According to some embodiments, a Micro Wideband Spectroscopic Analysis Device (MWSAD) is designed to operate from the visible to the far infrared. The MWSAD is the first unified platform to implement nearly all kind of molecular spectroscopy. This design is based on combining/integrating Diffractive Focusing Element (DFE) such as Fresnel lens/Zone plate with wide and finite range tuning devices. The wide range tuning devices are tunable lenses and/or a long stroke linear motor. The finite tuning devices are micro pinhole controlled by MEMS/PZT actuator. The MEMS/PZT actuator is used for finite tuning the micro pinhole location across the chromatic focuses of the Fresnel lens/DFE. The long stroke linear motor is used for wide range tuning the pinhole location across the chromatics focuses. The tunable lens is used for wideband tuning the chromatics focuses locations within the micro pinhole.

Implementations of the present disclosure relate to a plasma chamber having an optical device for measuring emission intensity of plasma species. In one implementation, the plasma chamber includes a chamber body defining a substrate processing region therein, the chamber body having a sidewall, a viewing window disposed in the sidewall, and a plasma monitoring device coupled to the viewing window. The plasma monitoring device includes an objective lens and an aperture member having a pinhole, wherein the aperture member is movable relative to the objective lens by an actuator to adjust the focal point in the plasma using principles of optics, allowing only the light rays from the focal point in the plasma to reach the pinhole. The plasma monitoring device therefore enables an existing OES (coupled to the plasma monitoring device through an optical fiber) to monitor emission intensity of the species at any specific locations of the plasma.

According to some embodiments, a Micro Wideband Spectroscopic Analysis Device (MWSAD) is designed to operate from the visible to the far infrared. The MWSAD is the first unified platform to implement nearly all kind of molecular spectroscopy. This design is based on combining/integrating Diffractive Focusing Element (DFE) such as Fresnel lens/Zone plate with wide and finite range tuning devices. The wide range tuning devices are tunable lenses and/or a long stroke linear motor. The finite tuning devices are micro pinhole controlled by MEMS/PZT actuator. The MEMS/PZT actuator is used for finite tuning the micro pinhole location across the chromatic focuses of the Fresnel lens/DFE. The long stroke linear motor is used for wide range tuning the pinhole location across the chromatics focuses. The tunable lens is used for wideband tuning the chromatics focuses locations within the micro pinhole.

Implementations of the present disclosure relate to a plasma chamber having an optical device for measuring emission intensity of plasma species. In one implementation, the plasma chamber includes a chamber body defining a substrate processing region therein, the chamber body having a sidewall, a viewing window disposed in the sidewall, and a plasma monitoring device coupled to the viewing window. The plasma monitoring device includes an objective lens and an aperture member having a pinhole, wherein the aperture member is movable relative to the objective lens by an actuator to adjust the focal point in the plasma using principles of optics, allowing only the light rays from the focal point in the plasma to reach the pinhole. The plasma monitoring device therefore enables an existing OES (coupled to the plasma monitoring device through an optical fiber) to monitor emission intensity of the species at any specific locations of the plasma.