Various embodiments are directed to sensor apparatuses and methods thereof. An example sensor apparatus includes a plurality of capacitors and sensor circuitry. The plurality of capacitors including a first substrate having a plurality of first electrodes, a second substrate having a second electrode, and a dielectric material, and with the plurality of first electrodes and the second electrode being separated by the dielectric material. The plurality of first electrodes are aligned with respect to the second electrode such that each of plurality of first electrodes form one of the plurality of capacitors with the second electrode. The sensor circuitry is coupled to the plurality of capacitors to differentiate between normal and shear forces applied to apparatus based on a pattern of impedance responses of each of the plurality of capacitors formed by the second electrode and the plurality of first electrodes.

A force sensor includes at least one cavity defining at least two surfaces having different orientations. On each of said surfaces is disposed at least one respective detection structure sensitive to a pressure exerted on the corresponding surface. A resiliently deformable medium at least partially fills the cavity by coming into contact with the surfaces and defines a detection surface, on which a force to be detected is likely to be exerted. The application of this force is likely to generate stresses on each detection structure due to the transmission of forces by the medium.

Provided is a sensor that includes a sensing layer including a pressure detection unit, a dielectric layer provided on the sensing layer, the dielectric layer being deformable, and a conductive layer including a protrusion protruding toward the dielectric layer. The conductive layer is movable in an in-plane direction of the sensing layer.

Provided is a sensor that includes a sensing layer including a pressure detection unit, a dielectric layer provided on the sensing layer, the dielectric layer being deformable, and a conductive layer including a protrusion protruding toward the dielectric layer. The conductive layer is movable in an in-plane direction of the sensing layer.

A triaxial force sensor 1 includes nine first electrodes 11 to 19, and nine second electrodes 21 to 29 attached to an electrode support 10 in such a manner that the electrode support 10 is interposed between the nine first electrodes 11 to 19 and the nine second electrodes 21 to 29. A pair of first electrodes 14 and 16 are arranged such that a straight line connecting the two is orthogonal to a straight line connecting a pair of first electrodes 12 and 18, and the second electrodes 22, 24, 26, and 28 are arranged such that the respective halves overlap the first electrodes 12, 14, 16, and 18 in plan view. The sensor has a number of components and size, thereby allowing a reduction in manufacturing cost, in the case of detecting forces in orthogonal triaxial directions.

A triaxial force sensor 1 includes nine first electrodes 11 to 19, and nine second electrodes 21 to 29 attached to an electrode support 10 in such a manner that the electrode support 10 is interposed between the nine first electrodes 11 to 19 and the nine second electrodes 21 to 29. A pair of first electrodes 14 and 16 are arranged such that a straight line connecting the two is orthogonal to a straight line connecting a pair of first electrodes 12 and 18, and the second electrodes 22, 24, 26, and 28 are arranged such that the respective halves overlap the first electrodes 12, 14, 16, and 18 in plan view. The sensor has a number of components and size, thereby allowing a reduction in manufacturing cost, in the case of detecting forces in orthogonal triaxial directions.

A force detection system includes first and second sets of pressure sensors, memory, and a processing module. The first set of pressure sensors are in an insole of a shoe and the second set of pressure sensors are in an outsole of a shoe. The processing module receives first data regarding the first set of pressure sensors and generates a first digital representation of the first data. The processing module also receives second data regarding the second set of pressure sensors and generates a second digital representation of the second data. The processing module also writes the first and second digital representations to the memory.

A force detection system includes first and second sets of pressure sensors, memory, and a processing module. The first set of pressure sensors are in an insole of a shoe and the second set of pressure sensors are in an outsole of a shoe. The processing module receives first data regarding the first set of pressure sensors and generates a first digital representation of the first data. The processing module also receives second data regarding the second set of pressure sensors and generates a second digital representation of the second data. The processing module also writes the first and second digital representations to the memory.

Provided is a force sensor including: a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on its surface; a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface; a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer; and an inert substance that fills the internal space.

Provided is a force sensor including: a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on its surface; a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface; a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer; and an inert substance that fills the internal space.