A mass flow meter includes one or more sensing elements that are exposed to a fluid flow in a pipe or conduit. The preferred sensing elements comprise two types: a first having a single curved azimuthal arm and a second having two, i.e., outer and inner, curved azimuthal arms. In a preferred embodiment, three of the first elements, occupying approximately 60, alternate with three of the second elements, the outer arms occupying approximately 60 and the inner arms occupying approximately 120. Each sensing element includes a torque transfer portion which extends through the flow pipe or conduit and a lever arm outside the pipe which engages a circumferential torque collecting ring. The ring, in turn, engages a fixed element or fin having a torque sensing device such as one or more strain gauges affixed thereto. Alternatively, flow and torque sensing may be achieved by an LVDT or servo-feedback system.

To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid passing through the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.

The present invention provides a new and unique apparatus featuring a signal processor or processing module configured to: receive signaling containing information about a fluid flow passing through a pipe that is channelized causing flow variations in the fluid flow; and determine corresponding signaling containing information about a fluid flow characteristic of the fluid flow that depends on the flow variations caused in the fluid flow channelized, based upon the signaling received. The signal processor or processing module may be configured to provide the corresponding signaling, including where the corresponding signaling contains information about the fluid flow characteristic of the fluid flow channelized.

A hydrocarbon absorbing air filter box is provided for absorbing evaporative hydrocarbon emissions from an air intake duct of an internal combustion engine. A combined mass airflow sensor and hydrocarbon trap comprising the hydrocarbon absorbing air filter box includes a duct supporting a hydrocarbon absorbing sheet within an interior of a housing. The duct communicates an airstream from an air filter to the air intake duct during operation of the internal combustion engine. An opening in the housing receives a mass airflow sensor into the duct, such that the mass airflow sensor is disposed within the airstream. Guide vanes extending across the duct reduce air turbulence within the airstream passing by the mass airflow sensor. Ports disposed along the duct allow the evaporative hydrocarbon emissions to be drawn into the interior and arrested by the hydrocarbon absorbing sheet when the internal combustion engine is not operating.

The invention relates to a measuring system comprising a measuring and operation electronic unit (ME) and a transducer device electrically coupled thereto. The transducer device (MW) has at least one tube, through which fluid flows during operation and which is caused to vibrate meanwhile, a vibration exciter (41), two vibration sensors (51, 52), on the inlet and outlet sides, respectively, for generating vibration signals (s1, s2), and two temperature sensors (71, 72), on the inlet and outlet sides, respectively, for generating temperature measurement signals (81, 82), said temperature sensors being coupled to a wall of the tube in a thermally conductive manner. The measuring and operation electronic unit (ME) is electrically connected to each of the vibration sensors (51, 52) and to each of the temperature sensors (71, 72) and also to the at least one vibration exciter (41). The measuring and operation electronic unit (ME) is designed to feed electrical power into the at least one vibration exciter (41) in order to effect mechanical vibrations of the tube (11) by means an electrical excitation signal (e1). Furthermore, the measuring and operation electronic unit (ME) is designed to generate a mass flow sequence (X.sub.m), namely a series of temporally successive mass flow measurement values (x.sub.m,i) representing the instantaneous mass flow rate (m) of the fluid, by means of each of the vibration signals (s1, s2) and each of the temperature measurement signals (1, 2) in such a way that, at least for a reference mass flow rate (m.sub.ref), namely a specified mass flow rate of a reference fluid flowing through the transducer device, the mass flow measurement values (x.sub.m,i.fwdarw.x.sub.m,ref) are independent of the temperature difference ().

The invention relates to a measuring system comprising a measuring and operation electronic unit (ME) and a transducer device electrically coupled thereto. The transducer device (MW) has at least one tube, through which fluid flows during operation and which is caused to vibrate meanwhile, a vibration exciter (41), two vibration sensors (51, 52), on the inlet and outlet sides, respectively, for generating vibration signals (s1, s2), and two temperature sensors (71, 72), on the inlet and outlet sides, respectively, for generating temperature measurement signals (81, 82), said temperature sensors being coupled to a wall of the tube in a thermally conductive manner. The measuring and operation electronic unit (ME) is electrically connected to each of the vibration sensors (51, 52) and to each of the temperature sensors (71, 72) and also to the at least one vibration exciter (41). The measuring and operation electronic unit (ME) is designed to feed electrical power into the at least one vibration exciter (41) in order to effect mechanical vibrations of the tube (11) by means an electrical excitation signal (e1). Furthermore, the measuring and operation electronic unit (ME) is designed to generate a mass flow sequence (X.sub.m), namely a series of temporally successive mass flow measurement values (x.sub.m,i) representing the instantaneous mass flow rate (m) of the fluid, by means of each of the vibration signals (s1, s2) and each of the temperature measurement signals (1, 2) in such a way that, at least for a reference mass flow rate (m.sub.ref), namely a specified mass flow rate of a reference fluid flowing through the transducer device, the mass flow measurement values (x.sub.m,i.fwdarw.x.sub.m,ref) are independent of the temperature difference ().

A method is for producing individual dosing quantities of a powdered product via a drum dosing device. Individual masses of multiple ejected dosing quantities are sequentially determined. A mass mean value is formed and compared to a predetermined inner target mass range. If the mass mean value is inside the range, the level of the partial vacuum acting on the dosing opening in the filling position remains unchanged, and the above formation of a mass mean value begins anew. If the mass mean value is outside the range, an adapted partial vacuum is ascertained such that in the case of excessively low mass mean value, the level of the partial vacuum is increased, and in the case of excessively high mass mean value, the level of the partial vacuum is decreased. The adapted partial vacuum is applied to the dosing opening in the filling position.

Calibrating a plurality of fluid sensors of a remote metering system is disclosed. The system includes a material supply device including a main pump and a main flow sensor for monitoring an output of the main pump. The application system also includes a remote metering system for receiving the material flowing from the material supply device and applying the material to substrates. The remote metering system includes a first applicator assembly including a first applicator and a first flow sensor for monitoring an output of the first applicator, and a second applicator assembly including a second applicator and a second flow sensor for monitoring an output of the second applicator. The remote metering system further includes a controller in signal communication with the remote metering station and the material supply device. The controller performs a first and second calibration operations on the first and second flow sensors, respectively.

Calibrating a plurality of fluid sensors of a remote metering system is disclosed. The system includes a material supply device including a main pump and a main flow sensor for monitoring an output of the main pump. The application system also includes a remote metering system for receiving the material flowing from the material supply device and applying the material to substrates. The remote metering system includes a first applicator assembly including a first applicator and a first flow sensor for monitoring an output of the first applicator, and a second applicator assembly including a second applicator and a second flow sensor for monitoring an output of the second applicator. The remote metering system further includes a controller in signal communication with the remote metering station and the material supply device. The controller performs a first and second calibration operations on the first and second flow sensors, respectively.

A thin film forming method includes: a first operation of supplying a source gas at a first flow rate into a reactor; a second operation of purging the source gas in the reactor to an exhaust unit; a third operation of supplying a reactive gas at a second flow rate into the reactor; a fourth operation of supplying plasma into the reactor; and a fifth operation of purging the reactive gas in the reactor to the exhaust unit, wherein, during the second to fifth operations, the source gas is bypassed to the exhaust unit, and a flow rate of the source gas bypassed to the exhaust unit is less than the first flow rate. According to the thin film forming method, the consumption of the source gas and the reactive gas may be reduced, and the generation of reaction by-products in the exhaust unit may be minimized.