A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means is provided which includes a flat surface having a structure that is capturable by a measurement system operating by optical and/or tactile means. The structure has a changeable periodicity that is capturable by a sensor in a first direction and/or in a second direction and for a change in the periodicity to code position information and/or direction information. In addition, a method for calibrating a coordinate measuring machine operating by tactile and/or optical means and to a coordinate measuring machine for such a method or having such a calibration standard is provided.

A coordinate measuring machine (CMM) system is provided including utilization of a vision probe (e.g., for performing operations for determining and/or measuring surface profiles of workpieces, etc.) The angular orientation of the vision probe may be adjusted using a rotation mechanism so that the optical axis of the vision probe is directed toward an angled surface of a workpiece (e.g., in some implementations the optical axis may be approximately perpendicular to the angled workpiece surface). X-axis, y-axis and z-axis slide mechanisms (e.g., moving in mutually orthogonal directions) may in conjunction move the vision probe to acquisition positions along an image stack acquisition axis (which may approximately coincide with the optical axis) for acquiring a stack of images of the angled workpiece surface. Focus curve data may be determined from analysis of the image stack, which indicates 3-dimensional positions of surface points on the angled surface of the workpiece.

A method for calibrating a mirror of an interferometer system configured to measure a position of an object using two interferometers of the interferometer system that are arranged at opposite sides of the object and configured to measure the position of the object in the same X-direction, wherein two sets of measurements are obtained for different rotational orientations about an axis perpendicular to the X-direction to determine a shape of the mirror. There is also provided a position measuring method in which the obtained shape of the mirror is used to adjust measurements in the X-direction, a lithographic apparatus and a device manufacturing method making use of such a lithographic apparatus.

It is an object of the present invention to provide a measuring apparatus capable of easily grasping a tracking state of a target and performing an efficient measurement. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus comprises: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; a display unit that provided on a device that is wearable by a measurer; a calculation unit for calculating the three-dimensional coordinates of the target based on the emission angle of the light beam and the light returning from the target; and a display control unit that controls information displayed on the display unit based on the three-dimensional coordinates calculated by the calculation unit. The display control unit performs control to superimposed and display the optical axis graphic image on a position of the optical axis of the light beam.

The invention relates generally to a metrology system and coordinate measuring devices to be used within the framework of a smart factory environment, which has a defined arrangement of different metrology devices, configured such that coordinate measuring data generated by different metrology devices are referencable to a common coordinate system.

An apparatus for adjusting a beam path for tracking an object includes an illumination unit to generate an illumination light beam, an optical unit with a beam expander optical unit and a beam deflection unit, the beam expander optical unit being configured to divergently expand the illumination light beam and the beam deflection unit being configured to deflect the illumination light beam spatially about two different axes of rotation, a detector unit to capture a light beam reflected by the object in response to an illumination by the illumination light beam and to generate a measurement signal, an evaluation and control unit to evaluate the measurement signal and configured to determine a manipulated variable for setting an effective focal length of the beam expander optical unit and/or for setting a spatial alignment of the beam deflection unit based on the information item in respect of the illumination of the object.

An exemplary computing system for locating an object in an operational area is disclosed. The computing system having a server and plurality of edge devices. The edge devices having an image sensor configured to capture video data of the operational area from a specified location. The edge devices can process the video data to identify an object and generate a two-dimensional shape representative of the object, generate a vector from a lens of the image sensor through a center point of the two-dimensional shape; and determine relative position of the two-dimensional shape based on geospatial information of the edge device and the vector. The server and one or more of the edge devices receiving video data from a plurality of edge devices and generating a graphic, which defines a position of the object within the operational area based on the vector and location information of each edge device.

An inspection device includes a scanning device, a first recognition unit, and a second recognition unit. The scanning device includes a laser sensor that emits laser slit light for measuring a two-dimensional shape, and a movement mechanism that moves the laser sensor in a predetermined direction. The first recognition unit obtains three-dimensional shape data of an inspection object and a workpiece by associating a plurality of two-dimensional shape data obtained by the laser sensor with position data of the laser sensor at the time of measuring the two-dimensional shape. The second recognition unit derives a three-dimensional shape of the workpiece by obtaining a difference between first three-dimensional shape data indicating a three-dimensional shape before the workpiece is laminated on the mold and second three-dimensional shape data indicating a three-dimensional shape after the workpiece is laminated on the mold.

A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).

Provided are embodiments for a system and method for performing real-time detection for mapping. The embodiments include one or more processors, a scanner, and a mobile computing device removably coupled to the 2D scanner where the mobile computing device having a display. Embodiments include collecting scan data of an environment to generate a first map and identifying lines from the collected scan data corresponding to a surface of a structure. Embodiments also include grouping the identified lines into buckets based at least in part on a characteristic of the identified lines and combining the identified lines in each bucket. Embodiments also include optimizing the first map to generate a second map and displaying the second map on the display.