A micromechanical inertial sensor. The inertial sensor includes a first sensor element for measuring an inertial variable in a first frequency band, and a second sensor element for measuring a periodic acceleration in a second frequency band. The second frequency band is at least partially above the first frequency band.

The control circuit for a MEMS gyroscope is configured to receive a measurement signal which has a quadrature component and a sensing component. The control circuit has: an input stage which acquires an input signal, generating an acquisition signal, where the input signal is a function of the measurement signal and of a quadrature cancellation signal; a processing stage which extracts a first component of the acquisition signal, indicative of the sensing component of the measurement signal and having a sensing frequency band; and a quadrature correction stage which extracts a second component of the acquisition signal, indicative of the quadrature component of the measurement signal, and generates the quadrature cancellation signal from a reference signal. The quadrature cancellation signal is a signal modulated as a function of the second component of the acquisition signal, at an update frequency which is outside the sensing frequency band.

The control circuit for a MEMS gyroscope is configured to receive a measurement signal which has a quadrature component and a sensing component. The control circuit has: an input stage which acquires an input signal, generating an acquisition signal, where the input signal is a function of the measurement signal and of a quadrature cancellation signal; a processing stage which extracts a first component of the acquisition signal, indicative of the sensing component of the measurement signal and having a sensing frequency band; and a quadrature correction stage which extracts a second component of the acquisition signal, indicative of the quadrature component of the measurement signal, and generates the quadrature cancellation signal from a reference signal. The quadrature cancellation signal is a signal modulated as a function of the second component of the acquisition signal, at an update frequency which is outside the sensing frequency band.

An inertial sensor module includes a first sensor, a second sensor, and a processing circuit. The first sensor detects, with a first sensitivity, a first physical quantity at a first detection axis and a second physical quantity at a second detection axis. The second sensor detects, with a second sensitivity different from the first sensitivity, a third physical quantity at a third detection axis with a higher accuracy than the first sensor. The processing circuit performs arithmetic processing that is processing of converting the first physical quantity and the second physical quantity at the first sensitivity and the third physical quantity at the second sensitivity into a first physical quantity, a second physical quantity, and a third physical quantity at a predetermined sensitivity.

The present technology is directed to easily and more accurately acquiring output signals relating to a plurality of inertial sensors. Provided is an information processing device including a combining unit that stepwisely combines output signals relating to a plurality of inertial sensors, in which the combining unit clusters a plurality of the output signals into a plurality of clusters and stepwisely combines the output signals in each of the clusters, and at least one of the clusters includes a plurality of the output signals. Furthermore, provided is an information processing method including stepwisely combining, by a processor, output signals relating to a plurality of inertial sensors, in which the combining further includes clustering a plurality of the output signals into a plurality of clusters and stepwisely combining the output signals in each of the clusters, and at least one of the clusters includes a plurality of the output signals.

Provided is an application method of a Micro Electro Mechanical Systems (MEMS) inertial sensor and an electronic device. An application method of an accelerometer includes: based on an influence of a strain, generated under the action of an external force, of the accelerometer on a detection signal of the accelerometer, adopting the detection signal to reflect the external force. An application method of a gyroscope includes: based on an influence of a strain, generated under the action of an external force, of the gyroscope on a detection signal of the gyroscope, adopting the detection signal to reflect the external force. Further provided is an electronic device adopting the foregoing methods.

Provided is an application method of a Micro Electro Mechanical Systems (MEMS) inertial sensor and an electronic device. An application method of an accelerometer includes: based on an influence of a strain, generated under the action of an external force, of the accelerometer on a detection signal of the accelerometer, adopting the detection signal to reflect the external force. An application method of a gyroscope includes: based on an influence of a strain, generated under the action of an external force, of the gyroscope on a detection signal of the gyroscope, adopting the detection signal to reflect the external force. Further provided is an electronic device adopting the foregoing methods.

An inertial sensor module includes: a first inertial sensor having a first axis as a detection axis; and a second inertial sensor having the first axis, a second axis, and a third axis as detection axes, in which the first inertial sensor and the second inertial sensor are separated from each other, and detection accuracy of the first inertial sensor is higher than detection accuracy of the second inertial sensor.

An inertial sensor module includes: a first inertial sensor having a first axis as a detection axis; and a second inertial sensor having the first axis as a detection axis, in which detection accuracy of the first inertial sensor is higher than detection accuracy of the second inertial sensor, and the operation circuit receives a detection signal of the first axis output from the first inertial sensor and a detection signal of the first axis output from the second inertial sensor, and selects and outputs either a first output signal based on the detection signal of the first axis output from the first inertial sensor or a second output signal based on the detection signal of the first axis output from the second inertial sensor.

A phase locked loop has an oscillator that varies a frequency according to a control signal, a resonance element that resonates at a predetermined resonance frequency and output a signal obtained by shifting a phase of an output signal of the oscillator by 90 degrees at the resonance frequency, a phase detector that detects a phase error between an output signal of the resonance element and an output signal of the oscillator, a feedback controller that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error, and a control signal corrector that corrects the control signal by adding a correction term corresponding to environment information to an output signal of the feedback controller.