Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. In one or more embodiments, a process chamber includes chamber body, a window disposed on a first portion of the chamber body, a chamber bottom, and a shield disposed on a second portion of the chamber body. The shield has a flat surface facing the window to reduce reflected radiant energy to a back side of a substrate disposed in the process chamber during operation. The process chamber further includes an edge support for supporting the substrate and a cooling member disposed on the chamber bottom. The cooling member is disposed in proximity of the edge support to cool the edge support during low temperature operation in order to improve the temperature uniformity of the substrate.

Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.

A first radiance meter is directed toward an object to be measured, radiance is measured through a space where dust is present with the use of at least two wavelengths by the first radiance meter, second radiance meters which are equal in number to one or more objects having temperatures different from that of the object to be measured are directed toward the objects, radiances are measured through the space with the use of at least two wavelengths by the second radiance meters respectively, and a temperature of the object to be measured, a temperature of the dust, and concentration of the dust are measured from the radiances measured by the first radiance meter and the second radiance meters.

The disclosure provides respective detection devices of a sensor array that detect infrared light and convert the infrared light into a DC component electrical signal.

An atmosphere of ammonia that absorbs infrared light in a wavelength band overlapping with the measurement wavelength band of a radiation thermometer is formed in a chamber in which a semiconductor wafer is thermally treated. A filter that selectively transmits infrared light having a wavelength not overlapping with the absorption wavelength band of ammonia is installed between an optical lens system and a detector of the radiation thermometer to avoid influence of the infrared light absorption by ammonia. A conversion table corresponding to the installed filter is selected from a plurality of conversion tables representing a correlation between energy of infrared light incident on the radiation thermometer and temperature of a black body, and is used at the radiation thermometer. Accordingly, the temperature of the semiconductor wafer can be accurately measured in the atmosphere of ammonia.

Provided is an optical sensor directed into a combustion chamber is used to selectively sense a predefined spectral range of an optical spectrum for different light paths running through the combustion chamber to measure a gas temperature distribution in the combustion chamber. A spectral intensity is determined for each spectral range and associated with an item of light path information which identifies the light path in question. The spectral intensities determined and and the associated items of light path information are fed as input data to a machine learning routine which is trained to reproduce spatially resolved training temperature distributions. Output data from the machine learning routine are then output as the gas temperature distribution.

A thermal imaging system comprises a substrate, stacked graphene arrays on the substrate, and a number of bandpass filters separating the stacked graphene arrays.

A method for determining a multi-dimensional profile of at least one emission parameter corresponding to an exhaust emission of a combustion process is presented. The method includes emitting a laser beam in a plurality of directions through the exhaust emission. The laser beam includes a plurality of wavelengths and the exhaust emission is characterized by the plurality of emission parameters. The method further includes detecting a plurality of absorption spectrum signals for each of the plurality of directions and determining a plurality of single-dimensional profiles corresponding to the at least one emission parameter. Each of the plurality of single-dimensional profiles is determined based on the plurality of absorption spectrum signals corresponding to each respective direction of the plurality of directions. The method also includes generating the multi-dimensional profile corresponding to the at least one emission parameter based on the plurality of single-dimensional profiles.

An additive manufacturing temperature controller/temperature sensor uses one or more spectrophotometric sensors to monitor temperature of successive layers and preferably localized sections of successive layers of a melt pool, and transients thereof, of an object being generated for the purpose of dynamic control of the additive manufacturing device and/or quality control of the generated object manufactured with the additive manufacturing device. Generally, the additive manufacturing temperature controller/sensor apparatus monitors temperature of a section of the object during manufacture as a function of wavelength, time, position, and/or angle to determine melt extent in terms of radius and/or depth.

A system and method for processing a daytime IR image to discriminate between solar glints and hotspots, where the latter represent man-made activity. Two spectrally distinct thermal wavelength bands are defined and respective spectral intensities are detected for a corresponding pixel in an image. A figure of merit is calculated as a function of the detected spectral intensities. The calculated figure of merit is compared to a predetermined rule to determine whether the corresponding pixel is a glint or a hotspot.