A microelectromechanical inertial sensor including a substrate and an electromechanical structure situated on the substrate.

There is provided a drive control device, a drive control method, and a program that allow for an improvement in detection accuracy of a multi-IMU. Angular velocities supplied from a plurality of inertial measurement units (IMUs) are acquired, drive frequencies of the plurality of IMUs are calculated on the basis of acquisition timings of the acquired angular velocities, and on the basis of the drive frequencies of the plurality of IMUs, in a case where an interval between peak frequencies of the drive frequencies is smaller than ½ of a half width of a drive frequency distribution, control is performed so as to change the drive frequencies by heating or cooling temperatures of the IMUs so that the interval can be widened. The present disclosure can be applied to a multi-IMU.

There is provided a drive control device, a drive control method, and a program that allow for an improvement in detection accuracy of a multi-IMU. Angular velocities supplied from a plurality of inertial measurement units (IMUs) are acquired, drive frequencies of the plurality of IMUs are calculated on the basis of acquisition timings of the acquired angular velocities, and on the basis of the drive frequencies of the plurality of IMUs, in a case where an interval between peak frequencies of the drive frequencies is smaller than ½ of a half width of a drive frequency distribution, control is performed so as to change the drive frequencies by heating or cooling temperatures of the IMUs so that the interval can be widened. The present disclosure can be applied to a multi-IMU.

A sensor system. The sensor system comprises a MEMS gyroscope, comprising at least: a seismic mass, which can be excited to vibrate and has at least one electrode assembly for capacitively detecting a measurement signal, a drive circuit for generating a drive voltage for exciting and maintaining a defined vibratory movement of the seismic mass, there being a parasitic capacitive coupling between the drive circuit and the at least one electrode assembly, a detection circuit for reading out the measurement signal and for generating an angular rate signal on the basis of the measurement signal, characterized by circuitry means for compensating for an offset of the angular rate signal on the basis of the drive voltage.

A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X.sub.1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X.sub.1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X.sub.2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along the second axis X.sub.2.

A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X.sub.1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X.sub.1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X.sub.2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along the second axis X.sub.2.

Recording equipment, as well as methods of using the recording equipment, methods of experiencing recorded episodes, and methods of distributing the recorded episodes.

Recording equipment, as well as methods of using the recording equipment, methods of experiencing recorded episodes, and methods of distributing the recorded episodes.

A driving circuit for controlling a MEMS oscillator includes a digital conversion stage to acquire a differential sensing signal indicative of a displacement of a movable mass of the MEMS oscillator, and to convert the differential sensing signal of analog type into a digital differential signal of digital type. Processing circuitry is configured to generate a digital control signal of digital type as a function of the comparison between the digital differential signal and a differential reference signal indicative of a target amplitude of oscillation of the movable mass which causes the resonance of the MEMS oscillator. An analog conversion stage includes a ΣΔ DAC and is configured to convert the digital control signal into a PDM control signal of analog type. A filtering stage of low-pass type, by filtering the PDM control signal, generates a control signal for controlling the amplitude of oscillation of the movable mass.

A microelectromechanical gyroscope includes a support structure, a driving mass movable according to a driving axis; and an oscillating microelectromechanical loop. The microelectromechanical loop has a resonance frequency and a loop gain and includes the driving mass, a sensing interface that senses a position of the driving mass, and a gain control stage that maintains a modulus of the loop gain at a unitary value at the resonance frequency. The gain control stage includes a sampler and an transconductance operational amplifier in an open-loop configuration. The sampler acquires samples of a loop signal from the sensing interface in a first operative condition and transfers them to the transconductance operational amplifier in a second operative condition. The sampler decouples the transconductance operational amplifier from the sensing interface in the first operative condition and in the second operative condition.