A sensor element with a thin-film structure is made of platinum or a platinum alloy. The structure being applied to a ceramic substrate, in particular an Al.sub.2O.sub.3 substrate and being covered by a glass-ceramic coating. The glass-ceramic coating has an outer surface with surface profiling. A sensor module, a measuring assembly, and an exhaust-gas re-circulation system include the sensor element.

Disclosed is an apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device, in particular a coater or a bonder. The apparatus includes a sealing structure arranged in the pipe, a flow structure having a fluid inlet arranged upstream of the sealing structure and a fluid outlet arranged downstream of the sealing structure, a first chamber arranged in the pipe upstream of the sealing structure, and a second chamber arranged in the pipe downstream of the sealing structure, and a measuring device, wherein the measuring device is adapted to measure a first fluid pressure in the first chamber and a second fluid pressure in the second chamber, wherein the measuring device is configured to determine the fluid flow based on the first and second fluid pressure.

A mass flow meter includes an arcuate tube section that is semi-circular, an inner pressure sensor disposed on an inner curvature portion of the arcuate tube section and configured to capture an inner pressure measurement of the flowing fluid, an outer pressure sensor disposed on an outer curvature portion of the arcuate tube section and configured to capture an outer pressure measurement of the flowing fluid, and processing circuitry. The processing circuitry may be configured to receive the inner pressure measurement and the outer pressure measurement, determine a pressure difference between the inner pressure measurement and the outer pressure measurement, and determine a mass flow rate of the flowing fluid passing through the arcuate tube section based on the pressure difference and a fluid density of the flowing fluid.

A mass flow meter includes an arcuate tube section that is semi-circular, an inner pressure sensor disposed on an inner curvature portion of the arcuate tube section and configured to capture an inner pressure measurement of the flowing fluid, an outer pressure sensor disposed on an outer curvature portion of the arcuate tube section and configured to capture an outer pressure measurement of the flowing fluid, and processing circuitry. The processing circuitry may be configured to receive the inner pressure measurement and the outer pressure measurement, determine a pressure difference between the inner pressure measurement and the outer pressure measurement, and determine a mass flow rate of the flowing fluid passing through the arcuate tube section based on the pressure difference and a fluid density of the flowing fluid.

A device which: optically detects the presence of, measures the flow rate of, and identifies the characteristics of venting fugitive gas emissions. Specifically the device provides a spectral analysis of emission gas constituents; selective detection of the presence of venting hydrocarbons; measurement of venting emissions flow rates, the measurement of shut-in and flowing venting system pressures and the venting system temperatures. The flow rates are corrected, relative to the detection of the gas constituents and standard temperature and pressure (STP). These devices are configured to collect such data electronically and transmit via various telemetry systems, to a secure remote data network for reporting, access, evaluation, real-time monitoring and archiving as required.

A device which: optically detects the presence of, measures the flow rate of, and identifies the characteristics of venting fugitive gas emissions. Specifically the device provides a spectral analysis of emission gas constituents; selective detection of the presence of venting hydrocarbons; measurement of venting emissions flow rates, the measurement of shut-in and flowing venting system pressures and the venting system temperatures. The flow rates are corrected, relative to the detection of the gas constituents and standard temperature and pressure (STP). These devices are configured to collect such data electronically and transmit via various telemetry systems, to a secure remote data network for reporting, access, evaluation, real-time monitoring and archiving as required.

The present disclosure relates to a measurement tube including a tubular main body, which has a wall and a lumen, and a sensor holder, which is arranged on and integrally bonded to an outer lateral surface of the wall of the main body, opposite the lumen, the sensor holder configured to be mechanically connected to at least one sensor component for sensing at least one measurement variable of a measurement material located in the lumen. The sensor holder is at least partly produced by an additive manufacturing method directly on the lateral surface of the wall of the main body. In a method for producing such a measurement tube, liquefied material is applied to the outer lateral surface of the wall of the main body and allowed to resolidify there to form a part of the sensor holder, which part is integrally bonded to the wall of the main body.

The present disclosure relates to a measurement tube including a tubular main body, which has a wall and a lumen, and a sensor holder, which is arranged on and integrally bonded to an outer lateral surface of the wall of the main body, opposite the lumen, the sensor holder configured to be mechanically connected to at least one sensor component for sensing at least one measurement variable of a measurement material located in the lumen. The sensor holder is at least partly produced by an additive manufacturing method directly on the lateral surface of the wall of the main body. In a method for producing such a measurement tube, liquefied material is applied to the outer lateral surface of the wall of the main body and allowed to resolidify there to form a part of the sensor holder, which part is integrally bonded to the wall of the main body.

A novel thermopile having high sensitivity and reliability at the time of measuring a flow rate of gas in a thermopile sensor is provided. A thermopile sensor includes a thermopile in which pairings of PolySi and a metal film are connected in series on an insulating film, the metal film is connected so as to overlap on the PolySi in each pair, the metal film crosses a gap between the PolySi and the PolySi in a connection portion between pairings, and a gap between the PolySis in a portion where the metal film crosses is wider than a gap between the PolySis in the remaining portion.

A thermal flow measuring device comprising a sensor with a metal sensor housing, the sensor housing including at least a first and a second pin sleeve extending from a base, each pin sleeve having a longitudinal axis and an end face, the two pin sleeves defining a connecting axis, wherein in the first pin sleeve a first heater is arranged and in the second pin sleeve a temperature sensor is arranged, wherein the sensor housing includes at least a third pin sleeve, having a second heater, and a flow obstruction embodied such that the third pin sleeve is arranged in a first flow direction at least partially in the flow shadow of the flow obstruction, wherein the first flow direction extends at an angle of 80-100° to the connecting axis and lies on a plane perpendicular to the longitudinal axes of the first and second pin sleeves.