An analog sensor with digital compensation function includes a deformation part generating a deformation relating to a pressure sensed by the analog sensor; a strain gauge connected to the deformation part and generating a change in resistance relating to the deformation; a strain gauge bridge connected to the strain gauge and transferring the change in the resistance of the at least one strain gauge to output a first analog signal; and an analog-to-digital conversion module converting the first analog signal to a first digital signal, representative of weight. A signal processing and output circuit compensates the first digital signal and converts it into a second analog signal.

A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.

Sensors and circuits for batteries are provided that prevent battery fires. The sensors and circuits are part of a battery management system that detects battery cell swelling and changes in the internal pressure of battery cells and removes the battery cells from service before they vent and catch on fire or explode. The sensors and circuits continually monitor every battery cell for swelling/increases in internal pressure that are indicative of the formation of flammable and explosive gases within the battery cells, and a battery management system that includes one or more of the sensors and circuits removes battery cells with issues from service before they vent and catch on fire or explode.

The present disclosure includes a pressure transducer comprising: a frame; a cantilevered beam; a resilient beam portion; a signal processing circuit; a wiring terminal; and a support member. The resilient beam portion anchors the cantilevered beam to the frame.

The cantilevered beam moves in response to a pressure-induced force applied to the cantilevered beam and the resilient beam portion bends producing a strain within the resilient beam portion. The support member comprises a cavity and the signal processing circuit is entirely installed inside the cavity. There is a strain gauge diffused into, implanted into, and/or affixed to the resilient beam portion. The cavity of the support member includes a first aperture disposed along the first surface of the support member and the inner surface of the frame covers the first aperture.

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

Sensor systems using piezoresistive materials are described that may be integrated with vehicle tires for use in a variety applications such as, for example, tire pressure monitoring, tread wear monitoring, anti-lock braking system control, suspension adjustment and/or control, wheel-drive system control, or road surface determination.

A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.

A pressure sensor includes an elongate body which deforms in response to an applied pressure having a cavity formed therein. An isolation diaphragm seals the cavity from a process fluid and is configured to deflect in response to applied process pressure from the process fluid. An isolation fill fluid in the cavity applies pressure to the elongate body in response to deflection of the isolation diaphragm thereby causing deflection of the elongate body. A deformation sensor is coupled to the elongate body and provides a sensor output in response to deformation of the elongate body which is indicative of the process pressure.

A microelectromechanical force/pressure sensor has: a sensor die, of semiconductor material, having a front surface and a bottom surface, extending in a horizontal plane, and made of a compact bulk region having a thickness along a vertical direction, transverse to the horizontal plane; piezoresistive elements, integrated in the bulk region of the sensor die, at the front surface thereof; and a cap die, coupled above the sensor die, covering the piezoresistive elements, having a respective front surface and bottom surface, opposite to each other along the vertical direction, the bottom surface facing the front surface of the sensor die. A conversion layer is arranged between the front surface of the sensor die and the bottom surface of the cap die, patterned to define a groove traversing its entire thickness along the vertical direction; the piezoresistive elements are arranged vertically in correspondence to the groove and the conversion layer is designed to convert a load applied to the front surface of the cap die and/or bottom surface of the sensor die along the vertical direction into a planar stress distribution at the groove, acting in the horizontal plane.

A method of determining fluid pressure inside a conduit. The method includes positioning a conduit in a surgical system. The conduit having an external surface, and the surgical system having a pair of sensors. The conduit is positioned in the surgical system such that the external surface of the conduit applies a force on the pair of sensors when the conduit expands. The method includes a step of generating one or more electrical signals with the pair of sensors. The one or more electrical signals corresponding to the force on the pair of sensors. The method includes a step of determining the fluid pressure inside the conduit by converting the one or more electrical signals into a fluid pressure value through a controller.