A temperature sensor probe having a shaft is described. The shaft is made from a material that is corrosion resistant to plasma and remnants of a plasma process. The shaft extends over a portion of a metal layer, which forms a tip of the temperature sensor probe. The shaft further extends over a sleeve of the temperature sensor probe, a portion of a fiber optic medium of the temperature sensor probe and a portion of the fiber bundle housing of the temperature sensor probe. The material of the shaft increases a number of active processing hours for which the shaft is used within a plasma chamber during the plasma process.

A temperature sensor includes: a thermosensitive element including a thermosensitive body, an extension wire having one end electrically connected to the thermosensitive body, and a sealing body made of an insulation material and covering a part of the extension wire and the thermosensitive body; a lead wire electrically connected to another end of the extension wire; and a covering body made of a resin and having a long shape and a rectangular cross-section, the covering body covering a part of the lead wire and the thermosensitive element. In a lateral direction of the covering body, a dimension of a region of the covering body covering the thermosensitive element is set less than a dimension of a region of the covering body covering the lead wire.

A temperature sensor includes: a thermosensitive element including a thermosensitive body, an extension wire having one end electrically connected to the thermosensitive body, and a sealing body made of an insulation material and covering a part of the extension wire and the thermosensitive body; a lead wire electrically connected to another end of the extension wire; and a covering body made of a resin and having a long shape and a rectangular cross-section, the covering body covering a part of the lead wire and the thermosensitive element. In a lateral direction of the covering body, a dimension of a region of the covering body covering the thermosensitive element is set less than a dimension of a region of the covering body covering the lead wire.

A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.

A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.

A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.

A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.

Systems and methods are disclosed herein for an electrical harness. The electrical harness may include a high temperature segment, a low temperature segment, and a transition segment between the high temperature segment and the low temperature segment. The electrical harness may include a conductor disposed within the electrical harness.

An acid steam cleaning apparatus for cleaning vessels using acid steam, comprising: a raw acid liquid container (1), a heater (2), a cleaning cavity (3), a double-walled tube, and a controller. The double-walled tube is installed in the cleaning cavity and has an inner tube (200) and an outer tube (300), wherein the inner tube (200) and the outer tube (300) closely contact each other; acid steam exit holes (230, 330) are provided around and/or at the upper portions of the inner tube (200) and the outer tube (300), the acid steam exit holes (230, 330) extending through the outer tube and the inner tube; the acid steam exit holes (230, 330) are in communication with the interior (220) of the inner tube (200); the interior (220) of the inner tube (200) is connected with an acid steam entry channel for forming an acid steam path; grooves (210) extending axially are provided on the outer surface of the inner tube (200); water/air entry holes (310) for water/air to enter are provided at the bottom of the outer tube (300), and water/air exit holes (320) for discharging water/air are distributed on the outer tube (300); the grooves (210) on the inner tube (200) are in communication with the water/air entry holes (310) and are in communication with the water/air exit holes (320) on the outer tube (300); the water/air entry holes (310) are connected with a water/air entry pipe for forming a water/air path. When vessels are being cleaned using acid steam, the vessels are fitted over the double-walled tube, and clean acid liquid and pure water pass through the acid steam path and the water/air path, so as to be separated from waste acid liquid, waste water, and waste air, such that the cleaning effect is improved, and the trouble of mounting and detaching components after cleaning is avoided.

A sensing element for a temperature sensor including a base with a platinum meander applied thereto. An alumina diffusion barrier (ADB) covers the meander to provide protection against contamination and structural stabilization, wherein the alumina diffusion barrier is a contiguous polycrystalline layer fabricated from alumina and approximately 1% by weight of a rutile additive to be substantially devoid of network porosity. The contiguous polycrystalline layer includes grains with a typical grain size being in a range of 0.5-3 m. A method for fabricating an alumina diffusion barrier includes the steps of: combining a nano-alumina and nano-rutile powder to create a formulation; applying the formulation to the platinum meander to form a layer; and sintering the layer to create a contiguous polycrystalline layer covering the platinum meander.