A mirror clip for use in an optical mirror housing for an optical emission spectrometer includes a body having a mirror seating portion, at least one hinge member for positioning and attaching the clip to an optical mirror housing, and at least one clamping member for releasably securing the mirror clip to the optical mirror housing. A mirror can be accommodated in the mirror seating portion. The at least one hinge member may include a hook to provide a releasable hinged connection between the mirror clip and the optical mirror housing.

A mirror clip for use in an optical mirror housing for an optical emission spectrometer includes a body having a mirror seating portion, at least one hinge member for positioning and attaching the clip to an optical mirror housing, and at least one clamping member for releasably securing the mirror clip to the optical mirror housing. A mirror can be accommodated in the mirror seating portion. The at least one hinge member may include a hook to provide a releasable hinged connection between the mirror clip and the optical mirror housing.

Disclosed is an instrument analyzing elemental composition of a sample, including a measurement assembly including: an exciter generating an excitation directed at a target position to cause emission from the sample; a detector assembly receiving the emission from the sample at the target position, arranged to generate one or more measurement signals that are descriptive of the emission; an imaging apparatus for capturing images of an area around the target position; and a controller for carrying out a measurement, arranged to operate the exciter to generate the excitation and to carry out analysis of the elemental composition of the sample based on the measurement signals. The controller performs reliability analysis associated with the measurement by operating the imaging apparatus to capture images of the sample, determining estimated reliability of the measurement based on the captured images, and selectively issuing an indication of measurement reliability based on the estimated reliability.

Optical property measurement using a sensor behind a display screen Examples of this application disclose a method for measuring optical properties of a target. The method comprises illuminating the target with an illumination area with a display screen in contact with the target, and analysing signals reflected from the target and transmitted back through the display screen to a sensor positioned behind the display screen, to determine the optical properties of the target.

According to one implementation, an inflammable spark estimation system includes: a photodetector for measuring intensity of discharge light arising from a spark arising from a structural object made of a plurality of materials; and a data processing system configured to determine whether the spark has inflammability, based on the intensity of the discharge light measured by the photodetector, with referring to determination information. The determination information has been determined based on features of waveforms of wavelength spectra of possible discharge light arising from possible inflammable sparks respectively arising from possible materials of which the structural object may be made. The data processing system is configured to further determine which of the plurality of the materials the spark has arisen from, based on the intensity of the discharge light measured by the photodetector, with referring to the determination information, when the spark has been determined to have the inflammability.

According to one implementation, an inflammable spark estimation system includes: a photodetector for measuring intensity of discharge light arising from a spark arising from a structural object made of a plurality of materials; and a data processing system configured to determine whether the spark has inflammability, based on the intensity of the discharge light measured by the photodetector, with referring to determination information. The determination information has been determined based on features of waveforms of wavelength spectra of possible discharge light arising from possible inflammable sparks respectively arising from possible materials of which the structural object may be made. The data processing system is configured to further determine which of the plurality of the materials the spark has arisen from, based on the intensity of the discharge light measured by the photodetector, with referring to the determination information, when the spark has been determined to have the inflammability.

Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.

Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.

A device for generating a plasma and detecting a light signal. The plasma being intended to be generated in the vicinity of a study area of a sample and the light signal originating in the study area. The device including a current generator, an analysis unit, and an electrical and optical waveguide including means for transmitting an electric current configured to generate a plasma at one end of the means for transmitting the electric current in the vicinity of the study zone, means for detecting and transmitting configured to detect and transmit the light signal from the study area to the analysis unit, and an optical cladding portion, the means for transmitting the electric current and the means for detecting and transmitting the light signal being accommodated in the optical cladding portion.

Disclosed are embodiments of an improved apparatus and system, and associated methods for optically diagnosing a semiconductor manufacturing process. A hyperspectral imaging system is used to acquire spectrally-resolved images of emissions from the plasma, in a plasma processing system. Acquired hyperspectral images may be used to determine the chemical composition of the plasma and the plasma process endpoint. Alternatively, a hyperspectral imaging system is used to acquire spectrally-resolved images of a substrate before, during, or after processing, to determine properties of the substrate or layers and features formed on the substrate, including whether a process endpoint has been reached; or before or after processing, for inspecting the substrate condition.