A bench-top device for measuring thickness of a sample includes two distance sensors facing each other across a gap. A sample tray for supporting the sample is positioned in the gap. The distance sensors are attached to arms of a movable frame. An actuator is configured to move the frame in a scan direction orthogonal to the arms.

A method for measuring the thickness of a specimen, according to an embodiment, can measure the thickness of a specimen having multiple layers in a contactless and non-destructive manner. In addition, when the refractive indexes of materials forming the respective layers are already known, the thicknesses of the respective layers can be integrally measured through differences in reflection times of terahertz waves with respect to the respective layers of the specimen, thereby measuring the thickness of the specimen, such that the time taken for measuring the thickness of the specimen can be reduced. Furthermore, when the refractive indexes of the materials forming the respective layers are not known, the refractive indexes of the respective layers can be measured through differences in transmission times and reflection times of terahertz waves with respect to the respective layers of the specimen, and at the same time, the thicknesses of the respective layers can be measured through differences in transmission times or reflection times of terahertz waves with respect to the respective layers of the specimen, so that the thickness of various specimens can be measured. As such, the present invention has a wide range of applications.

A shape measurement method includes: acquiring first data of a change of a distance between a first probe and a calibration measurement object and acquiring second data of a change of a distance between a second probe and the calibration measurement object while moving the calibration measurement object in a first direction, the calibration measurement object being rotationally symmetric around an axis parallel to the first direction, the first probe and the second probe being arranged in a second direction orthogonal to the first direction; estimating an error of the movement included in the first data based on the first and second data; acquiring third data of a change of a distance between the first probe and a measurement object while moving the measurement object relative to the first probe in the first direction; and correcting the third data by using the error.

An accurate and stable displacement sensor that reads through coated metal substrates achieves better than one micron accuracy includes: an electromagnetic coil positioned in a first enclosure; (ii) means for generating a magnetic field from the electromagnetic coil; (iii) a second enclosure which is spaced apart from the first enclosure, wherein the second enclosure includes dual magnetic sensors, such as fluxgate sensors, that are configured to measure the magnetic field; and (iv) means for calculating the separation between the operative surfaces of the enclosures from magnetic field measurements. A permanent magnet can be used instead of the electromagnetic coil and associated driving energy source. A precise displacement measurement is given by a mathematical function (such as the ratio or difference) of the two magnetic sensors demodulated signals. The displacement sensor can be mounted on a maneuverable C-frame to monitor the caliper of anodes and cathodes produced for lithium ion batteries.

An apparatus for measuring a surface comprises first sensors, which are distributed two-dimensionally in space, said first sensors interacting with the surface in a contactless manner using a microwave range of electromagnetic signals, and the first sensors receive at least two of the microwave signals of the interaction with information relating to distances between the sensors and the surface as a reflection, the microwave signals of the interaction representing both dimensions of the space of two-dimensional distribution of the first sensors. A data processing unit receives said information on the distances, and determines at least one geometrical parameter of the surface on the basis of the information.

An inspection system is disclosed. In one embodiment, the inspection system includes an interferometer sub-system configured to acquire an interferogram of a sample. The inspection system may further include a controller communicatively coupled to the interferometer sub-system. The controller is configured to: receive the interferogram from the interferometer sub-system; generate a phase map of the sample based on the received interferogram, wherein the phase map includes a plurality of pixels; select a sub-set of pixels of the plurality of pixels of the phase map to be used for phase unwrapping procedures; perform one or more phase unwrapping procedures on the sub-set of pixels of the phase map to generate an unwrapped phase map; and generate a surface height map of the sample based on the unwrapped phase map.

An inspection system is disclosed. In one embodiment, the inspection system includes an interferometer sub-system configured to acquire an interferogram of a sample. The inspection system may further include a controller communicatively coupled to the interferometer sub-system. The controller is configured to: receive the interferogram from the interferometer sub-system; generate a phase map of the sample based on the received interferogram, wherein the phase map includes a plurality of pixels; select a sub-set of pixels of the plurality of pixels of the phase map to be used for phase unwrapping procedures; perform one or more phase unwrapping procedures on the sub-set of pixels of the phase map to generate an unwrapped phase map; and generate a surface height map of the sample based on the unwrapped phase map.

A device is proposed for the contactless three-dimensional inspection of a circular, mechanical component (20) with toothing having a main axis of rotation, comprising: means for scanning the teeth, comprising at least one first pair of laser measurement modules (12A, 12B) and means for the rotational driving (11), about the main axis, of said component relative to the laser measurement modules; means for rebuilding a virtual three-dimensional representation of the component using data coming from said scanning means; means of dimensional inspection using the three-dimensional representation; each pair of modules comprising a first module oriented towards a first face of a tooth and a second module oriented towards a second face of a tooth;

the modules being oriented relative to the component so that during a rotation of the component, the scanning means scan the first and second faces of each tooth throughout their thickness and depth.

A lens refractive index detection device is disclosed which has a light source module, a lens center physical thickness detection module and a lens center optical thickness detection module. The light source module includes a first light source component and a second light source component for outputting a collimated light beam, a first light combining component, and a focusing component. The lens center physical thickness detection module includes a first imaging component and a second imaging component. The lens center optical thickness detection module includes a first photodetection component and a second photodetection component, a beam splitting component, a partial reflection mirror, and a movable reflection mirror. The lens refractive index detection device enables simple operation, fast and non-destructive on-line detection, and is also applicable to lenses with irregular surfaces, such as aspherical lenses, cylindrical lenses, and finished lenses. A lens refractive index detection method is also provided.

According to an embodiment of the invention, a sensor includes a first element part. The first element part includes a first member and a first element. The first member is tubular and extends along a first direction. The first member includes a first opening and a second opening. A direction from the second opening toward the first opening is along the first direction. The first element includes a vibratile first membrane, and a first supporter supporting the first membrane. The second opening is between the first opening and the first membrane in the first direction.