Examples described herein generally relate to apparatus and methods for rapid thermal processing (RTP) of a substrate. In one example, a process chamber includes chamber body, a window disposed on a first portion of the chamber body, a chamber bottom, and a shield disposed on a second portion of the chamber body. The shield has a flat surface facing the window to reduce reflected radiant energy to a back side of a substrate disposed in the process chamber during operation. The process chamber further includes an edge support for supporting the substrate and a cooling member disposed on the chamber bottom. The cooling member is disposed in proximity of the edge support to cool the edge support during low temperature operation in order to improve the temperature uniformity of the substrate.

A noncontact temperature sensing device receives radiative emissions from a sensed object to measure radiant heat flux and computes a temperature using multiple photodiode sensors, or elements, each sensitive to a different bandwidth of near IR light. The device samples a fluctuating heat source such as a flame or explosion at a fast sampling frequency, and compares corresponding or simultaneous readings in each bandwidth for computing a ratio of the respective bands and determining a temperature via ratio pyrometry. Multiple sensors of adjacent bands each receive corresponding readings of near IR emissions, perform fast, concurrent sampling to mitigate inconsistencies of heat source fluctuations, and compute a temperature based on a ratio between the sampled readings of the different bands. Near IR detection allows common and inexpensive photodiodes to be employed, and the photoelectric rather than thermoelectric sensing allows faster sampling and at a greater distance from the sensed heat source.

Embodiments include techniques for determining the uniformity of a powder layer distribution, where the techniques include pre-heating a powder layer, scanning the powder layer, and receiving a signal from the powder layer. The techniques also include filtering the received signal, measuring a radiation intensity of the received signal over a range of wavelengths, and comparing the measured radiation intensity to a reference spectrum for the powder layer.

An optically-monitored and/or optically-controlled electronic device is described. The device includes at least one of a semiconductor transistor or a semiconductor diode. An optical detector is configured to detect light emitted by the at least one of the semiconductor transistor or the semiconductor diode during operation. A signal processor is configured to communicate with the optical detector to receive information regarding the light detected. The signal processor is further configured to provide information concerning at least one of an electrical current flowing in, a temperature of, or a condition of the at least one of the semiconductor transistor or the semiconductor diode during operation.

An infrared photodetection system is provided that is capable of measuring infrared light up to high-temperature regions while improving a temperature resolution for low-temperature regions without increasing image-acquisition time even if the measuring temperature range varies. The infrared photodetection system is set up to exhibit sensitivity spectrum SSP1 for high sensitivity (for low temperature use) and sensitivity spectrum SSP2 for low sensitivity (for high temperature use) in the transmission band of the bandpass filter when different voltages are applied to a quantum-dot infrared photodetector. The infrared photodetection system then integrates temperature data for the infrared light detected using sensitivity spectrum SSP1 and temperature data for the infrared light detected using sensitivity spectrum SSP2, in order to output a temperature distribution in a measurement region.

An irradiating device for irradiating a machining field with a machining beam, in particular with a laser beam, for carrying out a welding process, is provided. The irradiating device includes a beam scanner for aligning the machining beam to a machining position in the machining field. The irradiating device has an imaging device for imaging a part-region of the machining field on a pyrometer which has at least two pyrometer segments. The imaging device images thermal radiation which emanates from the machining position in the machining field on a first pyrometer segment, and images thermal radiation which emanates from a position in the machining field being situated ahead of or behind the machining position along an advancing direction of the machining beam in the machining field on at least one second pyrometer segment. A machine tool having such an irradiating device is also provided.

Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.

A system for determining a risk level for particles moving along a path. The system includes a sensor arrangement including at least one set of sensing elements including at least two sensing elements arranged to co-operate with mutually separated sensing zones along the path of movement of the particles to detect a signal related to temperature of the particles. The system further includes a processing device arranged to: receive signals from the sensor arrangement; form signals from the sensing elements into a pulse train when a particle moves through field-of-view of the sensor arrangement; based on the pulse train, determine a risk level for the particles; and adapt at least one parameter used in the determination of the risk level based on at least one property of the particles moving along the path of movement from the first position to the second position.

System and method for measuring flame temperature profile are disclosed. The temperature measurement system disclosed measures temperature profile of coal burner flames in a multi-burner furnace environment by capturing temperature images using optical devices. Any point or area of temperature captured in the image is determined by the ratio of the magnitude of the near infrared (NIR) light and the visible red light of that particular point or area, from which the temperature distribution of burner flame is developed. The two light ratio method can minimize the impact on the flame temperature measurement caused by the flame soot in a furnace and thus can greatly improve the temperature measurement accuracy.

A method involves determining multiple temperatures of an object from spectral data collected from the object. The spectral data covers a plurality of wavelengths. The method comprises using a computer to (a) assign an initial value for residual radiation; (b) identify a black body profile that best fits the spectral data over the plurality of wavelengths; (c) remove radiation corresponding to the identified profile from the residual radiation; and (d) return to (b) until the residual radiation reaches a termination criterion.