G01D3/032

METHOD FOR IMPROVING EMC ROBUSTNESS OF INTEGRATED CAPACITIVE SENSORS
20220236308 · 2022-07-28 ·

A method is provided for improving the EMC robustness of Integrated Capacitive Sensor systems with a sensor Signal-Conditioner (SSC). The SSC is connected with a capacitive integrating converter to convert a received signal into a bit stream. An oscillator provides a plurality of sampling frequencies. A counter connected with the capacitive integrating converter collects the bit stream and calculates the digital representative of the physical input which is than stored in an output register. The method includes performing some conversions with different sampling frequencies from the oscillator or a frequency divider by the capacitive integrating Signal-Converter; storing the results of the samplings and using the results in the following cycle to calculate for each sampling frequency a difference to the prior sampling of the same frequency; and calculating the digital representative of the input signal from the external sensing capacitor as the reverse weighted average of the samplings of the different frequencies.

Sensor circuit and method for filtering a sensor signal

Sensor circuits having a filter and methods for filtering a sensor signal are provided. In this case, a passband width of an adjustable low-pass filter or bandpass filter is adjusted on the basis of a comparison of a measure of a signal change of a sensor signal with a threshold value.

ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.

ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.

Compensation for multiple non-ideal position sensor harmonic components in a rotary system
11277089 · 2022-03-15 · ·

Examples described herein provide a rotary system that includes a rotor having an axis of rotation, a position sensor to measure an angular position of the rotor with respect to the axis of rotation, and a processing system to perform operations. The operations include receiving an output from the position sensor, the output being a measure of an angular position of the rotor with respect to the axis of rotation. The operations further include generating, based on the output from the position sensor, an error signal, an estimated angular velocity, and an estimated position. The operations further include performing a position sensor harmonic adaptation based at least in part on the error signal, the estimated angular velocity, and the estimated position to generate adaptation coefficients. The operations further include performing a position sensor harmonic compensation based on the adaptation coefficients and the estimated position to generate a difference in position.

ANOMALY DETECTION IN MULTIDIMENSIONAL SENSOR DATA

A computer includes a processor and a memory storing instructions executable by the processor to receive a time series of vectors from a sensor, determine a weighted moving mean of the vectors, determine an inverse covariance matrix of the vectors, receive a current vector from the sensor, determine a squared Mahalanobis distance between the current vector and the weighted moving mean, and output an indicator of an anomaly with the sensor in response to the squared Mahalanobis distance exceeding a threshold. The squared Mahalanobis distance is determined by using the inverse covariance matrix.

MEASURING CIRCUIT FOR REGISTERING AND PROCESSING SIGNALS AND MEASURING DEVICE FOR USING SAID MEASURING CIRCUIT
20210278446 · 2021-09-09 ·

A measuring circuit for registering and processing signals received from a transducer having a plurality of transducer elements includes a first signal input, a second signal input and a third signal input. The first signal input is configured to receive a first signal from a first transducer element. The second signal input is configured to receive a first signal from a second transducer element. The third signal input is configured to receive a second signal sum indicative of a sum of a second signal from each of the plurality of transducer elements, each of the second signals being an inverse of a corresponding first signal. A processor is electrically coupled to the three signal inputs and is configured to register each of the first signals individually; register the second sum signal; and generate a differential signal based on the first and second signals.

MEASURING CIRCUIT FOR REGISTERING AND PROCESSING SIGNALS AND MEASURING DEVICE FOR USING SAID MEASURING CIRCUIT
20210278446 · 2021-09-09 ·

A measuring circuit for registering and processing signals received from a transducer having a plurality of transducer elements includes a first signal input, a second signal input and a third signal input. The first signal input is configured to receive a first signal from a first transducer element. The second signal input is configured to receive a first signal from a second transducer element. The third signal input is configured to receive a second signal sum indicative of a sum of a second signal from each of the plurality of transducer elements, each of the second signals being an inverse of a corresponding first signal. A processor is electrically coupled to the three signal inputs and is configured to register each of the first signals individually; register the second sum signal; and generate a differential signal based on the first and second signals.

METHOD OF COMPENSATING TEMPERATURE INFLUENCE IN CAPACITIVE MEASUREMENTS

A method of operating a capacitive measurement system for compensation of temperature influence is described. The capacitive measurement system includes at least one capacitive sensor member in an installed state and a capacitive measurement circuit for determining a complex impedance of an unknown capacitance from a complex sense current through the at least one capacitive sensor member. In the method, a calibration measurement is carried out to obtain temperature characteristics of both the real part and the imaginary part of determined impedances. In following impedance measurements of the unknown capacitance at a current temperature, the real part and the imaginary part of the measured impedance is determined, and based on the real part determined at the current temperature and the determined temperature characteristics of both the real part and the imaginary part, the imaginary part of the impedance determined at the current temperature is corrected.

Systems and methods for correcting non-sinusoidal signals generated from non-circular couplers
20210278260 · 2021-09-09 ·

A system including a non-circular coupler, a sensor, a memory module, and a processor module is provided. The sensor includes a transmitter coil adapted to be energized by a high frequency current source and at least two receiving coils. One of the receiver coils generate a sine-like function output signal and the other generates a cosine-like function output signal upon rotation of the coupler. The memory module is operable to compensate for non-sinusoidal output signals caused by a plurality of geometric errors and a gap between the coupler and the at least two receiving coils. The processor module configured to process the non-sinusoidal output signals from both the first and second receiver coils, determine an error in the non-sinusoidal output signals from both the first and second receiver coils, mathematically compensate the assembly to eliminate the error and generates an output signal representative of the rotational position of the coupler.