A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.

A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate.

The present invention provides a dual-axis gyroscope and an electronic device. The dual-axis gyroscope comprises first mass blocks, second mass blocks, a driving unit and a detecting unit. Tightly coupled connections are formed between adjacent first mass blocks, and between adjacent second mass blocks, thus improving the accuracy of displacement ratios of the first mass blocks and the second mass blocks, and enhancing the operational accuracy and stability of the dual-axis gyroscope. Furthermore, the requirement for the machining precision of the first mass blocks and the second mass blocks is reduced, thus lowering the manufacturing cost of the dual-axis gyroscope and the electronic device.

The present invention provides a dual-axis gyroscope and an electronic device. The dual-axis gyroscope comprises first mass blocks, second mass blocks, a driving unit and a detecting unit. Tightly coupled connections are formed between adjacent first mass blocks, and between adjacent second mass blocks, thus improving the accuracy of displacement ratios of the first mass blocks and the second mass blocks, and enhancing the operational accuracy and stability of the dual-axis gyroscope. Furthermore, the requirement for the machining precision of the first mass blocks and the second mass blocks is reduced, thus lowering the manufacturing cost of the dual-axis gyroscope and the electronic device.

A system includes a circular oscillator suspended by a flexible support structure to a support frame, a drive mechanism configured to induce the circular oscillator into a two-dimensional drive oscillation, where the drive oscillation is modified responsive to a sense oscillation of the circular oscillator caused by an angular rotation of the support frame and the circular oscillator, and a plurality of digital proximity switches disposed around a perimeter of the circular oscillator. During the modified drive oscillation a plurality of the digital proximity switches are configured to switch between an open state and a closed state and generate a time and position output to allow for a determination of each of a plurality of variable oscillation parameters for each oscillation of the modified drive oscillation.

A system includes a circular oscillator suspended by a flexible support structure to a support frame, a drive mechanism configured to induce the circular oscillator into a two-dimensional drive oscillation, where the drive oscillation is modified responsive to a sense oscillation of the circular oscillator caused by an angular rotation of the support frame and the circular oscillator, and a plurality of digital proximity switches disposed around a perimeter of the circular oscillator. During the modified drive oscillation a plurality of the digital proximity switches are configured to switch between an open state and a closed state and generate a time and position output to allow for a determination of each of a plurality of variable oscillation parameters for each oscillation of the modified drive oscillation.

A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.

A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.

The invention relates to an inertial sensor (1) comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame (110) and a second drive frame (120), a first sense frame (210), a second sense frame (220), a sense lever (1000) pivotably mounted around a rotation axis (1001), a sensing system comprising a strain gauge (1600) mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (1500), a first arm (1100) and a second arm (1200), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.

The invention relates to an inertial sensor (1) comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame (110) and a second drive frame (120), a first sense frame (210), a second sense frame (220), a sense lever (1000) pivotably mounted around a rotation axis (1001), a sensing system comprising a strain gauge (1600) mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (1500), a first arm (1100) and a second arm (1200), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.