An interface module includes: N pairs of input connectors that are electrically conductive and that are configured to connect to and disconnect from N different temperature sensors, respectively; and M output connectors that are electrically conductive, where each pair of input connectors includes: a first input connector configured to connect to and disconnect from a first connector soldered to a first wire connected to one of the N different temperature sensors; and a second input connector configured to connect to and disconnect from a second connector soldered to a second wire connected to the one of the N different temperature sensors, where the second input connectors are electrically connected to second ones of the M output connectors, respectively, and where the first input connectors of the N pairs of input connectors are all electrically connected to a node that is connected to a first one of the M output connectors.

Immersion probes and related methods are generally described. In some embodiments, the probe comprises a shaft with a spiral strake disposed along at least a portion of the length of the shaft and/or a porous shroud extending from a distal portion of the shaft.

A system includes a measurement instrument including a first connector and a control module electrically connected to the first connector. A temperature probe including a shaft having a first end and a second end, a second connector being coupled to the first end, a thermocouple junction formed at a tip and configured to measure a change in temperature of a sample, and the second connector being received by the first connector when the temperature probe is attached to the measurement instrument. A storage module housed within the second connector and configured to store one or more parameters of the temperature probe. The control module being configured to: receive the one or more parameters; determine a temperature measurement based on a change in voltage; determine a first correction based on the one or more parameters; and determine an adjusted temperature measurement based on the temperature measurement and the first correction.

A temperature sensing unit is provided, which includes a temperature sensor for measuring a temperature of an object and a mounting member. The mounting member is elastic and is attached to the temperature sensor for securing the temperature sensor around the object, and the temperature sensor in one form defines a first thermocouple ribbon and a second thermocouple ribbon with a very low profile and high temperature capability.

A system includes a metal tub structure formed in an integrated circuit (IC) structure, a first metal component, and a second metal component. The first metal component is formed from a first metal. The first metal component is formed in an opening defined by the metal tub structure, and includes a first metal first junction element, a first metal second junction element, and a first metal bridge electrically connected to the first metal first junction element and the first metal second junction element. The second metal component is formed from a second metal different than the first metal, and includes a second metal first junction element electrically connected to the first metal first junction element to define a first thermocouple junction, and a second metal second junction element electrically connected to the first metal second junction element to define a second thermocouple junction.

The present inventive concept relates to a thermocouple connector and a manufacturing method of the same, the manufacturing method including forming connector pins, covering the connector pins using a glass material, the sensor electrodes including a positive sensor electrode and a negative sensor electrode respectively connected to the positive terminal and the negative terminal, the positive sensor electrode being the chromel and the negative terminal being the alumel, placing the connector pins in a center of a surrounding sealing material having a hole, filling liquid ceramic material into a space of the surrounding sealing material through the hole, sealing the hole, and solidifying the liquid ceramic material. According to the present inventive concept, the connector pin is provided by using the same kind of material as a material of the thermocouple sensor, whereby output voltage error is minimized and output voltage change due to long-term use is low.

A temperature sensor includes a temperature sensing element transducing a sensed temperature into an electrical output signal and having a plurality of electrically conductive leads, a mineral insulated cable having a plurality of conductor wires enclosed by a metal outer sheath, and an electrically insulating element. The conductor wires are insulated inside the cable and extend beyond the outer sheath. The electrically insulating element insulates the conductor wires at least partially with respect to each other and with respect to the outer sheath. The electrically insulating element has a first opening receiving the conductor wires and a second opening receiving the temperature sensing element. The electrically conductive leads are connected to the conductor wires at a junction region located within the electrically insulating element. The electrically insulating element has an aperture extending up to the junction region.

An interface module includes: N pairs of input connectors that are electrically conductive and that are configured to connect to and disconnect from N different temperature sensors, respectively; and M output connectors that are electrically conductive, where each pair of input connectors includes: a first input connector configured to connect to and disconnect from a first connector soldered to a first wire connected to one of the N different temperature sensors; and a second input connector configured to connect to and disconnect from a second connector soldered to a second wire connected to the one of the N different temperature sensors, where the second input connectors are electrically connected to second ones of the M output connectors, respectively, and where the first input connectors of the N pairs of input connectors are all electrically connected to a node that is connected to a first one of the M output connectors.

A device having a first terminal region and a second terminal region. The first terminal region includes fine-tune (FT) metal stripes that are separated from each other by a first distance along the longitudinal direction. The second terminal region is spaced apart from the first terminal region by at least an inter-terminal distance. The second terminal region includes coarse-tune (CT) metal stripes that are separated from each other by a second distance along the longitudinal direction. The second distance is greater than the first distance, and the inter-terminal distance greater than the second distance. Each of the FT metal stripes may be selected as a first access location, and each of the CT metal stripes may be selected as a second access location. A pair of selected first and second access locations access a sheet resistance defined by a distance therebetween.

The present disclosure relates to a rapid thermal processing apparatus for rapid heat treatment of a substrate, and particularly, to increasing the accuracy in measuring the temperature of a substrate to be thermally processed by configuring a thermocouple for measuring the temperature of the substrate under the same conditions as the substrate to be thermally processed so as to be attached to and detached from the chamber, and the present disclosure provides a rapid thermal processing apparatus having a thermocouple installed to measure a temperature of a substrate to be thermally processed located inside a chamber, and the rapid thermal processing apparatus includes a mounting hole formed in the chamber, and a thermocouple kit inserted into and mounted to the mounting hole so that a bonding portion of a thermocouple wire is located at a thermocouple substrate extending into the chamber.