A method may include forming a first grating and a second grating, disposed in a region of vertical overlap of the first and second gratings on different levels, respectively, having substantially the same pitch, and inclined with respect to each other, such that a bias value between the first and second gratings is changed along a length direction of the first and second gratings, using a lithography process. A method may include emitting a beam to the first and second gratings; and obtaining trend information associated with a diffracted beam from an image pattern of a beam from the first and second gratings, using the emitted beam, in which the trend information may concern changes in the intensity of the diffracted beam according to the bias value. An overlay error in at least one grating may be determined based on the trend information and an intensity of a diffracted beam.

Methods, systems, and apparatuses are provided for estimating a location on an object in a three-dimensional scene. Multiple radiation patterns are produced by spatially modulating each of multiple first radiations with a distinct combination of one or more modulating structures, each first radiation having at least one of a distinct radiation path, a distinct source, a distinct source spectrum, or a distinct source polarization with respect to the other first radiations. The location on the object is illuminated with a portion of each of two or more of the radiation patterns, the location producing multiple object radiations, each object radiation produced in response to one of the multiple radiation patterns. Multiple measured values are produced by detecting the object radiations from the location on the object due to each pattern separately using one or more detector elements. The location on the object is estimated based on the multiple measured values.

Systems and methods for identifying and mitigating gas turbine component misalignment using virtual simulation are disclosed herein. An example method may include capturing data associated with a first nozzle segment and a second nozzle segment of a gas turbine. The method may also include creating, based on the captured data, a virtual representation of the first nozzle segment and the second nozzle segment. The method may also include determining that a misalignment exists in a connection between the virtual representation first nozzle segment and the virtual representation of the second nozzle segment. The method may also include identifying, based on the determination that the misalignment exists, a third nozzle segment. The method may also include determining that a connection between a third nozzle segment and the first nozzle segment includes a smaller misalignment.

Methods for using predictive shimming to optimize part-to-part alignment. In accordance with one embodiment, the process uses measurement data acquired from mating surfaces and key features to virtually align two parts in a manner that optimizes the final orientation of the parts and determines the geometry of the shim needed to achieve this orientation during assembly.

A triangulation scanner having an enclosure, a projector coupled to the enclosure and configured to emit a first light, and three cameras also coupled to the enclosure. The scanner further includes at least one processor to determine the three-dimensional coordinates in a local frame of reference based at least in part on receiving the first light.

A method and machine comprising at least one non-contact sensor (52) on a functional testing platform (50) for workpiece inspection and/or measurement. The inclusion of at least one non-contact sensor on the functional testing platform results in the combination of two machine platforms into a single machine and provides the user with measurement characteristics of both methods, functional and analytical, saving significant cycle time and significant space.

An object surface data detection method and system, an electronic apparatus, and a storage medium. The object surface data detection method, applied to a three-dimensional scanning system comprising detection auxiliary devices and a scanning device, includes: obtaining a unified coordinate system established for the detection auxiliary devices, wherein a number of the detection auxiliary devices is at least two; respectively obtaining first scan data of the scanning device scanning a surface of an object and tracking results of the detection auxiliary devices tracking the scanning device; and comprehensively calculating the tracking results, the first scan data, and the unified coordinate system to obtain an object surface detection result.

An optical three-dimensional coordinate measuring device of the present invention ensures both the measurement range and the measurement accuracy. The optical three-dimensional coordinate measuring device includes an imaging device, a table that is displaceable from an original position, a probe for designating a measurement position of a measurement object, a probe marker that is disposed on the probe, and a stage marker that is disposed on the table. The position and the attitude of the probe with respect to the imaging device are identified on the basis of the probe marker included in a captured image. The position and the attitude of the table with respect to the imaging device are identified on the basis of the stage marker included in a captured image. Relative position coordinates of a measurement position designated by the probe are obtained.

A three-dimensional coordinate measuring device of the present invention achieves high operability and relaxes limitations on the size of a measurement object. A table which places a measurement object thereon is translatable and/or rotatable around a predetermined axis. A position and an attitude of a probe that is capable of designating a measurement position of a measurement object are identified. A displacement resistance mechanism that generates, when an external force is applied to the table in a displacement direction of the table, a certain resistance force against the external force is provided. A table displacement identifying unit that identifies a displacement amount of the table from an original position is provided. Relative position coordinates of a position designated by the probe are obtained on the basis of the position and the attitude of the probe and the displacement amount of the table.

Apparatuses, systems and methods associated with a metrology system for high-speed, non-contact coordinate measurements of parts are disclosed herein. In embodiments, the metrology system includes a metrology bridge to be coupled to a measurement assembly. The measurement assembly may include a stage moveable across multiple independent axes. The bridge may include a housing, mounting members coupled to the housing, and a plurality of sensors mounted within the housing. The mounting members may rotatably couple the housing to the measurement assembly. Further, sensor elements of the plurality of sensor devices may be aligned along a length of the housing and may be directed out of the housing.