A thin film forming method includes: a first operation of supplying a source gas at a first flow rate into a reactor; a second operation of purging the source gas in the reactor to an exhaust unit; a third operation of supplying a reactive gas at a second flow rate into the reactor; a fourth operation of supplying plasma into the reactor; and a fifth operation of purging the reactive gas in the reactor to the exhaust unit, wherein, during the second to fifth operations, the source gas is bypassed to the exhaust unit, and a flow rate of the source gas bypassed to the exhaust unit is less than the first flow rate. According to the thin film forming method, the consumption of the source gas and the reactive gas may be reduced, and the generation of reaction by-products in the exhaust unit may be minimized.

A flow sensor for use downstream from a particulate media dispensing device is provided having an inlet to receive particulate media and an outlet to dispense the media. The flow sensor has an inlet portion with a funnel to direct particulate media towards a central axis. An axially mounted flow director is located downstream from the funnel to direct the media outwards towards a sensor portion. A capacitive sensor located in the sensor portion surrounds the flow director to create an annular flow path to measure the amount of media that passes through sensor rings in the sensor.

A computer implemented method for selecting an appropriately sized meter for use in a selected application implemented by a computer processor implementing instructions stored in a non-transient memory is described. The instructions include receiving utility meter data transmitted from a plurality of utility meters, each utility meter being installed at a unique utility monitoring location, identifying incorrectly sized utility meters based on utility meter data for particular utility meters that displays quantization effects, and selecting an appropriate meter based on the identification of the utility meters displaying quantization effects.

A computer implemented method for selecting an appropriately sized meter for use in a selected application implemented by a computer processor implementing instructions stored in a non-transient memory is described. The instructions include receiving utility meter data transmitted from a plurality of utility meters, each utility meter being installed at a unique utility monitoring location, identifying incorrectly sized utility meters based on utility meter data for particular utility meters that displays quantization effects, and selecting an appropriate meter based on the identification of the utility meters displaying quantization effects.

A grain mass flow sensor assembly of an agricultural harvester has a continuously curved sensor plate positioned to receive a grain flow from an exit of the grain elevator. The continuously curved sensor plate is configured to change the direction of the grain flow in order to generate a reaction force for measuring the grain mass flow rate of the grain flow. The continuously curved sensor plate is attached to a sensor plate to load cell mounting bracket. The sensor plate to load cell mounting bracket is attached to a single point load cell torque or moment compensated force transducer at a single mounting point. The single point load cell torque or moment compensated force transducer produces a mass flow sensor signal that is proportionate to the grain mass flow rate.

A grain mass flow sensor assembly of an agricultural harvester has a continuously curved sensor plate positioned to receive a grain flow from an exit of the grain elevator. The continuously curved sensor plate is configured to change the direction of the grain flow in order to generate a reaction force for measuring the grain mass flow rate of the grain flow. The continuously curved sensor plate is attached to a sensor plate to load cell mounting bracket. The sensor plate to load cell mounting bracket is attached to a single point load cell torque or moment compensated force transducer at a single mounting point. The single point load cell torque or moment compensated force transducer produces a mass flow sensor signal that is proportionate to the grain mass flow rate.

In some examples, a mass airflow sensor apparatus includes a housing having a tubular bore for passage of air, with an airflow sensor disposed at least partially within the tubular bore. The airflow sensor may be configured to measure a flow rate of air flowing past the airflow sensor. A focus component may be disposed upstream of the mass airflow sensor, the focus component including a cylindrical tubular focus member suspended within the bore. Further, a nozzle may be disposed upstream of the focus component. The nozzle may include a conical inner surface angled toward a center of the bore. In addition, a grid component may be disposed upstream of the focus component. The grid component may include a mesh grid including a plurality of openings for smoothing a flow of air flowing toward the airflow sensor.

A method for determining a mass flow of ammonia between two SCR catalytic converters disposed one after the other in an SCR catalytic converter system in an exhaust system, which comprises only one reduction agent dosing unit upstream of the first SCR catalytic converter, characterized in that the determination is carried out from the signal of a NOx sensor disposed between the two SCR catalytic converters and the signal of a NOx sensor disposed downstream of the second SCR catalytic converter.

A method for determining a mass flow of ammonia between two SCR catalytic converters disposed one after the other in an SCR catalytic converter system in an exhaust system, which comprises only one reduction agent dosing unit upstream of the first SCR catalytic converter, characterized in that the determination is carried out from the signal of a NOx sensor disposed between the two SCR catalytic converters and the signal of a NOx sensor disposed downstream of the second SCR catalytic converter.

A thin film forming method includes: a first operation of supplying a source gas at a first flow rate into a reactor; a second operation of purging the source gas in the reactor to an exhaust unit; a third operation of supplying a reactive gas at a second flow rate into the reactor; a fourth operation of supplying plasma into the reactor; and a fifth operation of purging the reactive gas in the reactor to the exhaust unit, wherein, during the second to fifth operations, the source gas is bypassed to the exhaust unit, and a flow rate of the source gas bypassed to the exhaust unit is less than the first flow rate. According to the thin film forming method, the consumption of the source gas and the reactive gas may be reduced, and the generation of reaction by-products in the exhaust unit may be minimized.