Methods and systems for compensation of a microelectromechanical system (MEMS) sensor may include associating test temperature values with input test signal values, identifying temperature-input signal pairs, and applying one of the test temperature values and one of the test signal values to the MEMS sensor. Desired output signal values may be determined, with each of the desired output signal values corresponding to one of the applied temperature-input signal pairs. Measured output signal values from the MEMS sensor may be measured, with each of the measured output signal values corresponding to one of the applied temperature-input signal pairs. Compensation terms may be determined based on the plurality of temperature-input signal pairs, the corresponding plurality of measured output signal values, and the corresponding plurality of desired output signal values. Compensation terms may be used to modify a sense signal of the MEMS sensor.

Methods and systems for compensation of a microelectromechanical system (MEMS) sensor may include associating test temperature values with input test signal values, identifying temperature-input signal pairs, and applying one of the test temperature values and one of the test signal values to the MEMS sensor. Desired output signal values may be determined, with each of the desired output signal values corresponding to one of the applied temperature-input signal pairs. Measured output signal values from the MEMS sensor may be measured, with each of the measured output signal values corresponding to one of the applied temperature-input signal pairs. Compensation terms may be determined based on the plurality of temperature-input signal pairs, the corresponding plurality of measured output signal values, and the corresponding plurality of desired output signal values. Compensation terms may be used to modify a sense signal of the MEMS sensor.

A sensor array. The sensor array includes a gyroscope device, including: a MEMS gyroscope including a seismic mass which is excitable to carry out oscillations; a driver circuit for exciting and maintaining an oscillating movement of the seismic mass; and a sensing unit. The sensor array further includes a control unit for selecting one of at least two different predefined operating modes of the gyroscope device, at least one sensing operating mode, in which rotation rate sensor signals are detected and/or preprocessed, and at least one stand-by operating mode, in which no rotation rate sensor signals are detected and/or preprocessed, being predefined as operating modes. The sensor array further includes a further sensor device for detecting further sensor signals; and a digital data processing unit for the rotation rate sensor signals and the further sensor signals.

A sensor array. The sensor array includes a gyroscope device, including: a MEMS gyroscope including a seismic mass which is excitable to carry out oscillations; a driver circuit for exciting and maintaining an oscillating movement of the seismic mass; and a sensing unit. The sensor array further includes a control unit for selecting one of at least two different predefined operating modes of the gyroscope device, at least one sensing operating mode, in which rotation rate sensor signals are detected and/or preprocessed, and at least one stand-by operating mode, in which no rotation rate sensor signals are detected and/or preprocessed, being predefined as operating modes. The sensor array further includes a further sensor device for detecting further sensor signals; and a digital data processing unit for the rotation rate sensor signals and the further sensor signals.

In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

An inertia detection device includes one set of gyro sensors for detecting an angular velocity of a detection target object along a same direction, the gyro sensors arranged in a same physical quantity range, in which sensor movement is detectable as a same physical quantity. When an abnormality affecting an output signal of one of the gyro sensors is caused, based on an observation that a difference of magnitudes of the output signals from normal and abnormal gyro sensors is different from a difference of magnitudes of the output signals from two normal gyro sensors, such an abnormality of one of the gyro sensors is determinable by a comparison between the output signals, without using an estimated value thereof.

An inertia detection device includes one set of gyro sensors for detecting an angular velocity of a detection target object along a same direction, the gyro sensors arranged in a same physical quantity range, in which sensor movement is detectable as a same physical quantity. When an abnormality affecting an output signal of one of the gyro sensors is caused, based on an observation that a difference of magnitudes of the output signals from normal and abnormal gyro sensors is different from a difference of magnitudes of the output signals from two normal gyro sensors, such an abnormality of one of the gyro sensors is determinable by a comparison between the output signals, without using an estimated value thereof.

A method adapts a resonant frequency of a first filter of a closed control loop to a given frequency. The method includes feeding an output signal of a delta sigma modulator of the closed control loop into a frequency adaptation circuit and determining a first noise spectrum of the output signal in a first frequency band and a second noise spectrum of the output signal in a second frequency band. The first frequency band and the second frequency band are arranged symmetrically with respect to the given frequency. The method includes comparing the first noise spectrum with the second noise spectrum, generating an adaptation signal that causes a frequency adaptation of the resonant frequency if the first noise spectrum differs from the second noise spectrum, and outputting the adaptation signal from the frequency adaptation circuit to a control input of the first filter for adapting the resonant frequency.

A method adapts a resonant frequency of a first filter of a closed control loop to a given frequency. The method includes feeding an output signal of a delta sigma modulator of the closed control loop into a frequency adaptation circuit and determining a first noise spectrum of the output signal in a first frequency band and a second noise spectrum of the output signal in a second frequency band. The first frequency band and the second frequency band are arranged symmetrically with respect to the given frequency. The method includes comparing the first noise spectrum with the second noise spectrum, generating an adaptation signal that causes a frequency adaptation of the resonant frequency if the first noise spectrum differs from the second noise spectrum, and outputting the adaptation signal from the frequency adaptation circuit to a control input of the first filter for adapting the resonant frequency.