An apparatus to determine occurrence of an anomalous plasma event occurring at or near a process station of a multi-station integrated circuit fabrication chamber is disclosed. In particular embodiments, optical emissions generated responsive to the anomalous plasma event may be detected by at least one photosensor of a plurality of photosensors. A processor may cooperate with the plurality of photosensors to determine that the anomalous plasma event has occurred at or near by a particular process station of the multi-station integrated circuit fabrication chamber.

The present disclosure relates to a method for preparing a colorant having a target color and the colorant. The method includes configuring submicron particles prepared from a predetermined material to have a predetermined size; adjusting a ratio of the submicron particles to cuttlefish juice submicron particles to a predetermined ratio; evaporating a predetermined solution mixed with the submicron particles and the cuttlefish juice submicron particles to obtain an amorphous photonic crystal structure; acquiring spectral data for reflected light generated by incident light irradiating the amorphous photonic crystal structure; determining whether the spectral data meets a predetermined condition, wherein the predetermined condition is associated with the target color; and responsive to determining that the spectral data does not meet the predetermined condition, adjusting at least one of the ratio or a size of each of the submicron particles until the spectral data meets the predetermined condition.

The present disclosure relates to a method for preparing a colorant having a target color and the colorant. The method includes configuring submicron particles prepared from a predetermined material to have a predetermined size; adjusting a ratio of the submicron particles to cuttlefish juice submicron particles to a predetermined ratio; evaporating a predetermined solution mixed with the submicron particles and the cuttlefish juice submicron particles to obtain an amorphous photonic crystal structure; acquiring spectral data for reflected light generated by incident light irradiating the amorphous photonic crystal structure; determining whether the spectral data meets a predetermined condition, wherein the predetermined condition is associated with the target color; and responsive to determining that the spectral data does not meet the predetermined condition, adjusting at least one of the ratio or a size of each of the submicron particles until the spectral data meets the predetermined condition.

A measurement method includes: (a) measuring an emission intensity for each wavelength of light detected from a plasma generated in a plasma processing apparatus at each different exposure time by a light receiving element; (b) specifying, with respect to each of a plurality of different individual wavelength ranges that constitutes a predetermined wavelength range, a distribution of the emission intensity in the individual wavelength range measured at an exposure time at which an emission intensity of a predetermined wavelength included in the individual wavelength range becomes an emission intensity within a predetermined range; (c) selecting a distribution of the emission intensity in the individual wavelength range from the distribution of the emission intensity specified in (b); and (d) outputting the distribution of the emission intensity selected for each individual wavelength range.

The invention relates to an optical emission spectrometer (1) being easily adjustable, and to a method (100) to set-up and operate such a spectrometer (1) comprising a plasma stand (2) to establish a light emitting plasma from sample material, and an optical system (3) to measure the spectrum of the light (L) emitted by the plasma being characteristic to the sample material, where the optical system (3) comprises at least one light entrance aperture (31), at least one diffraction grating (32) to split up the light (L) coming from the plasma (A) and one or more detectors (33) to measure the spectrum of the light (L), wherein the plasma stand (2) and the optical system (3) are directly and fixedly mounted on respective a plasma stand flange (2B) and an optical system flange (3B) which are directly and fixedly connected to each other and wherein the optical emission spectrometer (1) further comprises an analyzing unit (34) adapted to analyze the measured spectrum and to compensate for a drift of the spectrum relative to the detector (33) potentially caused by heat transferred from the plasma stand (2) to the optical system (3) considering the thermal expansion of the optical system (3).

In accordance with an example embodiment, a laser arrangement is provided, the laser arrangement comprising a light source for generating light output; a collimator assembly for collimating the light output from the light source into a pump beam; an optical resonator assembly for generating pulsed output beam based on the pump beam directed thereat; and a beam displacement assembly for laterally shifting the pump beam to adjust the position at which the pump beam meets a surface of the optical resonator assembly.

In accordance with an example embodiment, a laser arrangement is provided, the laser arrangement comprising a light source for generating light output; a collimator assembly for collimating the light output from the light source into a pump beam; an optical resonator assembly for generating pulsed output beam based on the pump beam directed thereat; and a beam displacement assembly for laterally shifting the pump beam to adjust the position at which the pump beam meets a surface of the optical resonator assembly.

Embodiments described herein generally relate to: sensing and/or authentication using luminescence imaging; diagnostic assays, systems, and related methods; temporal thermal sensing and related methods; and/or to emissive species, such as those excitable by white light, and related systems and methods.

An optical assembly for an analyzer instrument for analysis of elemental composition of a sample using optical emission spectroscopy includes: an exciter generating an excitation focused at a target position to produce optical emission from the sample; and an optical arrangement including a light collection arrangement transferring the optical emission from the target position to a detector assembly's detector interface. The light collection arrangement includes: an off-axis parabolic light collecting mirror including an aperture, a lens arrangement including converging and diverging axicon lens portions, the lens arrangement positioned so its optical axis is parallel to that of the light collecting mirror and intersects a surface of the light collecting mirror at the aperture, and an off-axis parabolic focusing mirror having its focal point at the detector interface, the optical axis of the lens arrangement being parallel to that of the focusing mirror and intersects the focusing mirror's surface.

An optical assembly for an analyzer instrument for analysis of elemental composition of a sample using optical emission spectroscopy includes: an exciter generating an excitation focused at a target position to produce optical emission from the sample; and an optical arrangement including a light collection arrangement transferring the optical emission from the target position to a detector assembly's detector interface. The light collection arrangement includes: an off-axis parabolic light collecting mirror including an aperture, a lens arrangement including converging and diverging axicon lens portions, the lens arrangement positioned so its optical axis is parallel to that of the light collecting mirror and intersects a surface of the light collecting mirror at the aperture, and an off-axis parabolic focusing mirror having its focal point at the detector interface, the optical axis of the lens arrangement being parallel to that of the focusing mirror and intersects the focusing mirror's surface.