The method for inspecting the flow rate controller for controlling a flow rate of a fluid includes creating and recording a three-dimensional database in which a first pressure, a set flow rate or a second pressure, and a control value of a piezoelectric element are associated with each other, based on reference data, measuring, as target data, control values of the piezoelectric element corresponding to the first pressure detected by a first pressure detector and the set flow rate specified in a recipe of a substrate processing process or the second pressure detected by a second pressure detector, at the time of the execution of the substrate processing process, and determining whether or not there is a problem in a diaphragm valve, by comparing the target data with the reference data included in the three-dimensional database.

This disclosure describes systems, methods, and devices related to a remote calibration controller. The remote calibration controller may be capable of performing the procedure to remotely test and calibrate differential pressure, static pressure, and temperature on a remotely located fixed orifice plate flow measurement device through the use electromechanical and electro pneumatic hardware located at the site of the flow measurement device that are controlled by on-site controller/logic circuitry remotely accessed via bi-directional communications.

Systems for reducing leakage at a pressure barrier in a gas meter, are provided including first and second gaskets; a flexible circuit having variable thicknesses, such that a thicker portion of the flexible circuit is provided between the first and second gaskets; and a mounting plate on the flexible circuit, the mounting plate compressing the flexible circuit between the first and second gaskets on a non-pressurized side of the pressure barrier of the gas meter. Related flexible circuits and gas meters are also provided.

Methods and apparatus, such as a controller of a respiratory therapy device, generate a signal representing an estimate of flow rate of gas flow from the device. The respiratory therapy device may include a motor-operated blower. The method may include receiving in the controller, signals generated by a set of sensors, including measures of pressure and frequency (e.g., speed) of the motor. The controller may be configured to compute an entrained air density function and generate the estimate signal based on a function of the measures of pressure and frequency, and the entrained air density function. The entrained air density function may apply signals from additional sensors, such as atmospheric pressure, gas temperature, and ambient relative humidity, to compute atmospheric density. Control operations of the therapy device may then be based on the estimated signal, which may be applied to assess accuracy of a signal from a flow sensor.

A direction selective unidirectional clutch assembly for a fluid meter counter module assembly is characterized by a drive selector mechanism to couple a direction selection drive shaft to a unidirectional clutch to select one of a first flow direction and a second flow direction of flow of the fluid to drive a counter module. The direction selection draft is coupled to a rotating member (e.g. impeller) driven by flow of the fluid and rotates in a direction that is responsive to the direction of rotation of the rotating member. A pair of gears are mounted to slide along the direction selection draft between a first position and a second position. A direction changing gear is mounted at the second position. Further provided is a flow meter with a direction selective unidirectional clutch assembly.

A device which: optically detects the presence of, measures the flow rate of, and identifies the characteristics of venting fugitive gas emissions. Specifically the device provides a spectral analysis of emission gas constituents; selective detection of the presence of venting hydrocarbons; measurement of venting emissions flow rates, the measurement of shut-in and flowing venting system pressures and the venting system temperatures. The flow rates are corrected, relative to the detection of the gas constituents and standard temperature and pressure (STP). These devices are configured to collect such data electronically and transmit via various telemetry systems, to a secure remote data network for reporting, access, evaluation, real-time monitoring and archiving as required.

A gas meter is configured for diagnostics using differential pressure (DP) measurements. The configurations include executable instructions to actively manage the DP sensor. These instructions active the DP sensor only during stable flow and, where applicable, for a defined test time period. This feature manages power consumption to maintain battery life with acceptable standards or regulations.

A sacrificial anode for use with a meter is provided. The sacrificial anode comprising an anode body including one or more anodic metals, the anode body being configured to be positioned in a problem area of the meter including a cathodic metal, such that the anode body corrodes in place of the cathodic metal of the problem area preserving the cathodic metal. Related meters and systems are also provided.

A device which: optically detects the presence of, measures the flow rate of, and identifies the characteristics of venting fugitive gas emissions. Specifically the device provides a spectral analysis of emission gas constituents; selective detection of the presence of venting hydrocarbons; measurement of venting emissions flow rates, the measurement of shut-in and flowing venting system pressures and the venting system temperatures. The flow rates are corrected, relative to the detection of the gas constituents and standard temperature and pressure (STP). These devices are configured to collect such data electronically and transmit via various telemetry systems, to a secure remote data network for reporting, access, evaluation, real-time monitoring and archiving as required.

Embodiments of a portable verification system can move from one commercial building or residential home gas flow meter location to another and temporarily connect to the building's or home's natural gas piping. The portable verification system may be connected to the gas flow meter by a flexible hose having a lap joint flange at one end. Adaptor fittings can be used to provide additional versatility. When in an intended use, natural gas flows into the reference meter and then into the gas flow meter connected to the commercial building or residential home. Downtime is limited to the time required to complete a circuit between the gas flow meter and the portable verification system.