G01J2009/0211

QUANTITATIVE PHASE IMAGE GENERATING METHOD, QUANTITATIVE PHASE IMAGE GENERATING DEVICE, AND PROGRAM
20240004176 · 2024-01-04 · ·

A quantitative phase image generating method for a microscope, includes: irradiating an object with illumination light; disposing a focal point of an objective lens at each of a plurality of positions that are mutually separated by gaps z along an optical axis of the objective lens, and detecting light from the object; generating sets of light intensity distribution data corresponding to each of the plurality of positions based upon the detected light; and generating a quantitative phase image based upon the light intensity distribution data; wherein the gap z is set based upon setting information of the microscope.

WAVEFRONT SENSOR AND METHOD OF USING IT
20200278257 · 2020-09-03 ·

An optical detection system for detecting data on the optical mutual coherence function of input field. The system comprising an encoder having similar unit cells, and an array of sensor cells located at a distance downstream of said unit cells with respect to a general direction of propagation of input light. The array defines a plurality of sub-array unit cells, each sub-array corresponding to a unit cell of the encoder, and each sub-array comprising a predetermined number M of sensor elements. The encoder applies predetermined modulation to input light collected by the system, such that each unit cell of said encoder directs a portion of the collected input light incident thereon onto sub-array unit cell corresponding therewith and one or more neighboring sub-array unit cells within a predetermined proximity region. The number M is determined in accordance with a predetermined number of sub-arrays unit cells within the proximity region.

QUANTITATIVE PHASE IMAGE GENERATING METHOD, QUANTITATIVE PHASE IMAGE GENERATING DEVICE, AND PROGRAM
20200271910 · 2020-08-27 · ·

A quantitative phase image generating method for a microscope, includes: irradiating an object with illumination light; disposing a focal point of an objective lens at each of a plurality of positions that are mutually separated by gaps z along an optical axis of the objective lens, and detecting light from the object; generating sets of light intensity distribution data corresponding to each of the plurality of positions based upon the detected light; and generating a quantitative phase image based upon the light intensity distribution data; wherein the gap z is set based upon setting information of the microscope.

APPARATUS FOR MEASURE OF COHERENCE OF LIGHT SOURCE FOR HOLOGRAPHIC DISPLAY AND METHOD THEREOF
20200182701 · 2020-06-11 ·

A method and an apparatus for measuring a coherence of a light source of a holographic display through steps of: photographing an interference pattern generated by light output from the light source; obtaining an interference pattern feature information with respect to the interference pattern from an interference pattern image of the interference pattern; and measuring the coherence of the light source based on the interference pattern feature information, are provided.

Wavefront shaping with coherent optical sensing

An example imaging system may include a spatial light modulator and a coherent optical receiver. The spatial light modulator may be configured to receive an optical input wave and perform wavefront shaping on the optical input wave to output a shaped wave. The coherent optical receiver may include an optical local oscillator, an optical beam splitter, an optical detector, and processing circuitry. The optical detector may be configured to receive a mixed wave from the optical beam splitter that is based on the mixing of a local oscillator wave with a scattering medium output wave that at least initially comprises a speckle pattern formed by the shaped wave interacting with a scattering medium. The processing circuitry may be configured to perform coherent detection on the mixed wave to extract optical amplitude and phase information, and provide an error signal as feedback to the spatial light modulator for performing iterative wavefront shaping.

REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

Reducing speckle in an excimer light source

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

Wavefront Shaping with Coherent Optical Sensing

An example imaging system may include a spatial light modulator and a coherent optical receiver. The spatial light modulator may be configured to receive an optical input wave and perform wavefront shaping on the optical input wave to output a shaped wave. The coherent optical receiver may include an optical local oscillator, an optical beam splitter, an optical detector, and processing circuitry. The optical detector may be configured to receive a mixed wave from the optical beam splitter that is based on the mixing of a local oscillator wave with a scattering medium output wave that at least initially comprises a speckle pattern formed by the shaped wave interacting with a scattering medium. The processing circuitry may be configured to perform coherent detection on the mixed wave to extract optical amplitude and phase information, and provide an error signal as feedback to the spatial light modulator for performing iterative wavefront shaping.

REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

DISPERSION MEASUREMENT DEVICE AND METHOD BASED ON FRANSON SECOND-ORDER QUANTUM INTERFERENCE TECHNOLOGY

The present disclosure provides a dispersion measurement device and method based on a Franson second-order quantum interference technology. The device includes: an energy-time entangled twin-photon source configured to generate a plurality of optical signals, where the optical signals each include a signal photon and an idle photon; a polarization splitter configured to split the signal photon and the idle photon, and enable the signal photon to pass through a to-be-measured dispersive medium, such that a correlation time processing module records, under a width of a coincidence measurement integration window, first time of the idle photon arriving at a first single-photon detector, and second time of the signal photon arriving at a second single-photon detector, and obtains a twin-photon conference time width based on the first time and the second time; and a processing module.