An optomechanical pressure-measurement system measures pressure in the range of 10.sup.−6 Pa-10.sup.−2 Pa by measuring various properties of a vibrational mode of an ultra-thin membrane member. With independent measurements of the thickness and density of the membrane, in addition to the measured vibration mode properties, the system can operate as a primary pressure sensor. The membrane member is mounted on a vibration-isolated mount and is excited by a drive force. A laser beam impinges on the excited membrane, and an optical phase detector detects the amplitude of the oscillations, as well as parameters of the laser beam affected by the membrane vibration. In one embodiment, a mechanical damping is computed based on the amplitude or frequency shift (depending on the pressure range), and the pressure based on the ring-down time of the membrane vibration mode.

A method for testing a bond using a bond tester apparatus, the method comprising the steps of applying a mechanical force to the bond, determining, by a sensor component comprised by the bond tester apparatus, the applied force to the bond by measuring, by the sensor component, a displacement of the sensor component caused by the applied force and calculating, by the sensor component, the applied force on the basis of a first component which comprises a direct relationship with the measured displacement and on the basis of at least one of a second component, a third component and a fourth component.

A physical quantity sensor includes: a supporting member; and a sensor element supported by the supporting member, in which the sensor element includes a vibrator element, a drive signal wiring disposed on the vibrator element, and a first detection signal terminal and a second detection signal terminal disposed on the vibrator element, the supporting member includes a substrate on which the sensor element is joined, and a first detection signal wiring and a second detection signal wiring disposed on the substrate, and the first detection signal wiring and the second detection signal wiring respectively include areas that extend along a second axis intersecting with the first axis and that intersect with the drive signal wiring in a plan view as seen in a direction in which the sensor element and the substrate overlap with each other.

An electronic device including an actuator and a driving circuit electrically coupled to the actuator. The driving circuit can be configured to determine a resonance frequency of the actuator and deliver a driving frequency matching the resonance frequency to the actuator, as well as a driving voltage. The electronic device also includes a memory and a processor. The processor can determine the presence of a force applied to the electronic device based on the resonance frequency of the actuator. Based on determining a force is being applied to the electronic device, the processor can execute a predetermined function of the electronic device.

A force sensor includes a frame and an oscillation structure which has arms and can oscillate freely in the frame. The arms are fixed to suspension frame regions and run transverse to one another at least in sections. At least one conductor extends along at least two arms. An AC voltage can be applied to the at least one conductor to excite at least one oscillation mode of the oscillation structure with a resonant frequency using Lorentz force. The force sensor is designed such that the suspension regions are at least partially spatially displaced relative to one another when a force is applied to the frame, that the magnitude of the spatial displacement of the suspension regions depends on the magnitude of the force, and that the spatial displacement of the suspension regions causes detuning of the resonant frequency, the magnitude of which depends on the spatial displacement magnitude.

A resonator includes a vibrator with a base, and multiple vibrating arms extending therefrom. Moreover, a frame surrounds a periphery of the vibrating part and a holding arm couples the vibrator to the frame. The holding arm includes a pair of first support arms that are connected to the base opposite the vibrating arms and a coupling portion that couples the support arms with one another and that is connected to the frame.

An energy transmission system comprising a pole, at least one wire, a sensing system coupled to the pole for monitoring pole temperature, dynamic pole loading, external impact on the pole, vibration of the pole, and wires that are downed, at least one line sensor coupled to the wire and at least one powered data integrator. The sensing system comprises at least one dynamic pole loading sensor and a three-dimensional accelerometer. The dynamic pole loading sensor can be coupled to the lower portion of the pole above ground level but not more than 10 feet above ground level. Optionally there are two dynamic pole loading sensors, the first sensor having a longitudinal axis parallel to a longitudinal axis of the pole, and the second sensor having a longitudinal axis perpendicular to the longitudinal axis of the pole.

An electronic device including an actuator and a driving circuit electrically coupled to the actuator. The driving circuit can be configured to determine a resonance frequency of the actuator and deliver a driving frequency matching the resonance frequency to the actuator, as well as a driving voltage. The electronic device also includes a memory and a processor. The processor can determine the presence of a force applied to the electronic device based on the resonance frequency of the actuator. Based on determining a force is being applied to the electronic device, the processor can execute a predetermined function of the electronic device.

An environmental condition may be measured with a sensor (10) including a wire (20) having an ultrasonic signal transmission characteristic that varies in response to the environmental condition by sensing ultrasonic energy propagated through the wire using multiple types of propagation, and separating an effect of temperature on the wire from an effect of strain on the wire using the sensed ultrasonic energy propagated through the wire using the multiple types of propagation. A positive feedback loop may be used to excite the wire such that strain in the wire is based upon a sensed resonant frequency, while a square wave with a controlled duty cycle may be used to excite the wire at multiple excitation frequencies. A phase matched cone (200, 210) may be used to couple ultrasonic energy between a waveguide wire (202, 212) and a transducer (204, 214).

An energy transmission system comprising a pole, at least one wire, a sensing system coupled to the pole for monitoring pole temperature, dynamic pole loading, external impact on the pole, vibration of the pole, and wires that are downed, at least one line sensor coupled to the wire and at least one powered data integrator. The sensing system comprises at least one dynamic pole loading sensor and a three-dimensional accelerometer. The dynamic pole loading sensor can be coupled to the lower portion of the pole above ground level but not more than 10 feet above ground level. Optionally there are two dynamic pole loading sensors, the first sensor having a longitudinal axis parallel to a longitudinal axis of the pole, and the second sensor having a longitudinal axis perpendicular to the longitudinal axis of the pole.