An imaging assembly of a spectral imaging ellipsometer includes an analyzer configured to polarize reflected light reflected from a sample surface, an imaging mirror optical system disposed on an optical path of the reflected light passing through the analyzer and including a first mirror having a concave surface and a second mirror having a convex surface, and a light detector configured to receive light passing through the imaging mirror optical system to collect spectral data. The reflected light is firstly reflected by the first mirror, the firstly reflected light is secondarily reflected by the second mirror and travels toward the first mirror again, and then thirdly reflected by the first mirror to be imaged on a light receiving surface of the light detector.

An imaging assembly of a spectral imaging ellipsometer includes an analyzer configured to polarize reflected light reflected from a sample surface, an imaging mirror optical system disposed on an optical path of the reflected light passing through the analyzer and including a first mirror having a concave surface and a second mirror having a convex surface, and a light detector configured to receive light passing through the imaging mirror optical system to collect spectral data. The reflected light is firstly reflected by the first mirror, the firstly reflected light is secondarily reflected by the second mirror and travels toward the first mirror again, and then thirdly reflected by the first mirror to be imaged on a light receiving surface of the light detector.

A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic-polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.

A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic-polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.

The invention relates to a measurement device (10) for measuring light (200) from a light source (2), comprising an optical unit (30) with a delay element (31) for splitting a polarized light beam (210) of the light (200) into a first partial beam (211) and a second partial beam (212), which have a defined phase shift relative to one another. Furthermore, the invention relates to a measurement system (1), as well as a measurement method (100).

Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

A system (1) for measuring the optical activity of a sample (2) comprises at least one frequency modulation device (3), at least one synchronization device (4), and at least one detection device (5). The frequency modulation device (3) is configured to modulate a frequency of incident electromagnetic radiation being emitted from a sample (2) and/or being irradiated on to a sample (2) with at least one frequency modulation signal (Sf). The synchronization device (4) is configured to receive the at least one frequency modulation signal (Sf) and to emit at least one detection modulation signal (Sd) being synchronized with the at least one frequency modulation signal (Sf). The system (1) is configured such that the detection device (5) detects the electromagnetic radiation (EMs) in synchronization with the detection modulation signal (Sd).

An imager for imaging a plurality of images of a single scene over a plurality of disparate electromagnetic wavelength sets includes front-end optics for outputting a polychromatic, collimated image beam of the scene; a beam displacer configured for splitting the collimated image beam into spatially displaced, mutually parallel beams, and an imaging-sensor array configured for registration of the spatially displaced wavelength sets at disparate locations along the imaging-sensor array. In alternative versions, the beam displacer displaces constituent light beams based on at least one of wavelength and polarization. In various implementations, a back-end focusing element focuses each constituent beam onto a predetermined location along the imaging-sensor array. The imaging-sensor array is optimally configured for simultaneous sampling of the plural images focused thereupon by the back-end focusing elements.

A total reflection spectroscopic measurement device includes a terahertz wave generation unit, an internal total reflection prism, a detection unit configured to detect the terahertz wave, an electric field vector measurement unit configured to measure an electric field vector of the terahertz wave, and an analysis unit configured to acquire information about an optical constant of the object to be measured. Proportions of S polarization component and P polarization component of the terahertz wave are constant. The analysis unit acquires the information about the optical constant on the basis of a ratio between S polarization component and P polarization component of the measured electric field vector when the object is not arranged on the total reflection surface and a ratio between S polarization component and P polarization component of the measured electric field vector when the object is arranged on the total reflection surface.

A total reflection spectroscopic measurement device includes a terahertz wave generation unit, an internal total reflection prism, a detection unit configured to detect the terahertz wave, an electric field vector measurement unit configured to measure an electric field vector of the terahertz wave, and an analysis unit configured to acquire information about an optical constant of the object to be measured. Proportions of S polarization component and P polarization component of the terahertz wave are constant. The analysis unit acquires the information about the optical constant on the basis of a ratio between S polarization component and P polarization component of the measured electric field vector when the object is not arranged on the total reflection surface and a ratio between S polarization component and P polarization component of the measured electric field vector when the object is arranged on the total reflection surface.