G01B9/02015

Apparatus and methods for determining the position of a target structure on a substrate

A sensor is disclosed, wherein a transducer generates acoustic waves, which are received by a lens assembly. The lens assembly transmits and directs at least a part of the acoustic waves to a target. The lens assembly then receives at least a part of acoustic waves, after interaction with the target. The sensor further comprises an optical detector that comprises at least one optically reflective member located at a surface of the lens assembly, which surface is arranged opposite to a surface of the lens assembly which faces a focal plane of the lens assembly, wherein the at least one optically reflective member is mechanically displaced in response to the acoustic waves, which are received and transmitted by the lens assembly.

Apparatus and methods for determining the position of a target structure on a substrate

A sensor is disclosed, wherein a transducer generates acoustic waves, which are received by a lens assembly. The lens assembly transmits and directs at least a part of the acoustic waves to a target. The lens assembly then receives at least a part of acoustic waves, after interaction with the target. The sensor further comprises an optical detector that comprises at least one optically reflective member located at a surface of the lens assembly, which surface is arranged opposite to a surface of the lens assembly which faces a focal plane of the lens assembly, wherein the at least one optically reflective member is mechanically displaced in response to the acoustic waves, which are received and transmitted by the lens assembly.

MEASURING INSTRUMENT WITH A SCANNING ABSOLUTE DISTANCE METER
20240077301 · 2024-03-07 · ·

A measuring instrument for coordinative measuring of object surface points of an object embodied as a measuring head of a coordinate measuring machine or of an articulated arm or embodied as a handheld measuring probe of a measuring system having a surveying station such as a laser tracker or as a 6-DoF handheld measuring instrument with an IMU. The measuring instrument comprises a scanning absolute distance meter with a light source, a transmission channel for emitting light from the light source as a measurement beam along a targeting axis towards the object, a beam deflection unit for scanning deflection of the targeting axis, a receiver channel for receiving at least part of the measurement beam reflected from the object surface, an opto-electronic detector for detection of the received measurement beam and outputting an according detection signal and an evaluation unit for determination of a coordinate of a surface point.

System and method for correcting optical path length measurement errors
11920928 · 2024-03-05 · ·

A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference optical path length of the reference object acquired in advance, and corrects, on the basis of the fluctuation rate, the optical path length of the measurement target object calculated on the basis of the first interference light incident on the spectroscope under the predetermined temperature environment.

Non-contact measurement for interface gaps

Systems and methods are provided for inspection. One embodiment is a method for measuring a hole. The method includes driving a fiber optic probe into the hole, determining a profile by scanning the hole via the fiber optic probe, and determining whether an interface gap exists at the hole based on the profile.

Locking a self-homodyne mixed beat frequency to an external frequency in a LIDAR system
11914038 · 2024-02-27 · ·

An electro-optical system has a laser drive electronic circuit, a laser light source and an optical interferometer, forming a closed loop. The laser drive electronic circuit is arranged to receive a reference frequency as input, and a beat frequency as feedback. The laser drive electronic circuit generates a drive output based on a phase difference between the reference frequency and the beat frequency. The optical interferometer, coupled to the laser light, generates optical energy at the beat frequency.

Locking a self-homodyne mixed beat frequency to an external frequency in a LIDAR system
11914038 · 2024-02-27 · ·

An electro-optical system has a laser drive electronic circuit, a laser light source and an optical interferometer, forming a closed loop. The laser drive electronic circuit is arranged to receive a reference frequency as input, and a beat frequency as feedback. The laser drive electronic circuit generates a drive output based on a phase difference between the reference frequency and the beat frequency. The optical interferometer, coupled to the laser light, generates optical energy at the beat frequency.

Extended reach ring interferometer with at least two broadband light sources and signal antifading topology for event detection, location and characterization
11913785 · 2024-02-27 ·

An optical fiber ring interferometer is provided, which is based on a common light path for two or more light beam pairs preferably originated from two or more light sources of a substantially different spectrum or from a single light source split spectrum and whereas each light beam of a specific pair is propagating in relative opposite directions, wherein at least one pair of light beams is utilized to detect acousto-mechanical events and to provide information regarding location and other characteristics of detected environmental disturbance.

Temperature measurement system and method using optical signal transmission through an optical interferometer

A temperature measurement technology includes generating an input optical signal at a wavelength using an optical signal generator, splitting the input optical signal into a first beam and a second beam, optically transmitting the first beam through the first arm of an interferometer, transmitting the second beam through a second arm of the interferometer that introduces a phase shift in the second beam relative to the first beam, combining at least a portion of the transmitted first beam and the transmitted phase-shifted second beam to produce an output optical signal, measuring an optical signal intensity of the output optical signal, and correlating the measured optical signal intensity with a temperature to produce a measured temperature. Alternatively, the input optical signal may be transmitted through two or more interferometers.

Temperature measurement system and method using optical signal transmission through an optical interferometer

A temperature measurement technology includes generating an input optical signal at a wavelength using an optical signal generator, splitting the input optical signal into a first beam and a second beam, optically transmitting the first beam through the first arm of an interferometer, transmitting the second beam through a second arm of the interferometer that introduces a phase shift in the second beam relative to the first beam, combining at least a portion of the transmitted first beam and the transmitted phase-shifted second beam to produce an output optical signal, measuring an optical signal intensity of the output optical signal, and correlating the measured optical signal intensity with a temperature to produce a measured temperature. Alternatively, the input optical signal may be transmitted through two or more interferometers.