Systems and methods for copper etch monitoring and control are described. Certain embodiments include utilizing thin-film cells to measure the absorbance of a copper etch solution to determine the etch rate of the solution. In another embodiment, a method of controlling etch rate of a copper etch solution includes detecting characteristics of the copper etch solution utilizing a sensor device, e.g., flow cell and/or attenuated total reflection probe, calculating, based on the detected characteristics of the copper etch solution, the etch rate of the copper etch solution, and adjusting the etch rate of the copper etch solution in response to the calculated etch rate deviating from a specified value.

First and second measurement operations are performed according to each of a plurality of geometric conditions while keeping the geometric condition. In the first measurement operation, illumination light is radiated from a first light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a first light receiving position. In the second measurement operation, illumination light is radiated from a second light radiating position toward a measurement target position and spectroscopic measurement is performed on reflected light traveling from the measurement target position toward a second light receiving position. The two spectroscopic measurement results are averaged. The second light radiating position and the second light receiving position are respectively disposed symmetrical to the first light radiating position and the first light receiving position with respect to a reference axis.

A spectrometer apparatus for measuring spectra of a liquid sample, such as a beverage like wine. The apparatus has an integrating cavity with a reflective inner wall to receive a cuvette containing the liquid sample within the integrating cavity. A combination of light inlet ports and light outlet ports are provided to receive light from at least one light source and deliver light to a spectrometer. A light path adjuster is configured to selectively adjust a light path through the integrating cavity so at least two distinct light paths are provided wherein when the light path adjuster is in a first configuration, the apparatus is in transmission mode in which light from the light source follows a first light path; when the light path adjuster is in a second configuration, the apparatus is in a diffusely reflecting mode in which light from the light source follows a second light path.

A spectrometer apparatus for measuring spectra of a liquid sample, such as a beverage like wine. The apparatus has an integrating cavity with a reflective inner wall to receive a cuvette containing the liquid sample within the integrating cavity. A combination of light inlet ports and light outlet ports are provided to receive light from at least one light source and deliver light to a spectrometer. A light path adjuster is configured to selectively adjust a light path through the integrating cavity so at least two distinct light paths are provided wherein when the light path adjuster is in a first configuration, the apparatus is in transmission mode in which light from the light source follows a first light path; when the light path adjuster is in a second configuration, the apparatus is in a diffusely reflecting mode in which light from the light source follows a second light path.

The invention relates to an optical system, to a spectrometer device comprising such optical system and to a method to operate such an optical system comprising an entrance aperture for entering primary light containing both a first, lower wavelength range and a second, higher wavelength range into said optical system, a grating for spectral dispersion of the primary light beam into a first fan of diffracted light within the first wavelength range and a primary zero order light beam, a mirror element suitably positioned to reflect the primary zero order light beam back as secondary light beam to the grating where it is dispersed into a second fan of diffracted light within the second wavelength range, a detector arrangement with detectors, an absorber element to be reversibly placed within the primary zero order light beam, and a filter element to be reversibly placed within the primary light beam.

In an FTIR 1, a beam splitter 12, fixed mirror 13 and movable mirror 14 are shared by a main interferometer 10 including a multiwavelength infrared light source 11 and a control interferometer 20 including a semiconductor laser 21. A first detector 16 detects infrared interference light generated by the main interferometer 10 and transmitted through or reflected by a sample. A second detector 26 detects monochromatic interference light generated by the control interferometer 20. A spectrum creator 32 determines an optical path difference between an optical path via the fixed mirror 13 and an optical path via the movable mirror 14, based on the intensity and uncalibrated oscillation wavelength of the monochromatic interference light detected by the second detector 26, and creates a spectrum by performing fast Fourier transform on an interferogram which shows a distribution of the intensity of the infrared interference light detected by the first detector 16 with respect to the optical path difference. An oscillation wavelength calibrator 34 locates an absorption peak of carbon dioxide from the peaks in the spectrum created by the spectrum creator 32, and compares a wavenumber or wavelength of the absorption peak with a true absorption wavenumber or wavelength of carbon dioxide to determine a calibrated oscillation wavelength of the semiconductor laser 21.

A reconfigurable spectroscopy system comprises tunable lasers and wavelength lockers to lock to accurate reference wavelengths. Band combiners with differently optimized wavelength ranges multiplex the optical signal over the time domain, to emit a plurality of reference wavelengths for spectroscopy applications. The power requirements are greatly reduced by multiplexing over the time domain in time slots which do not affect sampling and receiving of the spectroscopy data.

A spectroscopic measurement device emits light to a measurement target and measures the measurement light output from the measurement target in accordance with the light emission. A spectroscopic measurement device includes: a first housing having a light shielding property and configured to house a light source that emits light and having a first opening through which the light emitted from the light source passes; a second housing having a light shielding property and having a second opening through which the measurement light passes and configured to house a spectrometer that receives the measurement light that has passed through the second opening; and an arm member configured to relatively rotatably join the first housing and the second housing. A proximal end side of the arm member is rotatably joined with the second housing. The first housing is attached to a distal end side of the arm member.

A spectroscopic measurement device emits light to a measurement target and measures the measurement light output from the measurement target in accordance with the light emission. A spectroscopic measurement device includes: a first housing having a light shielding property and configured to house a light source that emits light and having a first opening through which the light emitted from the light source passes; a second housing having a light shielding property and having a second opening through which the measurement light passes and configured to house a spectrometer that receives the measurement light that has passed through the second opening; and an arm member configured to relatively rotatably join the first housing and the second housing. A proximal end side of the arm member is rotatably joined with the second housing. The first housing is attached to a distal end side of the arm member.

An interferometer device includes an interferometer unit with at least two mirrors disposed in parallel, wherein at least one of the mirrors is actuatable parallel to the other mirror and a first distance between the two mirrors is alterable. The interferometer device further includes at least one deflection mirror disposed downstream of the interferometer unit in a light transmission direction of light from the interferometer unit and a detector device, onto which the light is able to be aligned by the deflection mirror. The detector device includes at least two differently sensitive detection regions for transmitted wavelengths or wavelength ranges of the light, which detection regions are spatially separated from one another and able to be irradiated separately by the deflection mirror.