Disclosed is a device for entering an input through a rotary motion, including a rotating body, and a fixed body to which the rotating body is coupled and rotates, wherein a first magnetic material and a second magnetic material are disposed on the rotating body and the fixed body, respectively, such that a clicking sensation to the rotation of the rotating body is generated by a magnetic force between the first and second magnetic materials, and an optical sensor and one or more magnetic sensors are disposed on the fixed body such that an amount, a direction, or a speed of rotation of the rotating body is recognized by the optical sensor, and wherein the one or more magnetic sensors detect the magnetic force.

Disclosed is a device for entering an input through a rotary motion, including a rotating body, and a fixed body to which the rotating body is coupled and rotates, wherein a first magnetic material and a second magnetic material are disposed on the rotating body and the fixed body, respectively, such that a clicking sensation to the rotation of the rotating body is generated by a magnetic force between the first and second magnetic materials, and an optical sensor and one or more magnetic sensors are disposed on the fixed body such that an amount, a direction, or a speed of rotation of the rotating body is recognized by the optical sensor, and wherein the one or more magnetic sensors detect the magnetic force.

A detection device includes an illumination optical system configured to illuminate a first alignment mark for detecting a position of an object in a first direction and a second alignment mark for detecting a position of the object in a second direction and a detection optical system configured to detect light beams from the alignment marks. The illumination optical system includes an optical element disposed at a position optically conjugate to a surface to be illuminated, and the optical element includes a region configured to form an illumination light beam for illuminating a first portion of the surface to be illuminated with a first angular distribution and a region configured to form an illumination light beam for illuminating a second portion of the surface to be illuminated with a second angular distribution.

A detection device includes an illumination optical system configured to illuminate a first alignment mark for detecting a position of an object in a first direction and a second alignment mark for detecting a position of the object in a second direction and a detection optical system configured to detect light beams from the alignment marks. The illumination optical system includes an optical element disposed at a position optically conjugate to a surface to be illuminated, and the optical element includes a region configured to form an illumination light beam for illuminating a first portion of the surface to be illuminated with a first angular distribution and a region configured to form an illumination light beam for illuminating a second portion of the surface to be illuminated with a second angular distribution.

An optical position-measuring device for determining the position of a first object relative to a second object movable relative to the first object along a measurement direction includes a scale with a measuring graduation connected to the first object and extending along the measurement direction. A scanner is connected to the second object and includes a fiber-optic array including optical fibers. The fiber-optic array is configured as a fiber-optic plate having an image-input face facing the scale and an image-output face facing the detector array. The fiber-optic array transmits a light pattern into a detection plane of the detector array. An interstitial medium is disposed between the image-output face of the fiber-optic plate and the detector array to ensure that an amount of deflection that the beams exiting the image-output face undergo on a path to the detector array is smaller than in a case without the interstitial medium.

An optical position-measuring device for determining the position of a first object relative to a second object movable relative to the first object along a measurement direction includes a scale with a measuring graduation connected to the first object and extending along the measurement direction. A scanner is connected to the second object and includes a fiber-optic array including optical fibers. The fiber-optic array is configured as a fiber-optic plate having an image-input face facing the scale and an image-output face facing the detector array. The fiber-optic array transmits a light pattern into a detection plane of the detector array. An interstitial medium is disposed between the image-output face of the fiber-optic plate and the detector array to ensure that an amount of deflection that the beams exiting the image-output face undergo on a path to the detector array is smaller than in a case without the interstitial medium.

A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.

An apparatus for measuring the vapor pressure of a liquid hydrocarbon sample is disclosed. The apparatus comprises a sealed chamber (25) for receiving the sample. The chamber (25) is at least partially defined by a moveable element (26) such that moving the moveable element (26) alters the volume of the chamber (25). The apparatus comprises a displacement sensor (29) configured to measure a displacement of the movable element (26).

An apparatus for measuring the vapor pressure of a liquid hydrocarbon sample is disclosed. The apparatus comprises a sealed chamber (25) for receiving the sample. The chamber (25) is at least partially defined by a moveable element (26) such that moving the moveable element (26) alters the volume of the chamber (25). The apparatus comprises a displacement sensor (29) configured to measure a displacement of the movable element (26).

A bearing test apparatus for testing a bearing (hereinafter, referred to as a test bearing) has a chamber, a bearing cap disposed in the chamber and coupled to an outer wheel of the test bearing, a driving shaft connected to an inner wheel of the test bearing to rotate the inner wheel, an extension arm extending in a radial direction of the bearing cap from the bearing cap to expose one end thereof out of the chamber, and a measurement arm configured to make a contact with one end of the extension arm and configured to be rotatable by the extension arm, wherein an exclusive torque of the test bearing is obtained by measuring a force applied to the measurement arm by the extension arm when a rotation force is applied to the bearing cap by the outer wheel.