According to an embodiment, an information processing device includes an internal sensor, a first derivation unit, a second derivation unit, a reliability calculation unit, a movement amount calculation unit. The internal sensor monitors monitor information including acceleration of a moving object. The first derivation unit derives a first movement amount of the moving object from the monitor information. The second derivation unit derives a second movement amount of the moving object using surrounding information of the moving object monitored by an external sensor. The reliability calculation unit calculates reliability of the second movement amount. The movement amount calculation unit calculates a current movement amount of the moving object using the first movement amount and the second movement amount when the reliability meets a specific criterion, and calculates the first movement amount as the current movement amount when the reliability does not meet the specific criterion.

A sensor module includes an X-axis angular velocity sensor device that outputs digital X-axis angular velocity data, a Y-axis angular velocity sensor device that outputs digital Y-axis angular velocity data, a Z-axis angular velocity sensor device that outputs digital Z-axis angular velocity data, an acceleration sensor device that outputs digital X-axis, Y-axis, and Z-axis acceleration data, a microcontroller, a first digital interface bus that electrically connects the X-axis angular velocity sensor device, the Y-axis angular velocity sensor device, and the Z-axis angular velocity sensor device to a first digital interface, and a second digital interface bus that electrically connects the acceleration sensor device to a second digital interface.

A micro electro-mechanical system (MEMS) gyroscope may include a suspended spring-mass system, and processing circuitry configured to receive a drive sense signal and a proof mass sense signal generated by the spring-mass system. The processing circuitry may be configured to derive a drive velocity in-phase signal from a drive displacement in-phase signal and to derive a drive velocity quadrature signal from a drive displacement quadrature signal. A compensated in-phase signal and a compensated quadrature signal may be determined based upon at least the drive displacement in-phase signal, the drive displacement quadrature signal, the drive velocity in-phase signal, the drive velocity quadrature signal, the sense displacement in-phase signal, and the sense displacement quadrature signal.

According to one embodiment, a sensor includes a sensor part including first and second sensor elements, and a circuit part. The first sensor element includes a first supporter, a first movable part capable of vibrating, first and second electrodes. The first electrode outputs a first signal corresponding to a vibration of the first movable part. The second electrode outputs a second signal corresponding to the vibration of the first movable part. The second sensor element includes a second supporter, a second movable part capable of vibrating, third and fourth electrodes. The third electrode outputs a third signal corresponding to a vibration of the second movable part. The fourth electrode outputs a fourth signal corresponding to the vibration of the second movable part. The circuit part includes a calculator. The calculator outputs a differential operation result between first and second processing signals.

According to one embodiment, a sensor includes a sensor part including first and second sensor elements, and a circuit part. The first sensor element includes a first supporter, a first movable part capable of vibrating, first and second electrodes. The first electrode outputs a first signal corresponding to a vibration of the first movable part. The second electrode outputs a second signal corresponding to the vibration of the first movable part. The second sensor element includes a second supporter, a second movable part capable of vibrating, third and fourth electrodes. The third electrode outputs a third signal corresponding to a vibration of the second movable part. The fourth electrode outputs a fourth signal corresponding to the vibration of the second movable part. The circuit part includes a calculator. The calculator outputs a differential operation result between first and second processing signals.

A method includes receiving a signal from a sensor. The signal includes a first in-phase component and a first quadrature component. The first in-phase and quadrature components are identified. A rate signal is applied to the sensor and the sensor generates a sensed rate signal. A second in-phase and quadrature components associated with the sensed rate signal are determined. A phase error based on the first and the second in-phase components, and the first and the second quadrature components is determined. The method may further include reducing error in measurements associated with the sensor by dynamically compensating for the determined phase error, e.g., by modifying a clock signal, by changing a demodulation phase of a demodulator used to identify the in-phase and the quadrature components.

Systems and methods for filtering a micro-electromechanical system sensor rate signal with error feedback are provided. In one example, a micro-electromechanical system sensor rate signal is provided. Next, a feedback signal from a feedback loop is subtracted from the micro-electromechanical system sensor rate signal to produce a first combined signal. The first combined signal is then filtered to produce a filtered rate output. The micro-electromechanical system sensor rate signal is then subtracted from the filtered rate output to produce an error signal, wherein the error signal is used in the feedback loop to generate a feedback signal for a future time step.

Systems and methods for filtering a micro-electromechanical system sensor rate signal with error feedback are provided. In one example, a micro-electromechanical system sensor rate signal is provided. Next, a feedback signal from a feedback loop is subtracted from the micro-electromechanical system sensor rate signal to produce a first combined signal. The first combined signal is then filtered to produce a filtered rate output. The micro-electromechanical system sensor rate signal is then subtracted from the filtered rate output to produce an error signal, wherein the error signal is used in the feedback loop to generate a feedback signal for a future time step.

An inertial sensor such as a MEMS accelerometer or gyroscope has a proof mass that is driven by a self-test signal, with the response of the proof mass to the self-test signal being used to determine whether the sensor is within specification. The self-test signal is provided as a non-periodic self-test pattern that does not correlate with noise such as environmental vibrations that are also experienced by the proof mass during the self-test procedure. The sense output signal corresponding to the proof mass is correlated with the non-periodic self-test signal, such that an output correlation value corresponds only to the proof mass response to the applied self-test signal.

A drive circuitry for a vibration gyroscope is described. The drive circuitry comprises a digital phase shifter, a variable gain amplifier and a pulse signal generator arranged to generate a digital pulse signal having a frequency substantially equal to a drive frequency of the vibration gyroscope. A controller is arranged to connect drive actuation units of the vibration gyroscope to outputs of the pulse signal generator during a first start-up time period, to outputs of the digital phase shifter during a second start-up time period, and to outputs of the variable gain amplifier during a measurement time period. Furthermore, a vibration gyroscope device and a method of driving a vibration gyroscope are described.