A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.

A method for determining sensor parameters of an actively-driven sensor system may include obtaining as few as three samples of a measured physical quantity versus frequency for the actively-driven sensor system, performing a refinement operation to provide a refined version of the sensor parameters based on the as few as three samples and based on a linear model of an asymmetry between slopes of the measured physical quantity versus frequency between pairs of the as few as three samples, iteratively repeating the refinement operation until the difference between successive refined versions of the sensor parameters is below a defined threshold, and outputting the refined sensor parameters as updated sensor parameters for the actively-driven sensor system.

A measurement transducer for simultaneously measuring a force that can be both dynamic and static includes at least one piezoelectric transducer element having element surfaces on which the force generates electrical polarization charges proportional to a magnitude of the force. The measurement transducer includes a resonator element which can be excited to at least one resonance frequency and undergoes a transverse expansion from the action of the force in a transverse direction to the force. The magnitude of the transverse expansion is proportional to the magnitude of the force and causes in the resonance frequency a change that is a function of the force.

An ultrasonic sensor includes an adhesion sensor detecting adhesion of a foreign substance to a first surface of a bottom of a microphone housing. The adhesion sensor includes: a plurality of variable capacitances defined between a plurality of sensor electrodes disposed on the first surface of the bottom, each of the variable capacitances having a capacitance value which changes in response to adhesion of a foreign substance to the first surface; and an adhesion detection unit configured to measure an individual capacitance value which is a capacitance value of each of the variable capacitances and a total capacitance value which is a total of capacitance values of all the variable capacitances to determine, based on the individual capacitance value and the total capacitance value, whether a foreign substance adheres to the first surface, and, when it is determined that a foreign substance adheres, specify a type of the foreign sub stance.

A quartz pressure sensor that resonates in the thickness-shear mode can include a center resonator structure and first and second caps joined to the center resonator structure by bond joints. Each bond joint is comprised of a sealing glass having thickness less than 0.0012 inches (˜30 μm) and a melting point less than 573° C. The quartz pressure sensor can additionally include an inner diameter edge feature formed between the interior sidewall in the joint sidewall of the caps that reduces stresses at the bond joints and/or a high stress point in the cap bore.

Various embodiments of the present invention relate to an electronic device having a sensor module performing a plurality of functions, the electronic device comprising: the sensor module comprising a plurality of piezoelectric elements including a plurality of first electrodes and a plurality of second electrodes, a first signal terminal connected to the plurality of first electrodes, a second signal terminal, and a plurality of switches capable of selectively connecting at least some electrodes of the plurality of second electrodes to the second signal terminal; and a control circuit. The control circuit is configured to: in a state where the second signal terminal is connected to the at least some electrodes by means of the plurality of switches, detect a pressure inputted into the sensor module by means of the first signal terminal, by using at least some of the plurality of piezoelectric elements; on the basis of the pressure, in a state where the second signal terminal is connected to the at least some electrodes by means of the plurality of switches, output an ultrasound signal by using at least some of the plurality of piezoelectric elements by means of the first signal terminal; in a state where the second signal terminal is disconnected from the at least some electrodes by means of the plurality of switches, receive the ultrasound signal reflected to an external object, by using at least some of the plurality of piezoelectric elements; and generate biometric information on the external object, at least on the basis of the received ultrasound signal. Thus, when waiting for a user's fingerprint touch, the sensor module operates as a pressure sensor, and when a predetermined pressure due to the user's fingerprint touch is detected, the sensor module can operate as a fingerprint sensor. Various other embodiments are possible.

A hybrid sensor includes a piezoresistive element for sensing an applied force, a piezoelectric micromachined ultrasonic transducer (PMUT) for sensing the presence of an object within a threshold distance of the hybrid sensor, and a substrate onto which both the piezoresistive element and the PMUT are disposed.

A vibration sensor according to an embodiment includes a laminated body. The laminated body includes a support layer a first end of which is fixed; a piezoelectric layer on the support layer; an insulating layer disposed between the support layer and the piezoelectric layer; a common electrode disposed on a first principal surface of the piezoelectric layer; a first sensing electrode disposed in a first area on a second principal surface of the piezoelectric layer on the side opposite to the first principal surface; and a drive electrode disposed in a second area different from the first area on the second principal surface of the piezoelectric layer. The first area is located near the first end of the support layer.

Disclosed are a preparation method for a graphene aerogel array sensor and use thereof. A miniature graphene aerogel array device is prepared by combining in-situ printing and solvent plasticization and foaming, which has excellent flexibility and stability, and is suitable for use in a variety of scenarios, such as sensors, and energy storage devices, etc. The array sensor provided in the present disclosure exhibites extremely high stability, high accuracy and reliability. Combining with deep machine learning, the array sensor can be endowed with the function of learning and recognition of machine intelligence, thus greatly promoting the development of the next generation of artificial intelligence.

A method for manufacturing a deformation detection sensor that includes: preparing a plurality of thermoplastic resin layers, at least one of which has a main surface on which a conductive member is formed; laminating the plurality of thermoplastic resin layers; after lamination, integrally forming the plurality of thermoplastic resin layers by hot pressing to obtain a laminated body configured so that a transmission line is formed from a first portion of the conductive member and the laminated body; and attaching a piezoelectric film to the laminated body so that a piezoelectric element is formed from a second portion of the conductive member, the laminated body, and the piezoelectric film.