Patent classifications
G01F1/34
SYSTEMS AND METHODS FOR MEASURING LOW SPEED FLUID FLOW
Disclosed herein are an apparatus and method fluid flow measurements which include a pressure transducer and a flexible tube. The pressure transducer is tuned to measure flow speeds having a Reynolds number less than 100 and include an inlet. The flexible tube has a first end fluidly coupled to the inlet and a second end positioned adjacent to and in fluid communication with a plurality of fluid outlets of a microchannel flow structure. Each of the plurality of fluid outlets has a cross section defining an outlet area. The second end has a cross section defining a flexible tube area that is larger than the outlet area.
DETERMINING FLUID FLOW ACROSS ROTARY PUMP
Systems, devices, and methods are provided for measuring fluid flow across a pump used in a system for precisely and accurately metering fluid. The systems, devices, and methods can use contactless approaches to measure the properties of the fluid being pumped. The measured properties can be used to precisely and accurately determine the flow rate through the pump.
Gas inspection method, substrate processing method, and substrate processing system
A gas inspection method includes: inputting a signal for opening a secondary valve; measuring, by a secondary pressure gauge, a pressure P on a downstream side of an orifice of a flow rate controller at a time point when a period t elapses from the input of the signal for opening the secondary valve; measuring, by the secondary pressure gauge, a standard deviation σ of the pressure P on the downstream side of the orifice of the flow rate controller at the time point when the period t elapses from the input of the signal for opening the secondary valve; and determining whether or not an open degree of the secondary valve is normal by comparing the pressure P and the standard deviation σ of the pressure P with a threshold value P0 of the pressure and a threshold value σ0 of the standard deviation of the pressure.
Gas inspection method, substrate processing method, and substrate processing system
A gas inspection method includes: inputting a signal for opening a secondary valve; measuring, by a secondary pressure gauge, a pressure P on a downstream side of an orifice of a flow rate controller at a time point when a period t elapses from the input of the signal for opening the secondary valve; measuring, by the secondary pressure gauge, a standard deviation σ of the pressure P on the downstream side of the orifice of the flow rate controller at the time point when the period t elapses from the input of the signal for opening the secondary valve; and determining whether or not an open degree of the secondary valve is normal by comparing the pressure P and the standard deviation σ of the pressure P with a threshold value P0 of the pressure and a threshold value σ0 of the standard deviation of the pressure.
AEROSOL PROVISION SYSTEMS
An aerosol delivery system comprising an airflow sensor in a sensor chamber defined by one or more chamber walls and a deformable membrane attached to at least one of the one or more chamber walls, wherein the membrane is attached to the one or more chamber walls over more than half of its surface area.
AEROSOL PROVISION SYSTEMS
An aerosol delivery system comprising an airflow sensor in a sensor chamber defined by one or more chamber walls and a deformable membrane attached to at least one of the one or more chamber walls, wherein the membrane is attached to the one or more chamber walls over more than half of its surface area.
Air Sensor System
An air sensor system including a pressure or airflow sensor, a filter housing that defines an air flow path to the air pressure sensor, and a filter in the air flow path. The filter includes a micro filter and a hydrophobic membrane. The hydrophobic membrane is downstream of the micro filter in the air flow path to the pressure or airflow sensor.
Air Sensor System
An air sensor system including a pressure or airflow sensor, a filter housing that defines an air flow path to the air pressure sensor, and a filter in the air flow path. The filter includes a micro filter and a hydrophobic membrane. The hydrophobic membrane is downstream of the micro filter in the air flow path to the pressure or airflow sensor.
DIRECT NUMERIC AFFINITY MULTISTAGE PUMPS SENSORLESS CONVERTER
Apparatus, including a pump system controller, features a signal processor or processing module configured at least to: receive signaling containing information about pump differential pressure, flow rate and corresponding power data at motor maximum speed published by pump manufacturers, as well as instant motor power and speed, for a system of pumps arranged in a multiple pump configuration; and determine corresponding signaling containing information about instant pump differential pressure and flow rate for the system of pumps arranged in the multiple pump configuration using a combined affinity equation and numerical interpolation algorithm, based upon the signaling received.
ODOR REPRODUCING APPARATUS OF HVAC SYSTEM FOR VEHICLE
An odor reproducing apparatus of a HVAC system for the vehicle may include an odor reproducing device configured to reproduce and evaluate odor by applying a HVAC system module, a heat exchange outdoor device mounted at one side of the odor reproducing device to control a temperature and humidity of an experimental space, and a control device mounted at one side of the odor reproducing device and the heat exchange outdoor device to control an operation of the odor reproducing device and an operation of the heat exchange outdoor device to implement a field environment and vehicle conditions for evaluating an odor improvement effect of the HVAC system reflecting an odor reduction technology.