABILIZED FREQUENCY GENERATOR
A radio frequency generator has first and second lasers configured to emit first and second optical outputs; a reference module configured to receive at least part of the first and second optical outputs from the first and second lasers; a control module connected to the first and second lasers and to the reference module; and an optical-to-electrical (O/E) converter configured to process optical signals, originating from the first and second single-frequency lasers, to provide a radio frequency output.
Another radio frequency generator has a control module; and a reference module connected to the control module. The reference module includes a photonic integrated circuit (PIC) having first and second single-frequency lasers configured to emit first and second optical outputs; an unbalanced Mach-Zehnder interferometer (UMZI) with first and second 3×3 optical splitter/combiners; first and second peripheral splitter/combiners; and an output splitter/combiner.
STABILIZED FREQUENCY GENERATOR
A radio frequency generator has first and second lasers configured to emit first and second optical outputs; a reference module configured to receive at least part of the first and second optical outputs from the first and second lasers; a control module connected to the first and second lasers and to the reference module; and an optical-to-electrical (O/E) converter configured to process optical signals, originating from the first and second single-frequency lasers, to provide a radio frequency output.
Another radio frequency generator has a control module; and a reference module connected to the control module. The reference module includes a photonic integrated circuit (PIC) having first and second single-frequency lasers configured to emit first and second optical outputs; an unbalanced Mach-Zehnder interferometer (UMZI) with first and second 3×3 optical splitter/combiners; first and second peripheral splitter/combiners; and an output splitter/combiner.
Height detection apparatus and coating apparatus equipped with the same
A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.
Robust interferometer and methods of using same
Provided are improved optical detection systems and methods for using same, which systems and methods comprise single channel interferometric detection systems and methods for determining a characteristic property of samples. Such interferometric detection systems and methods employ a light beam that impinges two or more discrete zones along a channel, thereby avoiding variations that can result in increases in detection limits and/or measurement errors.
Robust interferometer and methods of using same
Provided are improved optical detection systems and methods for using same, which systems and methods comprise single channel interferometric detection systems and methods for determining a characteristic property of samples. Such interferometric detection systems and methods employ a light beam that impinges two or more discrete zones along a channel, thereby avoiding variations that can result in increases in detection limits and/or measurement errors.
Cyclic error measurements and calibration procedures in interferometers
An interferometer system, including a heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase and an amplitude. The processing system is arranged to determine a cyclic error of the heterodyne interferometer based on the reference phase, the measurement phase and the amplitude.