A pressure sensor 1 according to the first aspect of the invention includes: a substrate 50; and a functional element 40 which is laid on the substrate 50 and is composed of functional titanium oxide including crystal grains of at least one of β-phase trititanium pentoxide (β-Ti.sub.3O.sub.5) and λ-phase trititanium pentoxide (λ-Ti.sub.3O.sub.5) and having the property that at least a portion of crystal grains of at least one of β-phase trititanium pentoxide (β-Ti.sub.3O.sub.5) and λ-phase trititanium pentoxide (λ-Ti.sub.3O.sub.5) change into crystal grains of titanium dioxide (TiO.sub.2) when the functional titanium oxide is heated to 350° C. or higher. The substrate 50 includes a substrate thin-film section 51 having a thin film form in which the thickness in the stacking direction of the substrate 50 and the functional element 40 is smaller than that in the other directions.

In an embodiment an electric circuitry includes at least a first delay chain of a plurality of delay elements and at least a second delay chain of a plurality of delay elements being arranged on a substrate, the respective delay elements of the at least one first and second delay chains are configured to provide a propagation delay time depending on strain applied to the substrate, wherein the delay elements of the at least one first delay chain have another orientation on the substrate than the delay elements of the at least one second delay chain, and a processing circuit configured to determine a magnitude of the strain applied on the substrate based on a first signal propagation delay time of the first delay chain and a second signal propagation delay time of the second delay chain.

Microelectronic structure comprising at least one movable mass that is mechanically connected to a first mechanical element by a first mechanically linking connector and to a second mechanical element (24) by electrically conductive second mechanically linking connector, and a device for electrically biasing the second mechanically linking connector, the second mechanically linking connector being such that they are the seat of a thermo-piezoresistive effect, the second linking connector and the movable mass being placed with respect to each other so that a movement of the movable mass applies a mechanical stress to the second linking connector, wherein the electrically biasing device are DC voltage biasing device and form, with at least the second mechanically linking connector, a thermo-piezoresistive feedback electric circuit.

A pressure detecting circuit may include a pressure sensing circuit (101), a signal generating circuit (102), and a frequency detecting circuit (103). The pressure sensing circuit (101) and the signal generating circuit (102) may be configured to constitute an oscillating circuit (104). The signal generating circuit (102) may be configured to generate an oscillating signal based on a pressure sensed by the pressure sensing circuit (101). The frequency detecting circuit (103) may be configured to detect a frequency of the oscillating signal and determine a value of the pressure sensed by the pressure sensing circuit (101) based on the frequency of the oscillating signal.

A hinge between a support and a movable part in an out-of-plane direction of a microelectromechanical structure includes two torsion beams, and two bending elements connecting the movable part and the support and each comprising two beams extending perpendicularly to the axis of rotation. Each beam is connected to the support by a first end and to the movable part by a second end, the first ends and the second ends of the beams being disposed with respect to one another in such a way that the orientation of the first end towards the second end of one beam is opposite to the orientation of the first end towards the second end of the other beam.

The invention relates to a method of fabricating a conductive fabric by vapor phase polymerization, a multi-pressure sensor for a fiber type, and a multi-pressure measuring method employing the multi-pressure sensor. The method of fabricating a conductive fabric by vapor phase polymerization provides a conductive fabric having a resistance value which changes depending on pressure applied by a user. The multi-pressure measuring method employing the multi-pressure sensor has high resistance to moisture and repeated loading, is manufactured with lower costs than existing pressure sensors, is capable of measuring both dynamic and static pressures using a principle of a piezo-resistive sensor, has a simple circuit configuration, and is strong against a high-frequency disturbance.

System and methods are provided for characterizing an internal surface of a lens using interferometry measurements. Sphere-fitting a distorted radius determines distorted pathlengths. Ray-tracing simulates refraction at all upstream surfaces to determine a cumulative path length. A residual pathlength is scaled by the group-index and rays are propagated based on the phase-index. After aspheric surface fitting, a corrected radius is determined. To estimate a glass type for the lens, a thickness between focal planes of the lens surfaces is determined using RCM measurements. Then, for both surfaces, the surface is positioned into focus, interferometer path length matching is performed, a reference arm is translated to stationary phase point positions for three wavelengths to determine three per-color optical thicknesses, and ray-tracing is performed. A glass type is identified by minimizing an error function based on optical parameters of the lens and parameters determined from known glass types from a database.

Aspects of the subject technology relate to an apparatus including a housing, one or more piezoresistive elements and a magnetic actuator. The housing includes a membrane, and the piezoresistive elements are disposed on the membrane to sense a displacement due to a deflection of the membrane. The magnetic actuator is disposed inside a cavity of the housing. The magnetic actuator exerts a repulsive force onto the membrane to reduce the deflection of the membrane.

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

An axial force measurement apparatus measuring an axial force of a bolt member by measuring a clamping force, of a nut member threaded onto the bolt member, which is applied to fasten a structure, includes: a sensor that applies vibration to the structure through one side of the tightened nut member and obtains, on an opposite side of the nut member, a signal by the vibration that propagates through the structure and passes through the nut member; and an analyzer that analyzes the signal received from the sensor and determines the axial force of the bolt member using a difference in propagation velocity of the signal by the vibration according to the clamping force of the nut member.