Patent classifications
G01B11/06
Light interference system and substrate processing apparatus
A light interference system is provided. The light interference system includes a light source configured to generate a measurement light; a fiber configured to propagate therethrough the measurement light; and a measurement device. The fiber includes a single-mode fiber, a multimode fiber and a connector connecting the single-mode fiber and the multimode fiber. A tip end of the fiber is formed of the multimode fiber, and an end surface of the tip end of the fiber is configured to emit the measurement light to a measurement target object and receive a reflection light from the measurement target object. The measurement device is configured to measure physical property of the measurement target object based on the reflection light.
Systems for gross processing of tissue samples and related methods
Tissue sample cassettes for receiving tissue samples include an upper tray including compartments separated by dividers, a lower tray coupled to the upper tray and having a central recess, and an absorbent material located in the recess of the lower tray. Related systems and methods for automated gross processing of tissue samples are also disclosed.
INTERFEROMETRIC MEASURING DEVICE
A method of measuring a surface of an optical element and an interferometric measuring device for measuring a surface or profile of the optical element. The optical element having a first surface and a second surface opposite the first surface. The method includes defining at least a first measurement point, a second measurement point and a third measurement point on a measurement surface of the optical element being one of the first surface and the second surface, measuring a first position of the first measurement point by directing a measurement beam from a measurement head onto the first measurement point and by detecting a measurement beam portion reflected at the first measurement point, subsequently measuring at least a second position of the second measurement point and a third position of the third measurement point by directing the measurement beam onto the second measurement point and onto the third measurement point and by detecting a measurement beam portion reflected at the second measurement point and the third measurement point, respectively, and determining at least one of a decenter and a tilt of the measurement surface relative to a reference axis on the basis of at least the first position, the second position and the third position.
INTERFEROMETRIC MEASURING DEVICE
A method of measuring a surface of an optical element and an interferometric measuring device for measuring a surface or profile of the optical element. The optical element having a first surface and a second surface opposite the first surface. The method includes defining at least a first measurement point, a second measurement point and a third measurement point on a measurement surface of the optical element being one of the first surface and the second surface, measuring a first position of the first measurement point by directing a measurement beam from a measurement head onto the first measurement point and by detecting a measurement beam portion reflected at the first measurement point, subsequently measuring at least a second position of the second measurement point and a third position of the third measurement point by directing the measurement beam onto the second measurement point and onto the third measurement point and by detecting a measurement beam portion reflected at the second measurement point and the third measurement point, respectively, and determining at least one of a decenter and a tilt of the measurement surface relative to a reference axis on the basis of at least the first position, the second position and the third position.
METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM
First, it is judged whether the diamond film is the single-crystal diamond film or the polycrystalline diamond film according to ellipsometric spectrum data and absorption spectrum data, and different calculation methods are selected to obtain the optical constants and the thickness of the diamond film according to spectral data (e.g., the ellipsometric spectrum data and the absorption spectrum data). Additionally, in the single-crystal diamond film, the optical constants and the thickness of the diamond film are obtained through calculation using the Cauchy model. In the polycrystalline diamond film, the spectral region is selected, and the optical constants and the thickness of the diamond film are obtained through calculation according to the oscillator model and the evaluation function MSE.
ADAPTIVE SENSING BASED ON DEPTH
A microscope for adaptive sensing may comprise an illumination assembly, an image capture device configured to collect light from a sample illuminated by the assembly, and a processor. The processor may be configured to execute instructions which cause the microscope to capture, using the image capture device, an initial image set of the sample, identify, in response to the initial image set, an attribute of the sample, determine, in response to identifying the attribute, a three-dimensional (3D) process for sensing the sample, and generate, using the determined 3D process, an output image set comprising more than one focal plane. Various other methods, systems, and computer-readable media are also disclosed.
ADAPTIVE SENSING BASED ON DEPTH
A microscope for adaptive sensing may comprise an illumination assembly, an image capture device configured to collect light from a sample illuminated by the assembly, and a processor. The processor may be configured to execute instructions which cause the microscope to capture, using the image capture device, an initial image set of the sample, identify, in response to the initial image set, an attribute of the sample, determine, in response to identifying the attribute, a three-dimensional (3D) process for sensing the sample, and generate, using the determined 3D process, an output image set comprising more than one focal plane. Various other methods, systems, and computer-readable media are also disclosed.
PERMITTIVITY MEASURING DEVICE AND THICKNESS MEASURING DEVICE
An object permittivity measurement apparatus according to the present disclosure includes: a light wave distance measurement device configured to measure reciprocating time t of a light wave with which an object is irradiated and that is reflected and returned from the object, and calculate a distance L to the object using the following equation (1),
L=ct/2 (1)
c: light speed;
an electromagnetic wave phase measurement device configured to measure a rotated phase φ of an electromagnetic wave having a frequency f with which the object is irradiated and that is reflected and returned from the object; and
a permittivity calculation circuit configured to calculate permittivity ε of a foreign material on an object surface using the following equation (2),
φ=4πLf/c+4π(ε).sup.1/2df/c (2)
d: a thickness of the foreign material on the object surface.
PERMITTIVITY MEASURING DEVICE AND THICKNESS MEASURING DEVICE
An object permittivity measurement apparatus according to the present disclosure includes: a light wave distance measurement device configured to measure reciprocating time t of a light wave with which an object is irradiated and that is reflected and returned from the object, and calculate a distance L to the object using the following equation (1),
L=ct/2 (1)
c: light speed;
an electromagnetic wave phase measurement device configured to measure a rotated phase φ of an electromagnetic wave having a frequency f with which the object is irradiated and that is reflected and returned from the object; and
a permittivity calculation circuit configured to calculate permittivity ε of a foreign material on an object surface using the following equation (2),
φ=4πLf/c+4π(ε).sup.1/2df/c (2)
d: a thickness of the foreign material on the object surface.
METHOD FOR CHECKING A WALL THICKNESS OF A CONTAINER MADE OF AN AT LEAST PARTIALLY TRANSPARENT MATERIAL
A method can include: irradiating a container with a measuring beam of an irradiation device at measurement points along a measurement direction, wherein a signal indicative of the wall thickness of the container at each measurement point is obtained by means of an optical detector, wherein by means of an evaluation device, the measurement points are compared with a reference curve that specifies the wall thickness of a reference container along the measurement direction, wherein if the comparison results in agreement between the measurement points and the reference curve it is determined that the wall thickness of the container corresponds to a predefined wall thickness and wherein if the comparison does not result in said agreement it is determined that the wall thickness of the container does not correspond to the predefined wall thickness.